Cylinder with Lock Series CLS

25 39 63 204 36 167 195 3/8 162 45 115 70 18.5 149 86 20 35 M18 x 1.5 M40 x 1.5 5 M12 x 1.75 Up to 1200 21 34 17 39 63 60 226 124 40.5 131 187 216 3/8 182 50 115 74 48 18.5 165 97 135 20 46 35 31 5.5 M20 x 1.5 M45 x 1.5 M16 x 2 Up to 1200 35 42 20 49 71 67 277 152 58 155 237 261.5 1/2 225 60 140 86 60 23 200 117 160 25 56 41.5 41 6 M24 x 1.5 M56 x 2 M20 x 2.5 Up to 1200 With Rod Boot

REC

150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8 37.5 5.5

CLS

46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42 25 31 41 M18 x 1.5 M40 x 1.5 204 106 36 167 195 162 18.5 149 86 135 35 Up to 1200 M12 x 1.75 118 226 124 40.5 187 216 182 18.5 165 97 135 M20 x 1.5

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

IZT40/41/42

Refer to the how to order above. 1 Only bar is ordered, 41 cannot be selected. 19

Air Cylinder Series CS1

B C D E EA F FA G J K KA M MM N P S (mm) 125 140 160 180 200 250 300 1 2 1 2 3 4 3 4 3 4 to 1000 50 47 145 115 36 90 59 43 14 16 15 31 27 35 98 M14 x 1.5 M30 x 1.5 Lube Non-lube Air-hydro to 1000 50 47 161 128 36 90 59 43 14 16 15 31 27 35 98 M14 x 1.5 M30 x 1.5 to 1200 56 53 182 144 40 90 59 43 14 18.5 17 36 30.5 39 106 M16 x 1.5 M36 x 1.5 to 1200 63 60 204 162 45 115 70 48 17 18.5 20 41

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

KA M D MM E EA F FA G J N P S (mm) 125 140 160 180 200 250 300 1/2 Up to 1000 M14 x 1.5 M30 x 1.5 50 47 15 145 31 115 27 36 90 59 43 14 16 35 98 Lube Non-lube Air-hydro 1/2 Up to 1000 M14 x 1.5 M30 x 1.5 50 47 161 15 31 128 36 27 90 59 43 14 16 35 98 3/4 Up to 1200 M16 x 1.5 M36 x 1.5 56 53 182 17 36 144 30.5 40 90 59 43 14 18.5 39 106 3/4 Up to 1200 M18 x 1.5 M40 x 1.5 63 60 20 204 162 41

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

51 63.5 B 52 62 70 86 106 NB 8h9 AC 3 3 3 4 5 NA 14 16 18 24 28 AA 44 47 55 66 82 AB 41 44 52 62 77 M 2 2 2 3 4 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 2H9 6 7 9 11 12 MRHQ 3H9 8h9 4H9 10h9 6H9 12h9 MA 8H9 14h9 DTA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y 6 8 7

Vacuum Pad

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

Vacuum Pad

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Mechanically Jointed Rodless Cylinder Series MY1

Grease pack part number: D-X GR-S-010 (10 g), GR-S-020 (20 g) Individual -X Technical data 961 Series MY1B Construction: 16 to 100 MY1B16 to 100 23 33 32 31 30 24 8 4 6 7 5 1 2 11 19 16 3 6 47 30 37 39 26 MY1B16/20 38 40 MY1B80/100 36 MY1B16 45 43 11 13 15 12 17 20 28 26 10 18 SMC SMC 22 27 MY1B63 36 21 46 44 34 MY1B50/63/80/100 S 42 41 16 9 MY1B80/100 17 MY1B16 29 MY1B80/100 25 14 35 29

3 Port Solenoid Valve SYJ300/500/700 Series

N.O. 24 VDC 12 VDC Type 41 Type 20 SYJ700 L type plug connector Non-locking push type With light and surge voltage suppressor N.C.

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

CJ5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 I-G02SUS Y-G02SUS 20 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

CJ5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 20 I-G02SUS Y-G02SUS 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25