Sine Rodless Cylinder Series REBR Direct Mount Type

19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12.5 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x

High Vacuum L Type Valve

Specifications Table 1 Valve specifications Table 2 Power/ Current With rated voltage applied Model XLS-16 XLS-25 XLS-16-P*G XLS-25-P*G Flange (valve) size 16 25 16 25 Actuating type Normally closed (N.C.)

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Body size 2 AMC220 AMC310, 320 AMC510, 520 AMC610 AMC810 AMC910 Refer to page 5-10-14 for Specific Product Precautions. 3 5 6 8 9 Model/Male Thread Type Model Specifications Effective area (mm2) AMC310 AMC510 AMC610 AMC810 AMC910 16 55 165 330 550 Max. air flow (l/min(ANR)) Port size Weight (kg) Element model no.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

JIS Symbol Theoretical Output (N) OUT IN Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 0.7 0.5 0.3 Made to Order Specifications (For details, refer to pages 1373 to 1565.) 84.8 IN 59 42 25 12 6 113 OUT 79 57 34 Symbol Specifications 151 IN 106 75 45 16 8 XA Change of rod end shape 201 OUT 141 101 60 XB6 Heat-resistant cylinder (10 to 150 C) (without

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

57 75 101 101 157 189 245 302 402 528 628 825 982 1402 1559 0.3 25 34 45 60 60 94 113 147 181 241 317 377 495 589 841 935 IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 12 6 Clamp part Non-rotating accuracy 0.7 to 1.4 16 8 During clamping (Retraction end) 20 12 25 12 Made to Order: Individual Specifications (For details, refer to pages 401 and 402.) 32 16 Symbol Description 40 16

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Bore size 12 12 mm 40 40 mm 16 16 mm 50 50 mm 20 20 mm 63 63 mm 25 25 mm 80 80 mm 32 32 mm 100 100 mm Auto switch Nil Without auto switch (Built-in magnet) *: For applicable auto switches, refer to the table below. Port thread type Nil M5 x 0.8 Rc TN NPT TF G Cylinder stroke [mm] Refer to Standard Strokes on page 433. *: For bore sizes 12 and 16, only M5 x 0.8 is available.

Fieldbus system Ethernet POWERLINK compatible SI unit

Occupied word size Unit Unit part number Input Output System diagnostic 1 0 Diagnostic data Unit diagnostic 1 0 SI unit EX600-SPL1-X26 (32 outputs) 0 2 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs) (with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 1 0 EX600-DXE (16 inputs) 1 0 EX600-DXF (16 inputs) 1 0 EX600-DYB (8 outputs) 0 1 EX600-DYE

PF3W7x.eng

Excessive accumulated flow 5% of maximum rated flow [00.05] 00.05 gal/min (4 L type) [00.21] 00.21 gal/min (16 L type) [000.5] 000.5 gal/min (40 L type) [001.3] 001.3 gal/min (100 L type) [000.3] 000.3 gal/min (250 L type) Temperature upper limit exceeded The fluid temperature is above 110 oC. Reduce the fluid temperature.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

to 330 20 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 350 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 280 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 10 Max acceleration/deceleration [mm/s2] 5000 Positioning

LEC-OM038xx

Initial Setting.16 4. 1 Gateway unit Communication speed switch (STATION NO.,B RATE) 16 4. 2 Setting the switch to change the communication CN2SW.17 4. Setting of controller (LEC) .18 5. External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6.

JXCx-OMT0034CN

20mm/s 14h 10%100%1016 0Ah 0Ah 14h RWwn+7 15bi 8bit 7bit 0bit 16 16 (WORD) ) (RWwn+1)100mm/s 16 100mm/s 0064h 00 64 h 32 32 ) (RWwn+2,3)700.00mm 0.01mm 700.00mm 7016 00011170h 00 01 11 70 h 64h 00h RWwn+1 15bit 8bit 7bit 0bit 01h 00h RWwn+2 15bi 8bit 7bit 0bit 70h 11h RWwn+3 15bi 8bit 7bit 0bit 39 - 12.2 IF ( ) IF ID ID=1 bit 7 6 5 4 3 2 1 0 I_Address RWrn+8 bit F E D C B A 9

rep-modular-e

Spanner Nominal: 16 Tightening torque: 1.8 0.3 Nm Disassembly Phillips head screw driver 1) Remove the bonnet. Rotate the set screw counterclockwise with a Phillips head screw driver to remove the bonnet from the body. 2) Remove parts in order of the pressure adjustment screw assembly, spring, and the diaphragm assembly.

CYV

100 PA 25 50 P 5/16-24UNF 7/16-20UNF N 4.5 7.5 M 6 8 MM M4 x 0.7 M6 x 1 LW 69 115 Model CYV15 CYV32 Note) Refer to "Cushion Effect (Sine Cushion) and Stroke Adjustment" under Specific Product Precautions on page 11. 3 Series CYV Model Selection 1 Design Parameters 1 The allowable load mass moment differs depending on the work piece mounting method, cylinder mounting orientation and piston

AN

Rc(PT) 3 8 28 to 30 Rc(PT) 1 2 28 to 30 Rc(PT) 3 4 36 to 38 Rc(PT)1 AN103-KM6 AN103-X233 AN103-X235 VEX 40 to 42 Rc(PT)1 1 4 AN203-KM8 1 2 48 to 50 Rc(PT)1 48 to 50 Rc(PT)2 3 Make sure not to apply a lateral load to the body during or after the installation.

2/3 Port Solenoid Valve for Chemicals

N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 For LVM14R 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 For LVM16R N.O. N.C. 3 2 1 25.5 (16) N.O.

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Grease pack (10 g) 1 pc. 84.8 IN 25 42 59 CQSY16-PS 12 6 113 OUT 34 57 79 CQSY20-PS REA 151 IN 45 75 106 CQSY25-PS 16 8 201 OUT 60 101 141 When only grease for maintenance is necessary, please order by the following part numbers.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Spanner Nominal: 16 Tightening torque: 1.8 0.3 Nm Disassembly Phillips head screw driver 1) Remove the bonnet. Rotate the set screw counterclockwise with a Phillips head screw driver to remove the bonnet from the body. 2) Remove parts in order of the pressure adjustment screw assembly, spring, and the diaphragm assembly.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Compact Guide Cylinder End Lock Type SeriesMGP

4 4.5 3 6 M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)