Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.? An angled supply port facilitates the supply of circulating fluid, even when units are?stacked.? A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?filter

Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.? An angled supply port facilitates the supply of circulating fluid, even when units are?stacked.? A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?filter

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

25

Comparison of potential amplitude between AC type and dual AC type (Installation height of sensor: 300 mm) 40 AC type Surface potential of workpiece (V) 20 25 V or less Dual AC type IZS42 0 20 40 Time Independent Dual AC type is implemented.

Ionizer Nozzle type IZN10 Series IZS

2 x 3.4 33 IZH 30 30 52 46 44 26 17 11 40 5 8 x 3.4 20 26 12 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Internal mounting Pivot mounting 21 33 (Mounting angle adjustable range) (90) 61 61 30 Pivoting bracket/IZN10-B2 20 3.4 56 64 28 20 (Mounting angle adjustablerange) 20 9.5 9 90 24 3.4 4 14 40 2 x Hexagon socket head cap screw M3 x 16 59 11 (Accessory) 18 457 IZN10 Series Dimensions

SMC Basic Pneumatics

6 1 20 o.174 o.2t7 0.260 0.304 0.347 25 o.272 0.340 0.408 0.476 0.543 32 0.446 0.557 0.668 0.779 0.890 40 0.697 0.870 !.

%silltr

6 1 20 o.174 o.2t7 0.260 0.304 0.347 25 o.272 0.340 0.408 0.476 0.543 32 0.446 0.557 0.668 0.779 0.890 40 0.697 0.870 !.

Title not found

Both sdes (2 to 20 siaiions) '!

Modular Type Filter Regulator Series AW

Note Description AW10, 20 AW30 AW40, 40-06 1 2 Body Bonnet Platinum silver Black Zinc die-cast Aluminum die-cast Polyacetal Replacement parts Part no. Description No.

STAINLESS STEEL CYLINDER

Port side side Minimum stroke 10 20 75 15 3.

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

ZL3-OM00801

No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s

D. P. Lube ALD600/900 Series

Lube/ALD600-06 to 10, ALD900-12 to 20 Float switch mounting position (Connection port center) AL800 AL900 ALF ALT ALD ALD ALB (Connection port center) LMU F (Bracket mounting dimensions) ALIP AEP HEP Bracket (Option) Bracket dimensions A B C D E Model Port size F 344 416.5 G 32.5 0 H 95 120 J 14 14 K 55.5 48 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 175 250 87.5 125 487 639 135 210

Direct Solenoid

o.s, ercept dyo6.. op.Btins PEssubs: 28" vacuum 0 PStc {20 Kgt/cnf)' NVS/tl|-4 Prssure Fanoe: 28" vacul 3@ rlc {20 Kgrcnti) Lakage: Irort lo pon (nt.maD not to .xce.d 0.005 coblc fl pr hinut at 1@ PstG (6.7 toam) Mel4islr: all houshc !6n. atumhum d|6 cas|ngg $oor arld stc@ a40F 61atnt6r. p.5rlvated ad hdtJoai.d lo 5a52 FE*wdl c 96* orlnot Blra N, sp&.r end dl.nl hou3in!

MHx-OMM0057

30 70 150 220 2,905 MHL2-32D1 120 198 318 3,820 32 20 MHL2-32D2 160 242 402 4,655 MHL2-40D 30 100 188 288 5,270 MHL2-40D1 160 246 406 6,830 40 20 MHL2-40D2 200 286 486 7,905 ) (mm) 10 16 20 25 32 40 (MPa) 0.15~0.6 0.1~0.6 () -10~60 (mm) 0.1 () (N) 0.5MPa 14 45 74 131 228 396 () 10,16,20,25 40mm 32,40 80mm 4 - 3. 3-1 3-2 3-3 1 ISO VG32 5 - 3-4 Nm mm Nm mm MHL2-10D M4X0.7 1.4 5

rep-modular-e

Nickel plating 1 8 Complete product No. indicated Hexagon socket head plug Handle R(PT) 1/4 Nickel plating 1 2 Flat washer Adjustment screw 10.5 x 20 x 1.2 Zinc chromate treatment 1 1 Zinc chromate treatment 447 Series AMR3000 to 6000 Replacement Procedure of Element 1 1.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Nickel plating 1 8 Complete product No. indicated Hexagon socket head plug Handle R(PT) 1/4 Nickel plating 1 2 Flat washer Adjustment screw 10.5 x 20 x 1.2 Zinc chromate treatment 1 1 Zinc chromate treatment 447 Series AMR3000 to 6000 Replacement Procedure of Element 1 1.

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

CG1-OM0227

GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3. CG1/CG1*A 3-3-1. 20 25 32 40 CG1N20Z-PS CG1N25Z-PS CG1N32Z-PS CG1N40Z-PS GR-S-010(10g) (10g) 1 GR-S-010 (10g) GR-S-020 (20g) 1 21 3-3-2. 22 3-4. 1.

AIR CYLINDER

Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5. Troubleshooting P.23 6. Construction P.26 7.