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Doc.IZ*-OMU0031 / Series IZE11 2 7 8 10 10 11 14 15 18 18 F0 19 F1 OUT1 20 F2 OUT2 22 F3 22 F4 23 F5 24 F6 25 F98 26 F99 27 28 31 32 32 34 -1No.IZ*-OMU0031 1) (ISO/IEC)(JIS) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

Outer dimensions. 18 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

L1 = n / 2 x 30 + 16 L2 = n / 2 x 30 + 32 n = Number of valves (cleaning valve + gate valve + other valves) n: Stations (mm) 2 n 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 L1 L2 76 106 136 166 196 226 256 286 316 346 376 406 436 466 496 526 556 586 616 46 92 122 152 182 212 242 272 302 332 362 392 422 452 482 512 542 572 602 632 62 13 VCC Series Dimensions SUS316L Stainless steel

p. 5-13 Male Run Tee LQ1R-M p. 5-4 Space Saving Union Tee Reducing LQ1T-S-R p. 5-14 Female Run Tee LQ1R-F p. 5-4 Tubing Extension Union Elbow LQ1E-T p. 5-15 Male Branch Tee LQ1B-M p. 5-5 Tubing Extension Union Tee LQ1T-T p. 5-16 Female Branch Tee LQ1B-F p. 5-5 Tubing Extension Union Elbow Reducing LQ1E-T-R p. 5-17 Union Elbow LQ1E p. 5-6 Tubing Extension Union Tee Reducing LQ1T-T-R p. 5-18

ASCII) . 3-8 3.10.2 CRC(RTU) . 3-8 3.11 EXPLANATION OF FUNCTION CODES . 3-10 3.11.1 Function code04 Reading multiple registers .3-10 3.11.2 Function code16 Writing multiple registers .3-13 3.12 NEGATIVE RESPONSE . 3-14 3.13 REGISTER MAP . 3-16 3.13.1 Circulating fluid discharge temperature .3-17 3.13.2 Circulating fluid discharge pressure .3-17 3.13.3 Status flag .3-17 3.13.4 Alarm flag .3-18

Note 2) Heaters are not available for size 16. 18 XL-OMS0001-B Revision history A Heater Replacement Procedure added SZ B Product Specific Precautions added. Maintenance part indication revised. Erroneous descriptions corrected. Format changed.

(Refer to Chapter 7, Parts Replacement Procedure (P. 14 to 18) for details.) 6 XL-OMV0017 3. Product Specific Precautions 3 Precautions 3 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.

80 160 200 300 800 L/S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46 200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42 54 54 M5 Rc1/8 Rc1/4 [kg] 0.5 1.2 1.8 3.4 5.6 11.5 20 1 2 [Y-VAC2] 5 3 1 1mm 32 L/SP=0.1MPa 30 6 P11) 28 XLD-100 XLD-160 L/s () P=0.1MPa 26 24 22 20 XLD-63 XLD-80 18

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

Warranty period and guaranteed range The guaranteed warranty period is 100,000 cycles(under SMC endurance test conditions), 18 months after delivery or 12 months in service, whichever comes first. If the specification is not kept, or any non-conformance derived from mounting or replace of a device, an assembly, or an O-ring at your place occurs, the guarantee cannot be applied.

(oC) 80oC (60oC for a product with pressure gauge) Number of element 4 4 Note2) or 8 4 Note2) or 12 Element size (mm) note3) 65 to 70 250 65 to 70 500 (For 8 elements: 65 to 70 250) 65 to 70 750 (For 12 elements : 65 to 70 250) Element replacement differential pressure (MPa) 0.1 Cover SUS304 Case SUS304 Material O-ring FGES: NBR FGEL: FKM Leg SS400 Mass (kg) Body only 10 13 18 Internal

(ASCII code) 18 - Parameter index 0x4A Parameter name Operation Mode (PS1) Function When the process data output switching flag (BIT 0 of BYTE0) detects a Low (False) level, the mode transitions to operation mode and the pressure is regulated to the value set by this parameter. Bit Bit 1502BYTE Value Adjustable from 0x0 to 0x02BC. 0x0=0kPa, 0x02BC=700kPa.

80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416 3-2. 2040 , 3-2-1. 2 50 542 17 3-2-2. 1 4 1 2Assy 2 5 4. 5. 3) , 6 6. 18

Auto Switch 18 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Also, the M12 connector cable may loosen due to vibration during cylinder operation, so retighten it regularly. 18 - 2.

D-A9(V):0.100.20Nm D-M9(V):0.050.15Nm 90 7-3-2.D-P3DW M2.5X9.5L1 2 M2.56L,M2.59.5L M2.56L () (M2.59.5L) (M2.56L) -18 M2.56L,M2.59.5L0.20.3Nm 19 - 8. 8-1.

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.

40 (MPa) 0.15~0.6 0.1~0.6 () -10~60 (mm) 0.1 () (N) 0.5MPa 14 45 74 131 228 396 () 10,16,20,25 40mm 32,40 80mm 4 - 3. 3-1 3-2 3-3 1 ISO VG32 5 - 3-4 Nm mm Nm mm MHL2-10D M4X0.7 1.4 5 MHL2-10D M4X0.7 2.1 8 MHL2-16D M5X0.8 2.8 7 MHL2-16D M5X0.8 4.3 10 MHL2-20D M6X1 4.8 7 MHL2-20D M6X1 7.3 12 MHL2-25D M8X1.25 12 7 MHL2-25D M8X1.25 17.7 16 MHL2-32D M8X1.25 12 11 MHL2-32D M8X1.25 18