CJ2X/CUX/CQSX/CQ2X/CM2X

, D-F9WV D-A9V D-M9, D-F9W D-M9V No. of auto switches mounted 2 pcs. 15 Note) 10 10 5 MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

CJ2X/CUX/CQSX/CQ2X/CM2X

, D-F9WV D-A9V D-M9, D-F9W D-M9V No. of auto switches mounted 2 pcs. 15 Note) 10 10 5 MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Rotary Table Series MSU

9, D-T99 D-9A, D-S99, S9P High precision type MSUA 90 3 Single vane 7 180 D-R73, D-T79 D-R80, D-S79, S7P 20 1 D-9, D-T99 D-9A, D-S99, S9P 90 Single vane 3 MSUB Double vane 180 7 D-R73, D-T79 D-R80, D-S79, S7P 20 Double vane is available with 90 rotation setting only.

KJ

d (inch) Applicable tubing O.D.

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

CNG

CNS D-H7C D-B5, D-B6, D-B59W CLS HS HS Auto switch Auto switch 12 8.5 CLQ 24.5 16 MLGP A B A B 33 38.2 RLQ MLU Proper Auto Switch Mounting Position Auto Switch Mounting Height ML1C Auto switch model D-C7/C80 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7/C80 D-C73C D-C80C D-B5/B64 DD-B5/B64 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-G5NTL D-B59W -X Bore size (mm) A B A B A B A B

LX Series Compact Electric Actuators

: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MDHR3-15 MDHR3-10 H L H When auto switch D-M9V is used When auto switch D-M9 is used When auto switch D-M9V is used Max. Protrusion of Auto Switch from Edge of Body: L, H Max. Protrusion of Auto Switch from Edge of Body: H (mm) (mm) D-M9V D-M9V D-M9N Auto switch model Auto switch model L H 1.3 The auto switch will not protrude in the case of D-F9. H 2.3 12-5-26

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Air Slide Table Series MXJ

4.5 4.5 22 18 18 8 13 14 4.5 4.5 3.5 3.5 29 29 18 18 9 8 13 Reed auto switch D-A9V Solid state auto switch D-M9V D-M9WV D-F8 D A Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

VM

D.

OMU0023

7th shift, ExOR A001h 1 1 1 1 1 0 0 1 1 1 0 1 1 0 1 0 1 61 8th shift 0 1 1 1 1 1 0 0 1 1 1 0 1 1 0 1 0 62 Convert result to hexadecimal value 7 C E D CRC data is "ED7Ch".

A_HEC-OM-K001

I C o n s t a n t Function Sets integral time used for PID control/ M O D E < 1 5 0 s e c 5.5 How to operate 5-10 A_HEC-OM-K001-1.7 Chapter 5 Operation <6> D constant setting: Mode indication D Constant Default value: 0 sec. Setting range 0.0 to 99.9 sec. Indicated contents D constant (Derivative time) D Constant indicates that it is D constant setting mode.

NAAMS Standards Compliant

Weight (Cylinder Without Clamp Arm) [kg] Bore size Arm position Arm opening angle Additional weight of the manually operated handle 15 30 45 60 75 90 105 120 135 50 R/L 3.3 3.3 3.3 3.3 3.2 3.2 3.2 3.2 3.2 1.7 D 3.4 3.3 3.3 3.3 3.3 3.3 3.3 3.2 3.2 63 R/L 4.6 4.6 4.5 4.5 4.5 4.4 4.4 4.4 4.4 1.7 D 4.7 4.7 4.6 4.6 4.6 4.5 4.5 4.5 4.5 Cylinder Stroke [mm] Bore size Arm opening angle 15 30 45 60

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

VQ7-6/7-8

20 or less Rubber seal 58.0 (3.2) VQ7-8-FHG-D45 or less Metal seal 50.4 (2.8) Closed center 0.75 VQ7-8-FHG-D-R 50 or less Rubber seal 50.4 (2.8) VQ7-8 VQ7-8-FJG-D45 or less Metal seal 54.0 (3.0) Exhaust center 0.75 VQ7-8-FJG-D-R 50 or less Rubber seal 58.0 (3.2) VQ7-8-FPG-D60 or less Metal seal 40.0 (2.2) Double check 1.98 VQ7-8-FPG-D-R 60 or less Rubber seal 40.0 (2.2) VQ7-8-FIG-D45 or

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233

MXW Series Long Stroke Slide Table

MXW25-175 490 6 63 34 142 275 155 225 60 MXW25-200 540 6 88 59 165 305 175 245 55 55 MXW25-225 1 590 7 113 84 187 335 200 275 60 67 MXW25-250 1 640 7 138 109 210 360 225 300 65 80 MXW25-275 1 690 7 163 134 232 395 245 320 60 60 52 MXW25-300 2 740 8 188 159 153 MXW Series Long Stroke Slide Table Auto Switch / Suitable Mounting Position at Stroke End Detection Reed switch: D-A90 (

VCL

(mm) A B C D E F G H J L Port size Bracket part no.