Transfer

G A G 2 x PA (Hexagon socket head taper plug) F I B + Stroke 2 x PA (Port for operating cylinder) J J J J D D II 2 x MB, Depth LB II 2 x PB (Hexagon socket head taper plug) 2 x PB (Hexagon socket head taper plug) JJ 28 32 36 A 110 140 170 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 G 30 37 45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15

Environment

Nil Without cable 2 2 5 5 A 10 !

MRHQ

D20Sizes 10 and 16 updated!

CG5-S

100 14 10 29 20 71 16 110 M12 x 1.75 10 26 8 M26 x 1.5 131 212 100 to 750 Flange brackets and plug bolts are installed before shipment from factory.

Pneumatic Transfer System Series MF

508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15 32 15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C

IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

Compact Cylinder

Minimum lead wire bending radius 10 H thread effective depth C 4 x N through F Q I E M Z A + Stroke B + Stroke L W G M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N P Q W Z A B A B 50 10 to 50 37 29 42.5 34.5 15 18 57 9 M10 x 1.5 74 6.5 16 8 46 5.5 1/8 13 63.5 15 63 10 to 50 41.5 33.5 46.5 38.5 15 18 70 10 M10

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

COQ2BP

~er ~ Zone 10 Distance From Auto Switch Top Face 0 5000 10 15000 20 Welding Current CAl .. ... i1 SO >. . /" /. 40 Sai. Zone ..

15

1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NY M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M3 x 0.5 5.5 45 30 5 11 38 NX M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 4.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NM1 M3 x 5 0.63 M3 x 8 0.63 M4 x 10 1.5 5 11.8 19 3.4 7.0 31 28 3.5 8.5 42 NM2 M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 6 48 19 3.4 7.0 31 28 3.5 8.5 42 25 NZ M3 x 12 1.5

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9

240

0 e Lead screw type [mm] r Stroke [mm] q Size w Motor size 6 10 Symbol Motor size Applicable size Nil Basic 6, 10 L Compact 10 Symbol Screw lead LEPY6 LEPY10 K 4 5 J 8 10 Symbol Stroke 25 25 50 50 75 75 y Actuator cable type*1 t Motor cable mounting direction Nil Without cable S Standard cable R Robotic cable (Flexible cable)*2 Top entry Entry on the left side Nil L *1 The standard cable

CNS

Graph (1) 30 20 10 2.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

K H + Stroke S + Stroke FX H ZZ + 2 strokes FZ (mm) Bore size (mm) A a B B C d E F FD G GA J K M MA MM NA P D FT FX FY FZ H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 23 10 60 60 44 18 45 25 9 14 17.5 M8 x 1.25 18 16 20 M14 x 1.5 30 1/4 17 10 77 44 95 66 50 25 9 73 73 53 20 50 28 11 17 17 M10 x 1.5 20 22

CXS

Dual-Double-Rod Type CXSW Series CXSJ 6, 10 How to Order Piping Standard piping Axial piping Nil P CXS P 6 M 50 A90 J S Number of auto switches 2 pcs. 1 pc.

C76

Construction 6-10-46

C76

Construction 6-10-46

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.