Series AK1000

volume Mass 4500 psig (30.7 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 1 x 10-10 Pam3/sec NPT female, Compression 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.4 lbs (1.09 kg) 3) 1) Max 300 psig (2.1 MPa) for PTFE seat. 2) 14 to 194F (10 to 90C) for Vespel and PEEK

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40

Remodeled

Precautions on Selection 3 9 10. Precautions on Design 3 10 11. Mounting Methods 4 11 12. Piping 5 13 13. Operating Environment 6 15 14. Speed Control 15 15. Troubleshooting 7 16 16. How to exchange seals 8 17 17. Construction 21 18. Auto Switch 25 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

389 4-13-10

NCA1

Cushion NCA D-X Mounting 20Standard Stroke Data Bore size (in) 1.50 2, 2.50 3.25, 4 Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

NCA1

, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Example: NCDA1B150-0200R+0300-XC11 will stroke 2" then an additional 3" for a total stroke of 5".

Speed Controller with

-08A 8 15.2 13.5 56 8.5 18.1 37.1 35.5 19 13.8 AS3002F-06A 6 13.2 11.5 57.8 9.8 21.7 42.9 41.3 21.8 25 12 20.5 17 18.1 AS3002F-08A 8 15.2 13.5 63.8 19 20 AS3002F-10A 10 18.5 16.5 68.6 21 24.8 AS3002F-12A 12 20.9 18.5 73.8 10.9 22.8 44 42.4 22.1 22 29.1 AS4002F-10A 10 18.5 16.5 4.3 8 18.8 26 74.7 11.3 23.7 51.3 49.7 28 33 14 26.2 21 36.3 AS4002F-12A 12 21.7 18.5 79.1 22 42 4.5 8 16.6

4-channel Flow Monitor (Remote type monitor unit)

1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

XMH/XYH Series

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) 13 is a non-replaceable part, so it is not included in the seal kit. 82

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

Grease pack part no.: GR-S-010 (10 g) 13 is a non-replaceable part, so it is not included in the seal kit. 82

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .14330 lb

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .11968 lb, SeriesDescriptionModelActionNoteVol. no.

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .51374 lb

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .30880 lb

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .09259 lb

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .09259 lb

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .26285 lb

SMC VVQ1000-51A-C8 fitting assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $4.50 + Add to Quote Add To Cart Add to Cart, .35825 lb