Size/Valve Type: 6 (25A, N.C.), Body/Port/Orifice: K (C37; Port 1;, Orifice 25), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 1A (Special Voltage, 48VAC, Grommet w/Surge Voltage Suppressor), Other Options: B (NPT Thread)
Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: H (C37; Port 3/4; Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 1A (Special Voltage, 48VAC, Grommet w/Surge Voltage Suppressor), Other Options: B (NPT Thread)
Size/Valve Type: 6 (25A, N.C.), Body/Port/Orifice: K (C37; Port 1; Orifice 25), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 1A (Special Voltage, 48VAC, Grommet w/Surge Voltage Suppressor), Other Options: B (NPT Thread)
Size/Valve Type: 5 (20A, N.C.), Body/Port/Orifice: H (C37; Port 3/4;, Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 1A (Special Voltage, 48VAC, Grommet w/Surge Voltage Suppressor), Other Options: B (NPT Thread)
Size/Valve Type: 6 (25A, N.C.), Body/Port/Orifice: K (C37; Port 1;, Orifice 25), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 1A (Special Voltage, 48VAC, Grommet w/Surge Voltage Suppressor), Other Options: B (NPT Thread)
Size/Valve Type: 4 (15A, N.C.), Body/Port/Orifice: F (C37; Port 1/2; Orifice 15), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 1A (Special Voltage, 48VAC, Grommet w/Surge Voltage Suppressor), Other Options: B (NPT Thread)
Size/Valve Type: C (20A, N.O.), Body/Port/Orifice: H (C37; Port 3/4;, Orifice 20), Voltage/Electrical Entry: Z (Other Voltages), Other Voltages and Electrical Options: 1A (Special Voltage, 48VAC, Grommet w/Surge Voltage Suppressor), Other Options: B (NPT Thread)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)