Slit Valve 2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
type=GUIDE&id=XLA-E" target="_blank">here. (Details on the XL series valve with a heat-resistant auto switch can also be found in the new XL series catalog.) 
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
EM, E, "HYDRAULIC ELEMENT EB, 633 lb
Part Number Description: INTERNAL O-RING FOR XLAQ-40 Product Line: Z Product Line Description: VACUUM SERIES Click here to report information errorImage shown may not match exact part number
Part Number Description: INTERNAL O-RING FOR XLAQ-25 Product Line: Z Product Line Description: VACUUM SERIES Click here to report information errorImage shown may not match exact part number
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11
Thread: Rc, Port: 2 [1/4", (1000, 2000)], Stations: 2 Stations, Pressure: 2050 (0.9 MPa), Protocol: SEN (Ethernet I/Pâ„¢)
Thread: Rc, Port: 2 [1/4", (1000, 2000)], Stations: 2 Stations, Pressure: 2010 (0.1 MPa), Protocol: SEN (Ethernet I/Pâ„¢)
Thread: Rc, Port: 2 [1/4", (1000, 2000)], Stations: 2 Stations, Pressure: 0.9 MPa, Protocol: Ethernet I/Pâ„¢
Thread: Rc, Port: 2 [1/4", (1000, 2000)], Stations: 2 Stations, Pressure: 0.1 MPa, Protocol: Ethernet I/Pâ„¢
Thread: Rc, Port: 2 [1/4", (1000, 2000)], Stations: 2 Stations, Pressure: 0.9 MPa, Protocol: Ethernet I/Pâ„¢
Thread: Rc, Port: 2 [1/4", (1000, 2000)], Stations: 2 Stations, Pressure: 0.5 MPa, Protocol: Ethernet I/Pâ„¢
Connection: 2 (Nozzle Size 0.7mm)