SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

IDX-OM-M051

freezing . 2 9 2 3 1 Drainage of the facility water circuit . 2 9 2 4 Reinstallation of the product . 2 9 Table of Contents 1 IDX-OM-M051 Air Dryer Table of Contents Chapter 3 Start and stop 3 1 Before Starting . 3 1 3 2 Start . 3 1 3 3 Stop . 3 2 3 4 Precautions for restarting operation . 3 2 3 5 Check items after starting . 3 2 3 6 Display of controller . 3 3 3 7 Signal output. 3 4 Chapter

Stainless Steel 316

(mm) Connection thread R Note 1) L2 M Weight (g) A D L1 L1 Applicable tubing M KQGL04-M5 KQGL04-01S KQGL06-M5 KQGL06-01S KQGL06-02S KQGL08-01S KQGL08-02S KQGL08-03S KQGL10-02S KQGL10-03S KQGL12-03S KQGL12-04S 3.5 18 16 18.3 M5 x 0.8 4 18 10.6 20.5 4.2 20 19.5 1/8 20.8 D 10 A 3.5 25 17 20.5 M5 x 0.8 L2 6 18.8 9 26 20.5 23 13 1/8 22.1 H Connection thread 35 24.5 25 1/4 14 37 21.9 25.4 1/8 12

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

4 Port Base Mounted (For manifold base only) 2 position 1/8 M5 x 0.8 56 66 58 3 position Note 1) Dedicated for manifold base.

Digital Flow Monitor

(increment of 0.1 sec.), 1 to 10 sec. (increment of 1 sec.), 20 sec., 30 sec.

Sensor Monitor

Display MPa kPa Pa Kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum 101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound 100 kPa F0.1 0.001 0.1 0.001 0.001 0.02 0.1 1 Low pressure 100 kPa 0.1 0.001 0.1 0.001 0.001 0.01 500 kPa 0.5 0.001 1 0.01 0.01 0.1 Positive pressure 1 MPa 1 0.001 1 0.01 0.01 0.1 2 MPa 2 0.001 1 0.01 0.01 0.2

SL5200

) Operation Warning 1.

Digital Pressure Switch

Output voltage Linearity: 1% F.S. Linearity: 1% F.S. Linearity: 1% F.S. Output impedance Approx. 1 k Analogue output 2.4 to 20 mA 3.2 to 20 mA 4 to 20 mA 2.5% F.S. 2.5% F.S. 2.5%F.S. Output current Current output 3 Linearity: 1% F.S. Linearity: 1% F.S. Linearity: 1% F.S.

CY1F

+0.012 0 NPT1/8 G1/8 5 1 5 9.5 depth 5.4 7.5 5.5 140 RB1006X552 Note 1) When adjusting the stroke, keep the T dimension within a 0 to 2 mm range.

Vacuum Ejector Series ZM

Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

Digital Flow Switch (Remote type monitor unit)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

VXA21/22

4.3 3 0.3 4 0.5 9 VXA3245-00 230 Note 1) OAdd the V type (VXA31) 80g, (VXA32)130g.

Digital Flow Switch

(Space) A b C X y Z 0 1 2 7 8 9 / Press the button to move on to input the next digit. Press the and buttons simultaneously for 1 second or longer. : A dot cannot be displayed for the 6th digit. Perform the above button operation to remove a dot. Press the button for 1 second or longer to stop the flashing.

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

IZx-OMV0005

Doc. no.IZ-OMV0005 PRODUCT NAME Ionizer Nozzle type MODEL / Series IZN10E Series 1 Doc. no.IZ-OMV0005 Contents Safety Instructions . 3 1. How to Order . 9 1-1.Ionizer body . 9 1-2.Accessories . 10 1-3.Repair parts . 11 1-4. Options . 12 2. Procedures to Operation . 12 3. Installation and wiring . 13 3-1. Installation . 13 3-1-1. Precautions for Installation . 13 3-1-2.

PROFIBUS DP Compatible Fieldbus System

(Tightening torque: 0.6Nm) SW3 SW2 SW1 Address 1 2 0 0 0 0 1 1 0 0 2 2 N.C. 9 9 99 0 0 100 0 1 101 1 2 5 125 Bus terminator switch ( SW4 ) This switch can set the bus terminator. -19No.EX##-OMO0019 Configuration In order to configure the GW unit in the PROFIBUS DP network, the appropriate device master file (GSD file) for the GW unit will be required.

ITV0000

VAC ERR ERR ERR ERR Note) Stations are counted starting from the D side. 50 56 D side U side 1 2 . stations 50 9 3 (8) 6.5 6.5 Dimensions in inch are noted in parentheses. 1 1 82 89.5 SUP, VAC z port 3 3 (6, 1/4") 40 40 EXH, ATM c port 25 25 (6, 1/4") 2 2 2 5 5 OUT x port (4, 5/32") Breathing hole Note) 3.7 (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page

3

1 !2 q w e r t y !1 !0 o i u Component Parts No.