Uniaxial Electric Actuator Series LJ1

0 2 4 6 8 10 0 5 10 20 15 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 a=1000 a=3000 a=1000 400 400 L3 mm L3 mm L3 mm a=2000 a=2000 a=2000 400 a=3000 a=3000 a=1000 a 200 200 200 L1 M1 0 2 4 6 8 10 0 5 10 20 15 0 5 10 15 Work load (W) kg Work load (W) kg Work load (W) kg Mounting position Model LJ1S10 LJ1S20 LJ1S30 Direction of load movement 30 150 300 a=500 a=500 a=500

Mechanical Valves Series NVM, NVFM, NVZNI

Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz.

Safety Instructions

After letting the 15 ml of 25% methyl alcohol elute for 24 hours at the room temperature, dilute the elute with ultrapure water.

Digital Flow Monitor

Refer to Trouble No.14 Not able to copy Refer to Trouble No.16 Refer to Trouble No.15 -70No.PF-OMU0007-D Troubleshooting Problem No. Problem Possible cause Investigation method Countermeasures (1) Check the set flow value. (2) Check the settings of the operation mode, hysteresis and output type.

CEx-OMB0060

PLC input part CEU5B-* BCD output part PLC input part CEU5BBCD output part (for photo-coupler input) (for photo-coupler input) (for NPN output type) (for NPN output type) Output specification: open collector Output specification: open collector Max. : 30VDC, 15 mA DC power DC power Max.: 30VDC, 15 mA (5) Output timing Data in BCD output Data in BCD output Data 1 Data 2 Data 1 Data 2 DATA

Mini Rotary Actuator

Note 19 - CRJU05~1 11 8 6 12 4 10 3 10 18 11 14 7 9 1 13 15 17 16 2 17 15 14 18 18 Hexagon socket head set screw 2 17 Wear ring 2 16 Magnet 2 15 Piston seal 2 14 O-ring 2 13 Hexagon nut 2 12 Round head no. 0 Philips screw 3 11 Hexagon socket head cap screw 4 10 Bearing 2 9 Hexagon socket head set screw 2 8 Stopper retainer 1 7 Holder 1 6 Stopper 1 5 Cover 2 4 Bearing retainer 1 3 Shaft

SI unit for EtherNet/IP TM

Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 -38No.EX-OMP0013-E Dimensions If a fieldwireable connector is used for the power supply connection, and the SI unit is installed directly to a valve manifold, the cable connectors outer diameter should be 16 mm or less.

KS/KX

SKS, #1 to #15 Male connector: KXH (High speed) Tube O.D. (mm) Connection thread R(PT) Effective area (mm2) Min. hole dia. Weight (g) H (Hex.) Part No.

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

Title not found

5) 3 . 1 5 tBo\ 5.43 '135) 7 9 9 t203) E t 1 1 6 1 3.62 1 . 1 8 2.05 152\ o55 0.83 121\ Ml2x1 75 0.43 1 1 1 ) M26x1 5 1.57 (40) 4.S6 {126) 1.97 6.38 i162) 5.35 t136) 8.74 t222) 2.83 <72) 5.31 1135) 4 . 1 1 1206) 2.55 (65) 0.55 N4.0) 1 . 1 9 (41) 5 6 7 1215t 'Min.

125

30 30 15 60 52.5 P 1 A 2 30 33 2 x 5.5 (For mounting) A Air operated: VEX3320 DIN terminal (D) Caution How to Use DIN Terminal Connector Refer to page 1739.

IDX-OM-W038

(17) (17) IDH4,IDHA4 Rc3/8 1.25 6.5 N.C N.O M3 (N.C:) (N.O:) 2 Rc3/8 6.5 :1.25m m :M3 24 2 (N.O) (N O 244 80 2 184 35 320 56 2 1 15 275 1 80 207 284 455 70 389 498 ( ?10) ( 10) 15 240 2 1 297 270 62 IDH Series 6.2.

Common Supply Regulator

P17 Note ) Fluorine grease is recommended when applying additional grease. -15- 10. How to Replace the Products Warning Before replacement, make sure that no pressure remains in the epuipment. Also, make sure to loosen the knob of the regulator so that the set pressure is zero.

LMU100/200 Series Mist Spray Unit

15 1 (24) Air adjusting needle for mist 4.3 8 2 4.3 Oil adjusting needle 21.8 8.5 (37) 4 AIR Mixing valve (LMV10-) OIL B B 12 SMC Double pipe nozzle A A Cross section BB 3 (Max.)54 37 22 BLOW AIR 29 15 12 OIL AIR 35 26.5 16.5 8.5 Cross section AA L Dimension (mm) 20 200 25 250 30 300 35 350 LMV20/Without air blow circuit T0806 (8 x 6) Applicable tubing Symbol Length T0425 (4 x 2.5) Applicable

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

15 18 M5 x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5 Rc1/8 M6 1 M10 x 1 M6 x 1 M12 x 1.75 Rc1/8 M8 1.25 M14 x 1.5 M8

PS-OMH0005CN

FSC() FSt FSt FStFSt 1 digit 15 2CH1 CH2CH3CH4 CH1 OUT1 CH2CH3CH4 CH1 CH2CH3CH4 OUT1 CH1 OUT1 CPy CPy CPy CPy 1 digit -24No.PS-OMH0005CN-D 26 SH1 CH1onoF SH1 ON OFF CH2 CH3 CH4 12 -25No.PS-OMH0005CN-D 10 ms oooC_5C_3 CH1 OUT1OUT2 P_1 P_4n_1 n_4C_5 CH2CH4 OUT1 P_1 P_2n_1 n_2C_3 15 ms oF oFLo() ooo () EEPROM Aon ((PSE530 ) (PSE530 ) (PSE530 ) -26No.PS-OMH0005CN-D

High Vacuum L Type Valve

Parts Replacement Procedure 15 1 XL-OMV0007 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

IDX-OM-W016

IDFA4E to 11E B A D E Q SWITCH WITH LAMP AIR INLET THERMOMETER EVAPORATION AIR OUTLET G F C DRAFT AIR OUTLET VENTILATION VENTILATION (O.D.10 LENGTH:0.8m) DRAIN TUBE TERMINAL BLOCK (820) J K L H 4-13 P M N POWER SUPPLY ENTRY(17) GROMMET Measuremm Model Thread Size A B C D E F G H J K L M N P Q IDFA4E Rc1/2 453 13 498 283 275 IDFA6E 455 Rc3/4 270 80 230 32 15 31 42 275 15 240 80 IDFA8E 485

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -70No.PF-OMS0002-B Dimensions PFMC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions

XLG Series

(Take care not to damage the mounting surface of the body.) 3 Tightening torque Nm Valve size 2 1 -25 XLG-16 0.7 1.5 4 -40 2.5 -50 6 -63 6 -80 15 -100 20 -160 102 Wipe any dust off the O-ring surface and O-ring seat with a clean cloth (Bemcot TM) dipped into ethanol. Tighten the socket head cap screws in numerical order.