Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø100, Bowl Shape: RB (Bowl Bellow), Material: FS (FS61, Fluoro-based Rubber, Green), Buffer: JB, Buffer Stroke: 10mm, Mesh Filter: MF (w/Mesh Filter)

Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø50, Bowl Shape: RB (Bowl Bellow), Material: FS (FS61, Fluoro-based Rubber, Green), Buffer: JB, Buffer Stroke: 10mm, Mesh Filter: MF (w/Mesh Filter)

Vacuum Inlet Direction: Y (Lateral), Pad Diameter: ø32, Bowl Shape: RB (Bowl Bellow), Material: FS (FS61, Fluoro-based Rubber, Green), Buffer: JB, Buffer Stroke: 10mm

Vacuum Inlet Direction: Y (Lateral), Pad Diameter: 25 (ø25), Pad Form: B (Bellows Type), Pad Material: FS (FS61), Buffer Specification: JB (Rotating, w/Bushing), Buffer Stroke: 20, Mesh Filter: MF (with Mesh Filter)

Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø80, Bowl Shape: RB (Bowl Bellow), Material: FS (FS61, Fluoro-based Rubber, Green), Buffer: JB, Buffer Stroke: 50mm

Pad Diameter: ø125, Pad Material: N (NBR), Buffer Specification: JB (Rotating w/Bushing, Material: Brass), Buffer Stroke: 100mm

Vacuum Inlet Direction: T (Vertical), Pad Diameter: 50 (ø50), Pad Form: C (Flat Type w/Ribs), Pad Material: FS (FS61), Buffer Specification: JB (Rotating, w/Bushing), Buffer Stroke: 30

Pad Diameter: ø100, Pad Type: H (Heavy-duty, Flat w/Rib), Pad Material: N (NBR), Buffer Body Material: JB (Brass + w/Bushing), Buffer Stroke: 50, Vacuum Inlet Thread Size: N01 (NPT1/8), Mounting Thread Size: A22 (M22 x 1.5)

VK3000

Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 NPTF VP4 VZS Type 40: Base mounted (A, B port bottom ported) Applicable solenoid valve VK3140 VK334 How to Order VV5K3 40 05 M5 Type VK334 Type VK3140 VFS Thread type R port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Applicable blanking plate assembly VK3000-7-1A Valve stations VS4 Nil F N T Rc 01 1 station G NPT VQ7 20 20 stations NPTF A port: M5 x 0.8 EVS

Intrinsically Safe Valve

15.5 15.5 48 4 2 x 4.3 (For mounting) M5 x 0.8 (External pilot port) 4 Insulator: Black () B A 17.5 17.5 B A PE Insulator: Red (+) X Manual override P EB EA 35 17 17 56 62.5 65.4 M5 x 0.8 (Pilot EXH port) 153.6 L (Lead wire length) 1.55 0.3 mm2 22 9.5 66.5 (E-type) 18 18 5 x 1/4" (Piping port) 28 L-type plug connector with cover (LL) 2 A B C 53-SY5 40(R)-LL-02 L

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

CL

x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Piping port M5 x 0.8 Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 71 46 6 Head cover port in axial direction (R) M5 x 0.8 Rod side cylinder port 31 Lock nut M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14

VK300

Port size (A port) Option M5 M5 x 0.8 01 1 8 Nil None With bracket (Not assembled) P, R port: M5 Note1) AC-type models that are CE-compliant have DIN terminals only. Note2) For other rated voltages, please consult with SMC. F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

LEC-OM07605CN

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

PA300/500/700

26.1 3.5 7 (Bottom existing hole) M5 x 0.8 through hole 1(P) 3(R) 77.2 A B Body ported: VPA542V26.1 31 3.5 NO NC 2(A) 32 26 Switch mark 24.2 41.5 (Mounting hole) 24.2 Bracket (Mounting groove for M5 thread) 2-R 2.7 (PA port) Rc 1/8 PA 45.9 40.5 45 45 28 4.5 1.6 41.6 22 60 50 9 90.9 (Piping port) Rc 1/4, 3/8 30.7 26.1 3.5 7 1(P) 3(R) (Bottom existing hole) M5 x 0.8 through hole 77.2 5-5-17

XL

(10-32 nominal) Rc(PT) 1/8 XLF Actuation port size M5 (10-32 nominal) Ports P, R Rc(PT) 1/8(Port P): M5(10-32 nominal) (Port) XLFV 0.06 0.09 0.11 0.15 0.4 0.5 Actuating solenoid valve recommended Cv factor (XLF) Service life (Million cycles) 3 2 0.25 (0.55) 0.45 (0.99) 1.1 (2.43) 1.6 (3.52) 3.0 (6.61) 4.8 (10.58) XLF Weight kg (lb) XLFV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.66 (3.65) 3.06

CL

Double Acting, Single Rod Rod Side Flange Style (F) E D P CLJ2F1619 16 2 8 Silencer 12 25.5 Spring lock CL Piping port M5 x 0.8 CL1 Head cover port in axial direction (R) MLGC Manual unlocking cam M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking 71 46 6 M5 x 0.8 unlocking port Unlocked when pressurized CNG 31 M5 x 0.8 Rod side cylinder port Lock nut MNB

MHF2

+0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x

MHF2

MHZ MHF MHL 2-M5 x 0.8 thread depth 12 MHR Mounting thread 6 79.5 5 MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Finger closing port Mounting thread MHC 26 74 10.6 MHT E MHY 20 20 24 33 MHW E MRHQ 2-4.3 through

Modular F.R.L. Unit

-M5 Y2401 02 Y3401 02 Y3402 03 Y4403 04 Y5401 02 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.