CJP

11.5 15 19 4.5 M22 x 1.5 5 10 20.5 25 17.5 15 27 31.5 24 Note) E and F should be machined in a concentric manner.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 Vacuum suction port M5 x 0.8 2 6 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 7 0.5 19 3 5.5 5.5 5.5 3 3 6.5 2 x M2.5 x 0.45 thread depth 3 12.5 K Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 18 N x M3 x 0.5

SMC

P Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 26.3 Max. 5.6 Operating port 2-M3 x 0.5 12 5.5 11.5 8 Other dimensions are the same as those of basic style. 135 MXS Air slide table 1322Dimensions: MXS6L / Symmetric type 1322ZZ Z 0.5 19

NCA1

Please See Below for How to Order Piston Rod Assembly 19 Wear Ring Resin Available only as an Assembled Item. Please See Below for How to Order Piston Rod Assembly JM-10 JM-045 JM-045 JM-10 20 Jam Nut Carbon steel * Components included in a seal kit.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

RSQ

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 10-8-18 19 19 Stopper Cylinder: Adjustable Mounting Height Series RSG Rod End Configuration: Chamfered Type (Non-rotating piston rod) Basic style: Flange mounting These 2 figures show the piston rod extended.

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

42.8 37.8 25.2 45 49.5 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 63 18.5 23 19 20.6 12.9 AS331FG-03-08 AS331FG-N02-11 28.2 48 53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 69 21 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7 10 18.5 1/4" 13.2 63 56 17 23 20.6 16.2 12.9 NPT 3/8 AS331FG-03-12 AS331FG-N03-09 45.4 40.4 40.2 35.2 34.4 54.2 48 22 28.2

Intrinsically Safe Valve

connector with cover (LL) 53-SS5Y7-20Terminal type (TT) 53-SS5Y7-20Stations Stations 204.2 191.2 170.6 157.6 95.6 71.7 Max. 10 L (Lead wire length) L (Lead wire length) 39 41.7 67 67 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19

HRX-OM-M090

Table 5.16-19 List of set value Set value Explanation Initial value (Default setting) Setting/checking are not available if the setting of the electric resistivity/conductivity option is OFF. This alarm signal is not detected. Operation continues when this alarm signal is generated.

AC Servo Motor Driver (Pulse input type/Positioning type)

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting

MHF2

(mm) MHZ2-20D3 42 Height Bore size 19 25 33 41 8 12 16 20 MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments. Improved accuracy with smooth operation Low profile design Reduced bending moment and vibration Stroke selection is available. 3 standard stroke lengths are available for each bore size.

LX

(T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance L (mm) Refer to page 304 for deflection data. 226 19

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

17 19 19 21 19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5

MHF2

(mm) MHZ2-20D3 42 Height Bore size 19 25 33 41 8 12 16 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHF2-12D 72.8 52 25 50 The low profile design saves space and reduces bending moments.

Rotary Table/

Table inside and outside diameters For alignment of rotation center and work piece High precision type: MSQA H8/h8 Positioning pin hole Hollow axis Positioning pin hole For position of rotation direction Rolling bearing Accommodates wiring and piping for equipment mounted on the table Hollow axis Size 1 3.5 2 3.8 3 5 7 6 Basic type MSQB Hollow axis Size 10 5 20 9 30 9 50 10 70 16 200 24 100 19

2/3 Port Valve

Refer p.4.1-18, 4.1-19 for specifications and models.

Cylinder

5+ g"'" 116 5:5 M4XO,7 YPOIO , '10 6.S 10 sg04I 16 5.5I M,4 XQ,7 71' 5 a 6.3 7 I 5 a 1 6.3 YP015 I 15 7 12 ~-g.048 19 7 M5XO,a 9 I 6 10 ,7.8 10 7,a ...!:!'.015 l 15 7 12 6 -g~ 19 9 I 6 7 M5 x O.B . ~I ~--~~ K ~~ P~ ' ~k I -TFunnion Pin' . , nue ' :e In .

Possible to transfer a workpiece at low-speed.

Note 9 4 Wear ring 19 1 Seal 2 Gasket for cover Size: 10, 15 20 1 Gasket for end cover 4 Size: 20, 30, 40 Gasket 21 4 Piston seal 22 2 Seal washer A set includes all parts above. A grease pack (10 g) is included. When only a grease pack is needed, order with the following part number.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

x 1 80 80 Male thread 100 100 Mounting 125 125 M16 x 1.5 Pad type Female thread H Heavy duty Material N S NBR Silicon rubber Urethane rubber Fluororubber U F E EPR 1190 Series ZPT Vacuum Pad: Large/Heavy Duty Type Vertical Vacuum Entry: Without Buffer ZPT H-A14 (Male thread) 40 50 ZPT H-B (Female thread) 40 50 1/8 (Rc, NPT, NPTF) M14 x 1 Width across flats 24 Hexagon width across flats 19