Piping: 20 (Body Ported/Common SUP Common EXH), Stations: 10 Stations, A B Port Size: 00T (NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M5 (M5X0.8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 43 (Base Mounted Common SUP Individual EXH), Stations: 10 Stations, A B Port Size: N3T (5/32" One-touch Fitting)

Piping: 41P (Base Mounted Common SUP Common EXH, Flat Cable), Stations: 10 Stations, A, B Port: M5T (M5X0.8 NPTF)

Piping: 43P (Base Mounted Common SUP Individual EXH, Flat Cable), Stations: 10 Stations, A, B Port: C4 (ø4 One-touch Fitting)

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available, SYJ 5 port valve manifold, SYJ, 4/5 PORT SOLENOID VALVE, 0.00000 lb

Piping: Body Ported/Common SUP Common EXH, Stations: 10 Stations, A B Port Size: NPT

Piping: Body Ported/Common SUP Common EXH, Stations: 10 Stations, A B Port Size: NPTF

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: M5X0.8

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: M5X0.8 NPTF

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: M5X0.8 NPTF

Piping: Base Mounted Common SUP Individual EXH, Stations: 10 Stations, A B Port Size: 5/32" One-touch Fitting

Piping: Base Mounted Common SUP Common EXH, Flat Cable, Stations: 10 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted Common SUP Individual EXH, Flat Cable, Stations: 10 Stations, A, B Port: ø4 One-touch Fitting

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

HRX-OM-W002

20 30 40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz