CEx-OMB0075

Cylinder speed should be in the range of 50 mm/s to 300 mm/s. In addition, prevent knocking and bounding. Do not give torque to the piston rod. Is torque given to the piston rod?

Digital Pressure Switch

Internal circuit and wiring example Z/ISE40A(F)Output specification -S/-R (Analogue output mode) Switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less R: Analogue output 1 to 5 V Output impedance 1 k S: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -S/-R (

MHF2

DENMARK SMC Pneumatik A/S FINLAND SMC Pneumatics Finland OY FRANCE SMC Pneumatique SA GERMANY SMC Pneumatik GmbH HUNGARY SMC Hungary Ipari Automatizlsi Kft. IRELAND SMC Pneumatics (Ireland) Ltd. ITALY SMC Italia S.p.A. LATVIA SMC Pneumatics Latvia SIA NETHERLANDS SMC Pnuematics BV. NORWAY SMC Pneumatics Norway A/S POLAND SMC Industrial Automation Polska Sp.z.o.o.

SY3000/5000/7000/9000

Nil Without light/surge voltage suppressor S Z With surge voltage suppressor With light/surge voltage suppressor R With surge voltage suppressor (Non-polar type) U With light/surge voltage suppressor (Non-polar type) Nil Without light/surge voltage suppressor S Z WO: Without connector cable With surge voltage suppressor With light/surge voltage suppressor DOZ and YOZ are not available.

VXF

Insulation type Electrical entry Electrical option Class B G C D, T S Note) S L, Z 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) AC DC Note) Surge voltage suppressor is attached in the middle of a lead wire. 17-3-72 3 The VX series will be revised shortly.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

VZ3000

LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector H: Lead wire length 600 mm With light/surge voltage suppressor With surge voltage suppressor S Not available for GZ, HZ and DOZ Type LN, MN: With 2 sockets. 3-3-29 Series VZ3000 Specifications Applicable for cylinder actuation (up to 40).

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing 6, 10, 15, 20, 25, 32, 40 CY1S Series RoHS How to Order 25 300 M9BW Z CY1S Slide bearing Made to Order Refer to page 1501 for details. Slider type (Slide bearing type) Number of auto switches Piping 2 pcs. Nil S n Bilateral piping type 1 pc. n pcs.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

S With light/surge voltage suppressor (Non-polar type) Z WO: Without connector cable DOZ and YOZ are not available. For AC voltage valves there is no S option. It is already built into the rectifier circuit. For AC voltage valves there is no S option. It is already built into the rectifier circuit. For R and U, only DC voltage is available.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Smooth Cylinder Series CQSY

CQSYB12 -30DCM 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CA2D50-200N 2.60 mm/s 0 Speed wave form -3.0 Operating direction OUT Operating direction IN CA2YD50-200 30 Displacement wave form 15 5 seconds

Guide Table Series MGF

Z Y59AZ Refer to pages 8 and 9 for information related to auto switches. 1 Guide Table Series MGF Specifications Action Double acting Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa Minimum operating pressure 0.1MPa 10 to 60C Ambient and fluid temperature Piston speed 20 to 200mm/s Cushion Rubber bumper at both ends Lubrication Non-lube + 1.0 0 Stroke length tolerance

Exhaust Cleaner Series AMC

(Female) B O D Y S I Z E P O R T S I Z E 2 1/4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E5G

Guide Table Series MGF ø40, ø63, ø100 1

Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (

MRQB-OM0002

Ta 10 STa(S 10) = & I Ta (Nm) I: & 2 = & (rad/s2) 2 t 5.2 5.3 22 5.4 P A F 1 1 = (1) P A F 2 2 = (2) 2 1 D 4 A = (3) ) d D ( 4 A 2 2 2 = (4) F=[N] F=[N] = A=[mm] A=[mm] D=[mm] d=[mm] P=[MPa] 5.6 () 5.7 () 5.5 23 6. 6. 6. 6. ,, , ,, 6-1. 6.1 (m) DC AC 0.5 3 5 (L) (Z) (N) 3 (NPN) F7NV F79 3 (PNP) 5V,12V F7PV F7P IC F7BV J79 2 12V J79C 24V 3 (NPN) F7NWV F79W PLC 3 (PNP) 5V,

AMX-OM-L024_e

U nderst and t hi s operat i on m anual w i l l be revi sed w i t hout not i f i cat i on. To get t he best perf orm ance f rom your purchase, be sure t o read t hi s m anual caref ul l y bef ore use.

Digital Flow Switch (Remote type sensor unit)

port A B D E F J K L N P Q 25 A 154 46 77 57.6 23 77 63 28 18 3.5 depth 14 32 32 A 146 56 91 71.6 28.5 73 60.5 25 27.5 3.5 depth 14 38 Bracket dimensions Piping port S T U V W Y Z 25 A 59 36 48 58 70 7 2 -46No.PF-OMN0010-J Dimensions of lead wire with M8 connector (ZS-40-A) -47No.PF-OMN0010-J Made to Order Change the seal material of the wetted parts to EPDM.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

3 EVS7 6 FG M0 Valve Size 6 8 10 Thread type Size 1 Nil F T Rc Size 2 G Size 3 NPTF Passage symbol Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of solenoids Port size (A) 4 (B) 2 S D Single Piping specifications Symbol Size 2 Size 3 Size 1 FG Double Nil

Series VCL

Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58

KQ2

D MS LQ MQR T How to Order KQ2 H 05 S 02 Made to Order Refer to page 82 for details. One-touch fittings Model With thread sealant H Male connecter L Male elbow Nil Without sealant W Extended male elbow S With thread sealant Port size T Male branch tee Applicable tubing O.D.