Line filter

P A B C D E G J M N Q R S T U V W AFF20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AFF30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AFF40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl drain Auto Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard

Micro Mist Separator

Dimensions (Port size) Semi-standard specifications With element service indicator Clearance for maintenance Optional specifications With auto Standard specifications Model Bracket mount drain P A B C D E G J M N Q R S T U V B AFD20-D 1/8, 1/4 40 87.6 17.5 21 45 21 30 27 22 5.4 8.4 60 2.3 28 104.9 AFD30-D 1/4, 3/8 53 115.4 21.5 26.5 30 50 26.5 41 35 25 6.5 13 71 2.3 32 157.1 AFD40-D 1/4,

Pressure Relief 3 Port Valve with Locking Holes

bracket With built-in silencer Model K L M N Q R S T U V W VHS20-D 30 25.3 34 5.4 8.4 27 60 40 2.3 3 13 VHS30-D 41 33 43 6.5 10 36.5 71 50 2.3 3 17 VHS40-D 50 44 57 8.5 19 43.5 88 66 2.3 3 21 VHS40-06-D 50 46 59 8.5 19 43.5 88 68 2.3 4 27 VHS50-D 70 60 11 27.5 49.5 113 71 3.2 4 27 -13- Revision history Rev.

Air Cylinder NCJP Series Pin Cylinder

Part No. cD-P11 cD,p12 Load voltage 100 vAC ziovac 24VDC 2smA 12.5mA 5omA Inch Contacl Proleqtion gox/Dimensions 0.80 1_20 1.40 ot7,.., 15 iffiqffi Hou To MountThe Auto Stoitch fllL_ #F*t-q -s-ffi*""*"-'" *-jil-|--.e*',**" @712 OTo set swikh posili,m, loGen tfie scre$/ and rno f|e sviitcfr to fie desircd po6itbn. f ighten tre soewtotre recommended brque (0.9" 1.1 lb indr). o Series NCDJP

Digital Pressure Switch

[February 2020] E: Contents are added. [February 2021] F: Contents revised in several places. [January 2022] G: Contents revised in several places. [October 2022] H: Contents revised.

LG1H

3 e w t !3 A A !0 !2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Manifold Regulator Modular Type ARM2500/3000 Series

SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

20

1 Note Component Parts i u r e q w Description No. Material o Body L Body R Main valve Valve guide Nozzle holder Port Elbow Cover Ring Arm Spring Main valve seal Lever 1 2 3 4 5 6 7 8 9 10 11 12 13 PBT PBT PBT POM t Aluminium alloy Aluminium alloy Anodized Anodized Only for the VMG12 PBT Stainless steel Stainless steel PBT !4 Stainless steel !5 !0 HNBR PBT !

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note Platinum silver Platinum silver Black Black q Description Sub-plate Body Aluminum die-casted Stainless steel w e Mounting bolt and gasket are not attached. : Thread type Spool/Sleeve Adapter plate Thread Type r Resin t Resin End plate Nil Standard Rc y Resin Piston NPT N Option T NPTF G F Replacement Parts Description Material Part no. No.

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

In-line Air Filter

Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.

ZSE5/ISE5

~~===rr-N"~e-_ ~~ =4It PNP, and analog output.

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: 1 Station, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: 1 Station, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N1 (ø1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting

Stations: 7 Stations, Manifold Type: LD2 (Lead Wire Kit Cable 3.0m), Manifold Mount Style: E (Direct Mount Type), Option: None, One-touch Fitting: 00T (N11 3/8" One-touch Fitting)

Stations: 2 Stations, Manifold Type: FD2 (D-sub Connector 25 Pin 3.0m), Manifold Mount Style: E (Direct Mount Type), Option: None, One-touch Fitting: 00T (N11 3/8" One-touch Fitting)