Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

Series 10-MGF ø40, ø63, ø100 Guide Table

8.7 120 X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

High Pressure Coolant Valve

(-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 36 44.4 57.7 66.4 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 TQ 70 92 109 631 A VNH Series Specific Product Precautions Be sure

HRX-OM-W002

(High pump head Rated current of leak voltage x size [Optional]) current (A) [mA] HRR012-A/W-101-phase AC100V (50/60Hz) 15 30 1-phase HRR018-A/W-10AC115V (60Hz) HRR012-A/W-2010 30 HRR018-A/W-203 cores x 14AWG HRR024-A/W-20(3 cores x HRR030-A/W-20HRR012-A/W-20-T 2.0mm2) 1-phase HRR018-A/W-20-T HRR024-A/W-20-T HRR030-A/W-20-T (including 200-230V AC ground) (50/60Hz) 15 30 HRR012-A/W-20-T1 HRR018

Guide Table Series MGF

Brown [Red] Load Load Switch 1 Blue [Black] Switch 1 Blue [Black] Brown [Red] Brown [Red] Switch 2 Switch 2 Blue [Black] Blue [Black] Power supply voltage Internal voltage drop Load impedance Load voltage at OFF = x 2 pcs. x Leakage current Load voltage at ON = x 2 pcs. = 1mA x 2 pcs. x 3k = 6V Example: Load impedance is 3k.

Slit Valve

width (mm) 32 x 222 46 x 236 50 x 336 Applicable wafer size Symbol 32 Note) Height 200 mm 46236 50336 300 mm Note) Neither cassette type Half MESK nor cassette type Full MESK are set.

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 10 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to

Speed Controller with

n + L17 x 2 L8 x n + L16 x 2 L8 x n + L25 x 2 L8 L8 Note 1) Refer to page 3 for L8.

HRX-OM-X071

Sensitivity (High pump head Rated current voltage x size of leak current [Optional]) (A) [mA] 3 cores x12AWG 1-phase (3 cores x HRR050-A/W-2020 200-230V AC 3.5mm2) (50/60Hz) (including ground) 30 4 cores 3-phase x14AWG 380-415V AC(50/60Hz) (4 cores x HRR050-A/W-4010 2.0mm2) 460-480V AC(60Hz) (including ground) Installation/operation in accordance with the UL standard For operate the product

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)], Bracket: N (w/o Bracket, Single Unit)

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

x 0.8)], Fitting (P Port): 0 [Without fitting (M5 x 0.8)]