MXQ

3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48

0.5

NT B1 21 Model Model 21 For IZF21 31 For IZF31 21 For IZF21 31 For IZF31 : 4 retaining bolts are included.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHS (mm) MHC WC 20 24 32 42 52 Model BF VA 4H9 4H9 5H9 6H9 6H9 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZD 6 10 12 16 20 BG VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 19 22 35 FX 22 26 32 40 50 AF 18 21 30 35 48 BE 48 58 68 WD 1.5 1.5 1.5 2 2 ZG 15 16 18 22 26 ZF 20 21 28 32 41 ZE 5 8 10 14 17 0 -0.062 0 -0.062 0 -0.062 0 -0.074 0

Battery-less

to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80 LEYG40M L mE A 24 to 30 50 to 65% B/C 21 to 30 60 40 0 20 Min. 20% 10 0 20 30 40 50 60 70 Max. 65% Model LEYG16M LmE

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

CJ5-S

14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 DBore size (mm) Pivot

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

CJ5-S

14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot

24

40 26 23 11.5 25.5 21 19 50 24 23 13 27 21 19 63 25 25.5 11 25 21 19 D-X 475 MGP Series Dimensions: 80, 100 4 x NN through 4 x OA through 4 x MM depth ML 4 x YY depth YL L WA Z 30 HR 4 x OB counterbore depth 8 Section XX Section XX Section XX (8) HA: T-slot for hexagon bolt X 0.02 DA X 0.02 X 0.02 21 H VA VB 40 U X T R X PW DB 6H9 depth 10 2 x P GC PB GB GA 10 2 x P (Plug) Q S WB DL JB JA

CM2

For mounting brackets, refer to pages 6-4-21 to 6-4-22. Symbol Maximum ambient Rod boot material temperature One side Both sides J JJ 70C Nylon tarpaulin Symbol Specifications K KK 110C Heat resistant tarpaulin -XA Change of rod end shape Mounting Bracket Part No. Maximum ambient temperature for the rod boot itself.

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

L2 L1 Manual override (Non-locking) VT VP 55.5 [62] 43.1 36.5 25.5 49 VG A A 19 9.5 VP 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) VQ A A 19 9.5 18.5 VQZ (Pitch) n-M5 X 0.8 P=16 21 (A port) VZ [ ] for AC Other dimensions are the same as the M5.

Solid State Auto Switches

Sheath Outside diameter [mm] 3.4 2 cores (Brown/Blue) Number of cores Insulator 1.1 Outside diameter [mm] 0.2 Effective area [mm2] Conductor 0.08 Strand diameter [mm] 21 Minimum bending radius [mm] (Reference values) Note 1) Refer to page 1568 for solid state auto switch common specifications. Note 2) Refer to page 1568 for lead wire lengths.

MG

Bore size (mm) Bore size (mm) DB DL DM HR LL MO Over 25 st to 75 st 98 Over 75 st to 175 st 118 Over 175 st 250 st 140 25 st or less 0 Over 25 st to 75 st 13.5 Over 75 st to 175 st 33.5 Over 175 st 250 st 55.5 25 st or 32 32 22 22 9.5 21 15 15 84.5 16 40 40 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 50 50 97 24 23 13 27 21 19 114 134 161 20 0 17 37 64 63 63 102 114 25 25.5 11 25 21

Table of Contents

Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35V DC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) ALARM STOP 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being generated

Electric Actuators

Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35VDC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY <2> 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) STOP ALARM 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being

CATALOG VC10

21, 31 NPT 1/2 AN CONNECTOR MISCELLANEOUS OPTIONSsee page 76 All Models BODY OPTIONSsee page 80 SPLICE BOX HOUSING 3.52 3.22 (81.8) .34 (8.6) FINE METERING SILVER SHADING RING All Models 2.50 (63.5) (89.4) Model 21 All Models JIC HOUSING METERING TO ORIFICE ALUMINUM SHADING RING Model 21 Model 21 All Models YOKE MANUAL OVERRIDE BUILT IN MUFFLER All Models 21*, 71 All Models 1.88 (47.8) MOUNTING

Air Slide Table Series MXQ

-50 21 KA NA x M5 x 0.8 thread depth 6.5 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 6 B A 5H9 depth 5 +0.030 0 NN x M6 x 1 thread depth 12 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45

MY1

26 32 43.5 60 VV 16 19 23 28 30 TT 15.5 21 22.5 35 43 WW 11 13 20 22 25 UU 16 16 24.5 24 28 XX 38 48 54 74 92 SS 3.5 4 10.5 10 13 RR 19 24 25.5 35 49 "P" indicates cylinder supply ports.

HRX-OM-W002

21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2