JXCx-OMU0004

[7] ALARM OFFRESET OFF STOP ON OFF OFF [8] IN013 ON 11 2 OUT0 ON OFF [9] BUSY ON [10] BUSY ONIN013 OFF bit_0 OFF ON OUT1 bit_1 [11] BUSY OFFOUT0 13 ON OUT2 ON OFF bit_2 [12] OUT013 ONIN13 ON10 OUT3 ON OFF bit_3 [13] BUSY ON OUT0 1 OFF ON BUSY 3 OFF [14] BUSY ONIN13 OFF OFF ON ALARM [15] BUSY OFFOUT1 3 ON 0 49 No.JXC-OMU0004-A 10. 10.1 LEF LEF LEFB LEFS 16,25,32 16A 16B 25H 25A

JXCx-OMT0023

Driver Inrush currents (A0-P) Main circuit power supply (L1 L2) Control circuit power supply (+24V 0V) LECSA2130A (Attenuated to approx. 5A in 5ms) 25A (Attenuated to approx. 0A in 4 to 6ms) Since large inrush currents flow in the main circuit power supply, always use no-fuse breakers and magnetic contactors. (Refer to section 11.5.)

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

Note Diaphragm Assembly Note4) Tightening torque(N.m) Product number At normal At high At normal At high temperature temperature temperature temperature VXF(A)21A(A,B,C,D) VXF-21AA VXF-21AC 5.26.3 6.37.3 VXF(A)22A(A,B,C,D) VXF-22AA VXF-22AC VXF(A)23A(A,B,C,D) VXF-23AA VXF-23AC 24.529.5 29.534.3 VXF(A)24A(A,B,C,D) VXF-24AA VXF-24AC VXF(A)25A(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26A

Programless controller Step motor (servo 24 VDC)

LEFB LEFS 16, 25, 32 common 16A 16B 25H 25A 25B Direction Motor side Return to origin Speed [mm/s] 60 30 Acceleration[mm/s2] 1000 Speed [mm/s] 48 10 5 20 12 6 Jog Acceleration[mm/s2] 1000 Inching Distance [mm] 5 1 LEFS 32H 32A 32B 40H 40A 40B Direction Motor side Return to origin Speed [mm/s] 30 Acceleration[mm/s2] 1000 Speed [mm/s] 24 16 8 30 20 10 Jog Acceleration[mm/s2] 1000 Inching Distance

Digital Flow Switch (Remote type sensor unit)

(with 500 VDC) between the terminals and housing Standards and regulations CE marking, UL(CSA), RoHS PPS, FKM, CPVC Wetted materials Non-grease type Piping port size 4 25A union 30 A Without lead wire 270 g 325 g Weight With lead wire 355 g 410 g 1: Please refer to the chart of measurement range of ethylene glycol aqueous solution on page 32.

smcmaintenancepartslist

Content and quantity Clamp arm Cotter pin Applicable hole diameter For 13 hole For 15 hole For 16 hole For 18 hole For 20 hole For 25 hole For 30 hole CKQG-13A CKQG-15A CKQG-16A CKQG-18A CKQG-20A CKQG-25A CKQG-30A 1 1 1 1 1 1 1 1 1 1 1 1 1 1 For 20 hole (Round/With Shim) 183 Pin Clamp Cylinder/Compact Cylinder Type Series CKQG32 Construction CKQG32-100RH-X2082 e Tube gasket w Rod seal q Piston

High Purity Fluoropolymer

1 2 2 3 3 3 4 4 5 5 6 6 Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" Class 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 15A 20A 25A

3 Port Air Operated Valve Series SYJA300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

PA3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

V100

size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor VKF Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A

VP3145/3165/3185

size (IN, OUT port) Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge voltage suppressor VKF Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VPA4

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

VP4

terminal with indicator light DL DIN terminal with indicator light Piping Option EVS 0 Bottom ported 1 Side ported Port size Rated voltage VFN 4 Without sub-plate Applicable valve model Port size 1 100 VAC, 50/60 Hz Symbol Option Without sub-plate VP454 2 200 VAC, 50/60 Hz 00 3 110 VAC, 50/60 Hz VP474 4 220 VAC, 50/60 Hz (10A) 3 8 (15A) 1 2 03 04 5 24 VDC VP450 6 12 VDC 06 (20A) 3 4 10 (25A

VQ5000

) 0.33 0.33 0.33 b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Individual EXH spacer VVQ5000-R-1EXH block plate VVQ5000-16A-2 Blanking plate assembly VVQ5000-10A-1 Individual SUP spacer VVQ5000-P-103 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP block plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A

Parallel I/O Type: P (PNP), I/O Cable Length, m: No Cable, Option: Screw Mounting, Actuator: LEFS (Ball Screw Drive), Accuracy: Basic, Size Motor Mounting and Lead: 25A (Size 25, 12mm Lead), Stroke: 150mm

Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32

1 Controller mounting * Select the LECP2 when setting the stroke range using the stroke adjustment unit or an external stopper. 11LEJS Nil Without cable (Without communication plug connector)*2 Nil Screw mounting D DIN rail mounting* 1 1.5 m 3 3 m 5 5 m S Straight type communication plug connector*2 25A* DIN rail is not included. Order it separately.

VXZ

J Stainless steel F 24 VDC 6 25A N.C. K C37 Stainless steel 1 25 G DIN terminal 24 VDC D N.O.

Coolant Valve: Air Operated/External Pilot Solenoid VNC Series

CE-compliant Nil Q CE-compliant Note) Electrical entry: D or DZ only Manual override Valve size Valve type Port size Rated voltage Nil: Non-locking push type Nil Air operated Symbol Orifice diameter (mm) Symbol Port size Rc 1 2 4 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)