Wireless System

End Plate (D side) p. 11 Dimensions p. 12 LED Display p. 15 Technical Data p. 22 Important p. 22 Safety Instructions Back Cover 6 Wireless System EX600-W Series RoHS How to Order EN W EX600 1 SI Unit Wireless compatible Output type Symbol Specifications 1 PNP 2 NPN SI unit Symbol Specifications Note EN Wireless master unit For EtherNet/IP SV Wireless slave unit Wireless master

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

D-F6N/D-F6P/D-F6B

(Product with a lead wire length of 0.5 m is not available.) 18 Prior to Use Auto Switches Common Specifications 2 Refer to the Auto Switch Precautions on pages 8 to 11 before using auto switches. Meaning Term Hysteresis A deviation amount between the ON position and OFF position caused by auto switch characteristics (difference in sensitivity between ON and OFF).

Air Catch Sensor

When the Hysteresis exceeds 10m use the Air-Catch Sensor as a confirmation of position of work piece. : Stable adjustment range Detection side nozzle: 1.0 Detection side piping: 6 X 4 tubing Detection side nozzle: 2.0 Detection side piping: 6 X 4 tubing Detection side nozzle: 1.5 Detection side piping: 6 X 4 tubing 70 70 70 60 60 60 Supply pressure Supply pressure Detection not possible 50

Electric Actuator Triple Axis P&P Unit

Stroke+191 (23) Rreference plane (25) Stroke+15 130 21 63.5 Stroke+214 130 LG-240Z-Y 1 LG-240Z-Z 2 120 (23) 86 (90) Stroke+15 60 Stroke8 (For 100 to 150 strokes) 192 (For 200 to 1000 strokes) Stroke+191 Stroke+214 Select the unit specifications after confirming the Y and Z axes specifications. 1 ) For detailed dimensions and specifications, please refer to the body dimensions.

VXH

Electrical entry Rated voltage G Grommet 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz C Conduit D DIN terminal 3 110 VAC 50/60 Hz T Conduit terminal 4 220 VAC 50/60 Hz 7 240 VAC 50/60 Hz Refer to the table (1) given below for availability. 8 48 VAC 50/60 Hz 9 Other (Only AC) Table (1) Rated VoltageElectrical Entry-Electrical Option Caution Insulation type Electrical entry Electrical option 1 (100

Compact Proportional Solenoid Valve Series PVQ

) 24 VDC 12 VDC SRP PVQ30 (2.3) SRF 120 ARX20 P = 0.35 MPa 100 P = 0.25 MPa VCHR Flow rate (l/min) 80 P = 0.18 MPa ITV 60 P = 0.1 MPa 40 IC 20 PVQ 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC VEF VEP VER PVQ30 (4.0) VEA 120 100 P = 0.12 MPa VY2 Flow rate (l/min) P = 0.08 MPa 80 VBA VBAT P = 0.06 MPa 60 AP100 40 P = 0.04 MPa

Digital Flow Switch (Integrated display type)

1.0 to 40.0 L/min 1.0 to 42.0 L/min 0 to 42 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2 to 100 L/min 2 to 105 L/min 0 to 105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 2 to 90 L/min 2 to 95 L/min 0 to 95 L/min 4.60 V 18.4 mA 70% 30% 2 to 80 L/min 2 to 84 L/min 0 to 84 L/min 4.20 V 16.8 mA 60% 40% Other specifications are the same as the standard product.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 10 40 60 L1 16 40 L2 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D 60 20 40 60 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 40 30 32 20

0.01

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground

Booster Regulator Series VBA1110 to 4200 1

Q [l/min(ANR)] = x D2 x W x (P2 + 0.101) x 60 x C 6 4 x 10 0. 101 VBAT10, VBAT20, VBAT38 Q [l/min(ANR)] = x 1002 x 200 x (0.8 + 0.101) x 60 x 1 = 841 4 x 106 0. 101 Select booster regulator size from flow characteristics table. Refer to page 14-9-3 for flow characteristics.

ZMA

40 60 40 40 40 40 27 27 27 40 27 Suction flow rate Suction flow rate Suction flow rate Suction flow rate 20 13 13 13 13 20 0 60 40 20 0.6 0.3 0.5 0.4 0.2 0 0.1 0 60 40 20 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate (l/min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-26 7 Series ZM Vacuum Ejector: With Solid State Timer Exhaust Characteristics/Flow Characteristics

Hz)kWHeating capacity Note 4) kWTemperature stability Note 5) CPump capacity Note 6)(50/60 Hz) MPaRated flow Note 7) (50/60 Hz) l /minTank capacity lPort sizeWetted parts materialTemperature range CPressure range MPaRequired flow rate Note 8) (50/60 Hz) l/minPower supplyApplicable ground