AN

B1 03 AN Port size Symbol Port size Connection 01 1 8 02 1 4 03 3 8 VEX 04 1 2 Screw-in 06 3 4 1 4 10 1 AN 12 1 Model (One-touch fitting connection) 1 2 1 14 AMC C06 C08 C10 (6 One-touch fittings size) (8 One-touch fittings size) Model One -touch fitting size Effective area (mm2) Weight (g) Dimensions (mm) One-touch A B (10 One-touch fittings size) ANB1-C06 8 5 52 16 6 8 10 ANB1-C08 13 12

Sine Cylinder Series REC

10 D-B5/B64 D-B59W 8 9 10 10 13 14 14 13 D-H7/H7W D-H7NF/H7BAL 4 4.5 5 4 D-H7C D-A3/D-A44 D-G39/D-K39 D-G5NTL D-G5NBL 7 9 10 8.5 9 9 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Sine Cylinder Series REC

10 D-B5/B64 D-B59W 8 9 10 10 13 14 14 13 D-H7/H7W D-H7NF/H7BAL 4 4.5 5 4 D-H7C D-A3/D-A44 D-G39/D-K39 D-G5NTL D-G5NBL 7 9 10 8.5 9 9 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

Table of Contents

10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Soft Start-up Valve AV2000/3000/4000/5000 1

3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular

A

98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

REA/REB

driving force Fn (N) 50 100 100 40 30 CE1 20 30 40 50 20 30 40 50 20 CE2 10 Usable range 10 ML2B 10 Usable range Usable range 5 5 5 C J G5-S CV 1 1 0 2 3 4 5 6 1 1 0 2 3 4 5 6 1 7 8 9 10 11 12 13 7 8 9 10 11 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC

REA/REB

ST) 3 10 (1.5 1.3 x 103 x ST) 10 (1.71 1.3 x 103 x ST) = Max. load weight (kg) 3 7 12 20 30 50 7 12 Stroke (Max.)

HRX-OM-W002

BL BL BL WH WH WH YL YL OR OR BK RD RD RD BL BK BK 2/2 1/2 1/2 2/2 3 3 (CN7) (CN2) (CN3) 2 2 1 1 (CN5) (CN1) (CN1) 22 23 25 26 27 28 23 35 36 (CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main

REA/REB

50 30 20 20 Usable range 10 10 10 Usable range Usable range 5 5 5 1 0 1 2 3 4 5 6 10 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 1 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 80 REAR40 50 40 30 REAR32 REAR25 20 Load weight

HRX-OM-X084

2.2.2 HRR010-W-10/20. 2-6 2.3 Function of Parts . 2-7 2.4 Operation display panel . 2-8 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Location . 3-4 3.2.3 Installation and Maintenance Space . 3-6 3.3 Installation . 3-7 3.3.1 Mounting. 3-7 3.3.2 Electrical wiring . 3-8 3.3.3 Preparation and wiring of power supply cable .3-

LEC-OM02904

15 P()-N() () (1) (2) (3) (4) (5) (6) 2 7 2 2.6 10 10 13(23) 12.2 (1) (40) 10 (2) 10 (3) 1 3 2 3 2 8 3 3 . 2 3.1 . 3 3.2 . 7 3.3 . 9 3.3.1 . 9 3.3.2 . 10 3.3.3 CNP1CNP2CNP3 . 12 3.4 . 19 3.5 () . 20 3.6 . 23 3.7 . 24 3.7.1 . 24 3.7.2 . 25 3.7.3 . 27 3.8 . 28 3.9 SSCNET . 29 3.10 . 31 3.10.1 . 31 3.10.2 . 32 3.11 . 33 3.11.1 . 33 3.11.2 . 34 3.11.3

Series VQ Base Mounted Metal Seal/Rubber Seal

Example) Lead wire length 1000mm VQ1110N-5LO 3 pcs. AXT661-14AN-10 3 pcs.

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

Series VCS

Add a "" in front of the part numbers for solenoid valves, etc., to be mounted. 2 3 4 Class 2 Class 3 Class 4 Enter together in order, counting from station 1 on the D side. OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations D side U side 1 2 3 4 5 n Body material Brass Symbol D H Seal material FKM FKM 02 : 10 2 stations : 10 stations All IN ports are 3/8.

VCW

Add a "" in front of the part numbers for solenoid valves, etc. to be mounted. 2 3 4 Class 2 Class 3 Class 4 Enter together in order, counting from station 1 on the D side. OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8.

HRX-OM-X071

cooled type) . 2-4 2.3 Function of Parts . 2-5 2.4 Operation display panel . 2-6 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Location . 3-4 3.2.3 Installation and Maintenance Space . 3-6 3.3 Installation . 3-7 3.3.1 Mounting. 3-7 3.3.2 Electrical wiring . 3-8 3.3.3 Preparation and wiring of power supply cable .3-10 3.3.4