HRX-OM-R005

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060

Rotary Gripper Series MRHQ

0 t MHZ MHF MHL MHR MHK Description Material Note Component Parts !8 !9 @2 @0 @1 No.

I

Frequency 4Hz Pressure Unit kPa psi MPa kgf/cm2 bar Preset Pressure Range 0~975 0~142 0~0.98 0~9.9 0~9.8 CIRCUIT AND E L E C T R I C A L CONNECTION S E T T I N G INSTRUCTIONS H O W T O P R E S E T P R E S S U R E S W I T C H: K e e p p re s s i n g t h e p u s h b u t t o n ( 1 ) S E T a n d tur n the pressure set trimmer (3) P.SET and f i g u r e s a r e s h o w n o n t h e p r e s s u

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

S R S J I H Stroke ZPR20F10-0-A14 20 3 +10 0 ZPR25F10-0-A14 30 +7 12.8 24.3 15.2 26.2 +20 ZPR32F10-0-A14 50 +25 +52 +40 13-11-115 20 Series ZPR 40 50 J K ZPR F 0-0-A14 (With buffer) S S M14 x 1 Hexagon width across flats 19 M14 x 1 Hexagon width across flats 19 I 5 5 I 5 5 J J Hexagon width across flats 12 Hexagon width across flats 12 Applicable tubing O.D.Q Applicable tubing O.D.Q H R

10

Piston rod Thread dimensions (mm) M6 x 0.75 M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 5.3 +0.1 0 +0.1 0 +0.1 0 +0.1 0 +0.1 0 +0.1 0 7.1 9.1 12.7 18.7 25.7 Thread prepared hole dia. (mm) Nut tightening torque (Nm) 0.85 1.67 3.14 10.8 23.5 62.8 Do not damage. 2.

C85

42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

CG5-S

R V Integral clevis type (E)/CG5ENS ZZ + Stroke CD hole H10 Shaft d9 L M GA GB RR U CX LL 2P H1 Width across flats B1 LY CI D I MM AL A K LH LE KA 4-J LT C 0.1 NA LF LP LG S + Stroke Z + Stroke LZ + Stroke LV LX H 4-LD (mm) Stroke range A Bore size (mm) AL B1 C CD (hole) CI CX D GA GB H H1 I J K KA L M MM NA P RR S U +0.058 0 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 0 0.3 0 0.3 20 8 16 to 200

AHC System Series MA

x 3.4 depth 12.5 Magnet for tool stand sensor Air pressure port 6 x M3 x 0.5 Applicable shaft diameter d D Mass (g) Model Air pressure port 6 x M5 x 0.8 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 0-YNM5 MA3 0-YNM5-R1 MA3 0-YNM5-R2 MA3 0-YNM5-R3 MA3 0-YNM5-R4 MA3 0-YNM5-R5 MA3 0-YNM5-S6 MA3 0-YNM5-R6 MA3 0-AM3 MA3 0-AM5 440 Electrical contact points: 12 10 11 35 14 AHC unit 15 520 20 24

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

.0 100 0 105 100 100 105 105 Functions Sub screen setting function The display of the sub screen can be selected.

Vacuum Unit

0 20 40 60 80 60 60 Suction flow [L/min (ANR)] 50 50 Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust/ Complex exhaust) Flow Rate Characteristics 40 40 100 Air consumption Vacuum pressure [kPa] 30 30 80 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 20 40 60 80 Supply pressure [MPa] Suction flow [L/min (ANR)] ZK215

C85

42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

SI unit for DeviceNet ®

Instance attribute ID Access rule Description Value 1 Get/Set 1 MAC ID 0-63 2 Get/Set 1 Baud Rate 0-2 3 Get/Set BOI 0-1 4 Get/Set Bus-off Counter 0-255 5 Get Allocation Information 6 Get MAC ID Switch Changed 0-1 7 Get Baud Rate Switch Changed 0-1 8 Get MAC ID Switch Value 0-63 9 Get Baud Rate Switch Value 0-2 10 Set Quick Connect 0-1 1: "Set is available in SW mode. 3-4.

0.01

Dimensions: Centralized Wiring Type With bracket L1 60 3 38 L2 38 5 LED level meter Terminal block box EXH port End plate R End plate L 3 0 3 0 3 0 P P P T T T U U U E E E L L L S S S L L L 81 6 9 6 9 6 9 Setting dial 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 Pressure gauge 12 12 21 Bracket 24 5.5 Rc, NPT, G 1/8 SUP port L3 6.5 36 24 OUT 3 36 OUT 2 OUT 4 n Stations

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0 !1 !2 !3 !4 !5 !6 !7 !8 !

Process Pump

0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate

10

145 (1.0) 0.52 1.90 490 0 to 116 (0 to 0.8) 2 VX254 1/4, 3/8 7 1.08 0.44 3.99 490 0 to 22 (0 to 0.15) 5 0.75 0.55 1.96 620 0 to 116 (0 to 0.8) 3 VX264 1/4, 3/8 8 1.58 0.33 5.67 620 0 to 44 (0 to 0.3) Note) Weight of grommet type.

LVQ

0 1 2 N.C.

DOC1020530

Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

Possible to transfer a workpiece at low-speed.

0 !3 !3 !0 !4 !7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

MRHQ

-0.062 37h9 +2.2 0 15.2 opened MHS 0 -0.1 4 31 4-M2.5 x 0.45 (attachment mounting screw ) 0 -0.1 5 0 -0.7 11.2 closed M5 x 0.8 Finger closing port MHC 3 Max. 6.1 MHT 5.7 13.7 12 4-M4 x 0.7 depth 6 MHY (two on the other side) 34 M5 x 0.8 Finger opening port 22.5 2.5 MHW 3-R1.5 4.5 11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2