13.5 M12 x 30L 75, 100 101.5 10 to 50 110 120 CQ-C100 100 120 45 13 67 32 22 94 117 70 13.5 M12 x 30L 75, 100 The double clevis pin and retaining ring are not included.
1 Smooth Cylinder CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 RE A B Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure REC CX 0.04 Minimum operating pressure MPa CY 12 16 0.03 MQQ M 20 25 32 40 0.02 RHC 50 63 80 100 0.01 MK(2) 0 0 10 20 30 40 60 50 70 80 90 100 RS Q G Bore size mm RS H A (Measurement based on JIS B8377
Rotation angle: 90 Rotation angle: 180 Key or single flat Key or single flat Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 B port B port 0 10 o t 80 A port A port t fla e gl in s or R y 90 ot ke at 1 of io to e n ng 70 ra ra ng 1 Angle adjustment 5 n at e tio fl of ta le Ro k ng ey si o r 310 CRQ2X Series Low-Speed Compact Rotary Actuator Rack & Pinion Type Construction Standard
(psi) Nominal ~upport bracket nominal ~ymbo l symbol ~nd~cJjemallc diagram " Rod f1ang~: Head flange: --i '< "C II> 92 113 103 Fooi: L 44 G .F. " [I" , , III 1 L,F 73 79 70 86 :.T w~ 102 58 66 72 44 45 47 38 en 3 0 0 ~ "'i f" 27 73 34 33 G 22 102 27 26 (') 'cS. ,j" C. r '\ ~ T .
D 2 x 4.5 (Mounting hole) Manual override (Non-locking) Applicable cable O.D: 3.5 to 7 68.8 Max.10 78.4 70.9 (A port) n1 x Rc 1/8 300 Pg7 4 x Rc 1/8 (P, R port) (Lead wire length) 2 x 4.5 4 x Rc1/8 8 (P, R port) (Mounting hole) 2A 2A 2A 34 2.3 20 7 (Pitch) 7 44.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n L n: Stations 1 35 27 20 396 388 13 32 51 70
Max. 6 38 24.5 Symbol 3 port (A) 2 (A) 2 1.5 3 1.5 28 82 (110) 12 12 1 (P) R port (5 port only) 5 port (A) 2 (A) 2 12 12 1 (P) 3 (R) 3 (R) 32 16 40 R port (5 port only) 3 x 1/4 53.2 25 25 * 0.5 MPa supply 63.5 F .O.F .* 40 N T.T. 45 Foot pedal VM220-02-40A VM230-02-40A 3 x 6.5 mounting hole Symbol 2 port 54 71 (A) 2 152 12 10 159 1 (P) 177 3 port (A) 2 1/4 2(A) T.T. 12 10 1 (P) 3 (R) (70
(mm) Model Conversion Cv 1.2 1.3 1.5 3.9 5.0 4.5 5.8 7.0 11 9.1 15 17 23 17 23 26 34 30 40 41 62 41 66 49 70 73 100 Threaded Note) Flange Kv VNC1-6A VNC1-8A VNC1-10A VNC24-10A VNC2-10A VNC24-15A VNC2-15A VNC34-20A VNC3-20A VNC44-25A VNC4-25A VNC54-32A VNC5-32A VNC54-32F VNC5-32F VNC64-40A VNC6-40A VNC64-40F VNC6-40F VNC74-50A VNC7-50A VNC74-50F VNC7-50F 1 8 1 4 1.1 1.1 1.3 3.4 4.3 3.9 5.0
N.O. 20.5 NC 12 41.1 3R 1P 91 83 33 60 83 61.3 91 41.1 12 NO 3/8 1(P), 3(R) port 1/8 (Pitch) P = 33 12(PA) port 31 M5 x 0.8 (Breathing hole) L1 L2 7.5 (Station n) (Station 1) 1/8 12(PA) port 12 93.5 70 13.5 47.5 2A 2A 3/8 2(A) port (Pitch) P = 33 31 2 stations 95 80 128 113 161 146 194 179 227 212 260 245 293 278 326 311 359 344 392 377 425 410 458 443 491 476 524 509 557 542 590 575 623
44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70
Pallet Lock Cylinder Centering applied to correct positional deviation of up to 50 mm Through the toggle mechanism, max. clamping force of 4430 N Side view Top view Wheel Wheel Positioning and lock after stoppage of pallet 50 mm Pallet lock cylinder Arm opening angle: Approx. 70 A wide arm opening angle prevents contact with the workpiece.
70 Allowable voltage fluctuation 10% or less of the rated voltage Allowable leakage voltage DC 2% or less of the rated voltage AC 5% or less of the rated voltage Coil insulation type Class B Weight kg *8 Face seal fitting 0.28 0.41 0.42 0.53 0.62 Compression fitting 0.28 0.41 0.42 0.53 0.55 (Rc, NPT) Female thread 0.33 0.33 0.74 0.74 *1 The operating pressure differential indicates the
MODEL VM2 SMC 54 71 177 152 Lock lever LOCK UNLOCK T.T. 2.5 (70) 30 18.5 11 B A XT34-60/67 2 x Rc1/8 (Port 2, 4) 38.2 26.2 2 x M5 x 0.8 (Port 3, 5) Rc1/8 (Port 1) 14-E624 0.2 32 A 2 x M5 x 0.8 (Port 3, 5) 39.2 33.2 27.2 XT34-60/67 2 x Rc1/8 (Port 2, 4) Rc1/8 (Port 1) 3 x 6.5 mounting hole 53 XT34-67 (Without lock) 159 3 x 6.5 mounting hole MODEL VM2 SMC 54 71 177 152 T.T. 2.5 (70) 30 18.5
54 120 to 132 (Adjustable) 3 70 150 to 162 (Adjustable) 3 With adjustment bolt assembly Size: 150 Size: 120 ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR XT661 XT661 3 (1) (Adjustable) 90 3 (1) (Adjustable) 114 745
Gasket INLET OUTLET 277 ZFA Series Dimensions: ZFA 100 200 Single unit Bracket Cover opened-up dimensions 70 Element extracted dimensions 55 2 x 4.5 2 x Port size Note) The above diagram is for ZFA200. The bracket location shows L side.
2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 65 54 53 27.2 24.2 24 19.7 17.7 17.5 " " 15.2 18.5 21.7 14.4 15.5 50 15 12.5 22.5 26 48 12.8 8.5 52 57 64.5 28 30 34 9.5 11 13.5 24.5 27 30.5 13.5 14.5 16.5 16 17 21.5 61 65 81 17.5 21.5 25.6 16.6 18 23 70 87.5 30.2 34 21.7 24 280
.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8 74.5 6 90 78 6.5
H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.
(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86
6 SMC Actuators: Copper-free Rotary Actuators Size: 1, 3, 7, 10, 20, 30, 50, 70, 100, 200 Size (Torque) Rotary Actuators Series Application Standard Copper-free 1 3 7 10 20 30 50 70 100 200 Series variations Rotary table Series MSU Basic type MSU With auto switch MDSU Rotary table Series MSQ 20-MSQ Basic type (Adjusting bolt type) 20-MSQA High precision type (Adjusting bolt type) 20-MSQR
RHC MTS CC Rear flange 4-R chamfer GB Rc(PT)P NN GA FZ Rc(PT)P Width across flats NF FX 4-FD MM H1 I FW D ND NE NB FY C Effective thread NC E E 10 FTH2 NA B WH 10 JD N A K F N JC S+Stroke F H ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Eff. thread length 15.5 19.5 19.5 21 Bore (mm) 20 25 32 40 H1 5 6 6 8 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 FZ 68 70