SFOD-OMT0009CN

/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) [mm/s] 70 80 100 120 [mm/s] 5 5 5 5 () [mm/s] 8 8 9 9 () 111 No.SFOD-OMT0009CN-B Revision history 2015 9 2019 3 C 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel + 81 3 5207 8249

SFOD-OMT0010

/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min. speed [mm/s] 7 8 8 8 (Speed tuning control) Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) Max. speed [mm/s] 70 80 100 120 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min

XLF Series

170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153 112 9 XL*-OMJ0003-D 5.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Electric actuators/Common precautions . 66 14.1 Design and selection . 66 14.2 Mounting . 67 14.3 Precautions for Use . 68 14.4 Operating environment . 69 14.5 Maintenance . 70 14.6 Precautions for electric actuator with lock . 70 15.

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

FILTER REGULATOR

2.3 35.5 42.5 21 7 AW40-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AW60-B 70 66 65.8 11 13 90 3.2 Dimension:B of auto-drain and optional bowl assembly Optional D C Standard 8 6 2 6 8 C 6C J 2J 6J 8J CJ 6CJ W 6W 2 6 C 6C 2 8 AW20-B 87.4 87.6 87.6 87.6 91.4 93.9 91.4 91.4 91.4 104.9 104.6 104.9 104.9 104.9 190.8 188.8 156.8 273.9 188.9 186.9 156.8 AW30-B 117.6 115 137.6 121.9 122.1

XLG Series

183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62 12.5 11 XL*-OMI0010-E 5.

CE

hole) 4 (Positioning pin hole) +0.05 +0.02 +0.05 +0.02 27 18 6 5.5 38 4-4.5 50 6 Series CEP1 20/Dimensions Direct mounting front tapped type CEP1B20 Stroke (Positioning pin hole) 4 depth 4 Cable end +0.05 +0.02 18 40 4 depth 4 Without connector +0.05 +0.02 (Positioning pin hole) 4 45 6 Metal connector Made by TAJIMI R04-J8M7.3 M14 x 1 4-5.5 through 9 counter bore depth 5.5 (500 or 3000) 25 70

CJ2

Weight (g) Bore size (mm) 6 10 16 Flange Foot Mounting Basic Basic weight 27 35 70 Mounting nut Standard Additional weight for each 15 of stroke 3 6 9 Rod end nut 16 16 40 Mounting bracket weight Foot Single knuckle joint Option 5 5 15 Flange Double knuckle joint This basic weight includes weights of mounting nut and rod end nut.

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

MHZ2/MHZJ2

Weight table Unit: g End boss type (symbol) Model W K M E MHZJ2-10 70 70 70 70 MHZJ2-16 165 165 165 165 MHZJ2-20 290 290 290 290 MHZJ2-25 525 525 525 525 19 Series MHZ2/MHZJ2 Auto Switch Common Specifications Auto Switch Common Specifications Solid state switch Type 1ms or less Operating time 1000m/s Impact resistance 50M or more at 500VDC (between lead wire and case) Insulation resistance

MIW/MIS

Because 2.5N < 48N. it is applicable. 30 20 18N 10 0 80 70 60 50 40 30 Because 2.1N < 18N, it is applicable. Point of application L (mm) Therefore select MIW (MIS) 12.

MXW

MXW8 MXW12 MXW16 MXW20 MXW25 Applicable slide table 0.98 2.94 5.88 19.6 58.8 Max. absorbing energy (J) MX 5 6 7 12 15 Stroke absorption (mm) 0.05 to 5 Max. collision speed (m/sec) Max. operating frequency (cycle/min) MTS Stroke adjustment 70 80 80 45 25 422 245 245 814 1961 Max. allowable thrust (N) MY 1.

SYJ3000/5000/7000

Station n L1 L2 Station 2 77 49 Station 20 419 391 3 96 68 4 115 87 5 134 106 6 153 125 7 172 144 8 191 163 9 210 182 10 229 201 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 1-5-69 70 Series SYJ7000 Flat Ribbon Cable Manifold [ ]: AC SS5YJ7-21PStations (-00) Approx. 300 (Lead wire length) 10 L2 L1 4-4.5 (For mounting) + 16.5 + + 1/8 (A

Compact Vacuum Ejector Series ZA

78 57.6 70 80 88 Approx. 3000 80 90 98 9.6 5.8 5 Suction filter 10 12 14 n x 10 M5 both sides common air pressure supply (P) port P P Note 1) The above dimensions are for ZZA103-00.

FILTER REGULATOR

2.3 35.5 42.5 21 7 AW40K-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AW60K-B 70 66 65.8 11 13 90 3.2 Dimension:B of auto-drain and optional bowl assembly Optional C D Standard 8 6 2 6 8 C 6C J 2J 6J 8J CJ 6CJ W 6W 2 6 C 6C 2 8 AW20K-B 87.4 87.6 87.6 87.6 91.4 93.9 91.4 91.4 91.4 104.9 104.6 104.9 104.9 104.9 275.8 190.8 188.8 156.8 273.9 188.9 186.9 156.8 AW30K-B 117.6 115 137.6

Air Filter

147.1 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 186.9 AF40-06-D 3/4 75 149.1 27 35.5 38.4 40 35.5 50 52 34 8.5 12.5 88 2.3 43 188.9 AF50-D 3/4, 1 90 220.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.9 AF60-D 1 95 234.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 273.9 Semi-standard specifications Metal bowl with PC/PA bowl Metal bowl level gauge With element Model With With With

CE

1.5 5 Width across flats 13 7 5 10 22f8 10f7 6 53 35.6 23 36 23 SR6 40 18 3 23 M8 x 1.25 70 36 18 7 2-M5 x 0.8 (Port size) 4-M5 x 0.8 Thread depth 10 74 20 114 + Stroke 31 145 + Stroke 2 10-12-14 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: 4-5.5 CEP1L20 Stroke (Positioning pin hole) 40 6 13.5 25 6 +0.05 +0.02 4 RE A B REC 68 85 CX CY MQQ M RHC

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Do not use it in a line that is kept pressurized because it could cause the body to break. 1106 Air Suction Filter Series ZFA Dimensions: ZFA 100 200 Single unit Bracket ZA ZX ZR Cover opened-up dimensions 70 Element extracted dimensions 55 ZM ZMA ZQ 2 x 4.5 ZH ZU 2 x Port size ZL Note) The above diagram is for ZFA200. The bracket location shows L side.