20

2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 100 100 106 150 150 156 6 12 300 300 306 600 600 606 100 100 106 150 150 156 8 14 300 300 306 600 600 606 Note 1) Reference dimensions after installation Note 2) Copper extension nozzle and self-align fitting are included in the same package, (but unassembled).

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Digital Flow Switch (Integrated display type) ( compatible)

(For the 100 L/min types, the piping length should be 11 cm or longer.)

Air cylinder

L = Stroke 1 2 , or more than 100 mm 1 7 5 4 6 2 6 5 7 3 L L Fig. 11 Position for application of grease Table 10 Amount of grease units: g Stroke 32 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1 1.5 2 3 26 3-2-4.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

applied F Table deflection due to roll moment load Displacement at A when load is applied F A A F A F F L L L L dimension mm L dimension mm L dimension mm MXY6 MXY6 MXY6 100 100 100 MXY8 MXY8 MXY8 100 100 100 MXY12 MXY12 MXY12 140 140 140 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Fluoropolymer Tubing Variations

0.4 0.1 0.05 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Operating temperature C How to Order 1.2 Metric size Max. operating pressure MPa D 20 TLM0425 N 1.0 0.8 E Tubing designation Length per roll Symbol 10 20 50 100 2S 0.6 F Type Length 10 m 20 m 50 m 100 m 2 m 0.4 Color indication G Roll Symbol N R BU B Color Translucent (Material color) Red (Translucent) Blue (Translucent) Black

Table of Contents - Tubing

I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.

F

R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S

Digital Flow Switch (Integrated display type) ( compatible)

(For the 100 L/min types, the piping length should be 11 cm or longer.)

High-precision Digital Pressure Switch

Incorrect pressure setting 5 -79No.PS-OMV0009-E Problem No.

PSxx-OMV0008CN

-2No.PS-OMV0008CN-E / *3) 1 1.5 3) 1 1 () [] -3No.PS-OMV0008CN-E () () () () -4No.PS-OMV0008CN-E () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) (ISE7G-T-ZS-48-A) N G -5No.PS-OMV0008CN-E Al2O3(96)C3604+FKM () O 1 /min 16MPa () * FG (35 N () ,() *() 6 33 -6No.PS-OMV0008CN-E () () 20 m DC(-)() * () () CE -5~70-5~50(5 ) (FKM) Al2O3()C3604()( ) -7No.PS-OMV0008CN-E

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Fieldbus system EtherNet/IP TM compatible SI Unit

0x02 0X06 0002 0064: Force 100 Mbps/Full duplex Ex.

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve/

M12 connector pin number Wiring specification w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Ionizer Gun

1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350

Rotary Table/Vane Style Series MSU

V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord Heavy-duty cord 100 V 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2-wire 24 V MDSUA20 100 V PLC Reed switch IC circuit 48 V, 100 V 100 V 24 V or less Auto switches marked with are made-to-order specifications.

Wedge Cam Operation Provides

7 e w o Fingers open Normally open !9 t y !5 i u !6 q r !0 !1 !2 Fingers closed Normally closed !4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

Compact manifold regulator ARM5 Series

150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1

Table of Contents

200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600