Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)]
Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C4 (ø4), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V)
Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: S (Table Type), Body Size: 10, Motor Size: L (Compact), Lead: K (LEP*6: 4; LEP*10: 5), Stroke: 50mm
Protocol: D (DeviceNetâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: Y (Rod Type), Body Size: 10, Motor Size: L (Compact), Lead: K (LEP*6: 4; LEP*10: 5), Stroke: 25mm
Protocol: L (IO-Link), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEP, Type: Y (Rod Type), Body Size: 6, Motor Size: Basic, Lead: J (LEP*6: 8; LEP*10: 10), Stroke: 75mm
Protocol: M (CC-Link), Mounting: 8 (DIN Rail Mounting), Cable Connector: S (Straight Type), Actuator: LEP, Type: Y (Rod Type), Body Size: 10, Motor Size: L (Compact), Lead: K (LEP*6: 4; LEP*10: 5), Stroke: 50mm
Parallel I/O Type: 6 (PNP), Mounting: 8 (DIN Rail Mounting), Cable Connector: None, Actuator: LEP, Type: Y (Rod Type), Body Size: 10, Motor Size: L (Compact), Lead: K (LEP*6: 4; LEP*10: 5), Stroke: 25mm
Parallel I/O Type: 6 (PNP), Mounting: 7 (Screw Mounting), Cable Connector: 1 (1.5), Actuator: LEP, Type: Y (Rod Type), Body Size: 10, Motor Size: L (Compact), Lead: K (LEP*6: 4; LEP*10: 5), Stroke: 25mm
Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 30mm, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: L (3m)
Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 10mm, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 10, Motor Size: L (Compact Type), Lead Screw Type, mm: K (LEP*6: 4; LEP*10: 5), Stroke: 75mm, Motor Cable Mounting Direction: Top Entry, Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 3
Size: 10, Motor Size: Standard, Lead Screw Type, mm: J (LEPS6: 8; LEPS10: 10), Stroke: 25mm, Motor Cable Mounting Direction: L (Entry on Left Side), Actuator Cable Type: S (Standard Cable), Actuator Cable Length, m: 1 (1.5)
Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10)
Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 08 (One-touch Fitting ø8), VAC: 10 (One-touch Fitting ø10), EXH: 10 (One-touch Fitting ø10)
® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type Facility water system Electrical system Facility water temperature +27F (15C) Circulating fluid temperature Conditions 50 to 95F (10 to 35C) Facility water temperature 7.9 gpm (30 L/min) 1.1 gpm (4 L/min) 10.6 gpm (40 L/min) 10.6 gpm (40 L/min) Circulating fluid rated flow 5.3 gpm (20 L/min) 2.6 gpm (10 L/min) 10.6 gpm (40 L/min) 6.6 gpm (25 L/min) Facility water required flow rate Temperature
Port Size: T1 (Single Unit Mounting NPTF 1/8), Switch & Voltage: 15 (Solid State Switch/10~26VDC), Lead Wire Length: L (3m)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa), SUP: 06 (One-touch Fitting ø6), VAC: 01 (Screw-in Rc 1/8)
Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa), SUP: 06 (One-touch Fitting ø6), VAC: F01 (Screw-in G 1/8)
Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: L (-48 kPa), SUP: 10 (One-touch Fitting ø10), VAC: 04 (Screw-in Rc 1/2)
Body Size: 10, Motor Size: L (Compact), Stroke: 4mm, Finger Option: Basic Type, Motor Cable Entry: F (Entry on the Front Side)