A-HEC-OM-J004

/humidity Ambient air quality Liquid Tank W 200 H 332 D 207mm(excluding protrusion) Dimensions Controller W 250 H 180 D 340mm(excluding protrusion) Liquid Tank Approx. 8.5kg (Empty) Weight Controller Approx. 6.5kg Connection cable DC cable, Signal cable: 3m each Accessory cable Power supply cable: 2m 7.2 Specifications 7-2 A_HEC-OM-J004-4 Chapter 7 Appendix Note 1) Differs depending on

Information

L6 A Note) Model Applicable tubing O.D. d H Weight (g) D L1 L2 L3 L4 L5 M T Min. Max. Min.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Locations where strong magnetic or electric fields are generated. f. Locations where direct vibration or impact is applied to the product. g. Areas that are dusty, or are exposed to splashes of water and oil drops. h. Areas exposed to direct sunlight (ultraviolet ray). i. Environment at an altitude of 1000 meters or higher Heat radiation and withstand voltage will decrease.

Vacuum Ejector with Solid State Timer

/analog output 3 rotations, PNP output T54 Rated voltage Standard supply pressure 5 24VDC 0.5MPa 0.35MPa 0.45MPa H M S Valve K Air supply valve/Vacuum release valve Thread type Nil T F Rc NPTF G How to Order Ejector Manifolds ZZMA 06 06 R Mixed mounting is possible with vacuum ejector series ZM.

Vacuum Ejector with Solid State Timer, Series ZMA

type Nil T F Rc NPTF G How to Order Ejector Manifolds ZZMA 06 06 R Mixed mounting is possible with vacuum ejector series ZM.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

to 330 20 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 350 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 280 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 10 Max acceleration/deceleration [mm/s2] 5000 Positioning

IN20267

Quick Start . 16 8. Pneumatics . 16 8.1. Supply Pressure . 16 8.2. Power . 17 8.3. Network Cable . 17 8.4. Ethernet/IP (From PLC Perspective) . 18 8.5. IP Address . 18 8.6. MPC Default Parameters . 19 9. Ethernet/IP Network Parameters . 19 10. Network Specifications . 19 10.1. DLR (Device Level Ring) . 19 10.2. Hold on Connection Loss . 19 10.3. Hold Till Connection . 19 10.4.

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

EXxx-OMO0027

Occupied byte Unit Unit part number Input Output EX600-SEC (32 outputs) 0 4 EX600-SEC (24 outputs) 0 3 SI unit EX600-SEC (16 outputs) 0 2 EX600-SEC (8 outputs) 0 1 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs)(with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 2 0 EX600-DXE (16 inputs) 2 0 EX600-DXF (16 inputs) 2 0 EX600-DYB (8 outputs) 0 1

Fieldbus system EtherNet/IP TM compatible SI Unit

Allocated bytes Unit Unit part number Input Output EX600-SEN3 / 4 (32 outputs) 0 4 SI unit EX600-SEN3 / 4 (32 outputs) (with diagnostic data) 4 4 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs) (with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 2 0 EX600-DXE (16 inputs) 2 0 EX600-DXF (16 inputs) 2 0 EX600-DYB (8 outputs) 0 1 EX600-DYE (16 outputs

Series 10-MGF Guide table ø40, ø63, ø100

When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch. 95 Guide table10-MGF Dimensions 10-MGF40/63/100 4-N V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2-P(Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4-M K KB KC 6-K (6 positions) 9 9

NCRAI seies

ltil q{ry 30 (1 3/16) RailTyps DA7 o NCDBA!8363C.A5 & @l w Gommd DA8 ,n e), s63 121t2) 00 {3 1/8), 0100 (a) HailTyp DA5 O D-46 o : Available, X: Nol avilad NCDRAIBW3o-O-A7 Re e d Sw ilc h Spe c ific atio ns [od6l I}472 D{72H tra?t. BATTI D Tdl sr80 , &ttdr &r51 tr56 trt6,w D-lft Rday, Seqlericer lC CircLiil Applc.ton Rlay, Sequenc6r tc Cir!

IDX-OM-W038

N.C 3 N.O 1 2 7 6 5 4 N.O PE L N TB PLC GFCI ILS M C TC M C PLC THS M C OLR PTC CM PLC PTC C01 CM IDH6-10 TC IDH6 / IDHA6 TS M C F H SSR FM PRS P FM 1 IDH6/IDHA6 IDH6 / IDHA6 IDH6/IDHA6 IDH6 / IDHA6 CM FM OLR PRS ILS PTC PTC() MC THS TB TC TS SSR H F GFCI PLC 64 IDH Series IDX-OM-W038 . 6.4 6.3 IDH6 / IDHA6 1 65 IDH Series 6.4 IDX-OM-W038 7 7 7-1 / IDH Series 7-17-

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Step Motor Controller (Servo / 24 VDC)

Locations where strong magnetic or electric fields are generated. f. Locations where direct vibration or impact is applied to the product. g. Areas that are dusty, or are exposed to splashes of water and oil drops. h. Areas exposed to direct sunlight (ultraviolet ray). i. Environment at an altitude of 1000 meters or higher Heat radiation and withstand voltage will decrease.

High Vacuum L Type Valve

Construction and Outer dimensions Indicator Handle Ass'y(Maintenance part) (Including ,,,) 1 Bellows holder (Material: SUS304) 7 Heater(option) Exterior seal (Maintenance part) 3 Bellows (Material: SUS316L) Valve (Material: SUS304) 6 5 Valve seal (Maintenance part) 2 Body (Material: A6063) 4 D C E E F C H B G A A Unit: mm Model H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41

Base Mounted), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm)

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC12V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

Fieldbus system Ethernet POWERLINK compatible SI unit

Occupied word size Unit Unit part number Input Output System diagnostic 1 0 Diagnostic data Unit diagnostic 1 0 SI unit EX600-SPL1-X26 (32 outputs) 0 2 EX600-DXB (8 inputs) 1 0 EX600-DXC (8 inputs) 1 0 EX600-DXC1 (8 inputs) (with open circuit detection) 1 0 Digital input unit EX600-DXD (16 inputs) 1 0 EX600-DXE (16 inputs) 1 0 EX600-DXF (16 inputs) 1 0 EX600-DYB (8 outputs) 0 1 EX600-DYE