Exhaust Cleaner for Vacuum Pump AMV Series AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E
Vespel is a registered trademark of DuPont. 19 Intermediate flow (Tied-diaphragm) Two Stage Regulator for Ultra High Purity Series AP2700 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 150 slpm (NF3) to 900 slpm (H2) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Minimizes supply pressure effect by
L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.
H1 L4 (1) Applicable tubing O.D. d (g) Weight H2 D2 L1 L2 L3 M AS121F-M5-06W2 AS221F-01-06W2 AS221F-01-08W2 AS221F-01-10W2 AS221F-02-06W2 AS221F-02-08W2 AS221F-02-10W2 AS321F-02-06W2 AS321F-02-08W2 AS321F-02-10W2 AS321F-02-12W2 AS321F-03-06W2 AS321F-03-08W2 AS321F-03-10W2 AS321F-03-12W2 AS421F-04-10W2 AS421F-04-12W2 11.6 6 9 13.5 22.9 11.7 28.8 26 25.2 22.4 18.1 8 6 9.6 M5 x 0.8 13.2 6 19
93.6 23 8 15 31.1 41.7 21.2 117.0 20.9 3/8 19 26.5 58.7 53.7 52.7 47.7 10 18 33.6 44.2 21.2 124.9 23 12 20.8 35.4 46.3 21.8 137.8 24.8 1/2 24 30 65.9 58.4 54.3 46.8 12 20.8 37.6 50.5 25.8 186.8 24.8 Note) Reference thread dimensions after installation. 4
L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.
Step 2) Refer to Mounting Switches to Verify Opening/Closing of Gripper on page 12-11-19 and position auto switch in switch mounting groove. MRHQ Step 2) Refer to Mounting Switches to Verify Opening/Closing of Gripper on page 12-11-19 and position an auto switch in switch mounting groove. Misc.
29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37 14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41 29.5 8 15.2 60 14 19
Max. 34.4 AS1001F-23-3 AS1001F-01-3 38 4.5 16.8 37.6 1/8" 8.4 38 4.5 16.8 37.6 18 18 3.2 8.4 12.7 12.7 12 8 10.5 AS1001F-04-3 AS1001F-03-3 39.2 5.2 17.4 38.2 35 9.3 39.2 5.2 17.4 38.2 35 5/32" 19 19 4 3.5 9.3 3.5 12 8 10.5 AS1001F-06-3 AS1001F-05-3 6.2 18.5 40.7 6.2 18.5 39.3 36.1 11.4 48.7 3/16" 13.5 16.5 20 24 6 11.6 39.3 36.1 AS2001F-04-3 AS1001F-07-3 40.7 5.2 20.7 48 42.5 12 40.7 12.7
Weight (g) Auto switch model D-F6N D-F6P D-F6B 20 0.5 m (Nil) 19 3 m (L) Lead wire length 53 50 5 m (Z) 80 75 Dimensions (mm) D-F6 D-F6B 8.5 (22) 3.2 Indicator light (24) 16 Most sensitive position 7 2.7 10.6 7 29 D-F6N/F6P DD(22) 3.2 Most sensitive position 7 1609 Auto Switches Precautions 1 Be sure to read this before handling.
(Operating pressure: 0.5 MPa, Load mass: No load, Piping: I.D. 19 mm x length 1 m) Air-hydro Unit CC Series Air-hydro Converter CCT Series Valve Unit CCVS/CCVL Series Application Example 1. Function of stop valve Prevents load dropping (In an emergency) Multipoint intermediate stops Fixed end point (Not only solid but also liquid is available if there is pump mechanism at the end.)
27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36 30 40 22 21.8 10 20 0.02 0.02 0.05 U V W X Y Z AA AB AC AD AE AF AG AH AJ AK Model 1122+0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.030 0 +0.030 0 MHZ2-10D 12.4H9 M2.5 x 0.45 12 19.5 28.2 5.5 M3 x 0.5 6 M3 x 0.5 5.5 2.6 2H9 3 1.5 M3 x 0.5 6 112211221122MHZ2-16D 17.4H9 10.8 19
21 27 30 19 21 27 30 34.5 37 42 47.5 34.5 35.5 42 47.5 CQ-C012 CQ-C016 CQ-C020 CQ-C025 25 28 35 40 25 28 35 40 100 100 4 4 5 5 4 4 5 5 12 16 20 25 12 16 20 25 45.5 49 54 57.5 39.5 40.5 52 57.5 CQ2 80 90 10 5 5 8 CQ-C012 CQ-C016 CQ-C020 CQ-C025 100 100 CQS 80 90 10 The double clevis pin and retaining ring are not included.
Bore size (mm) 10 16 15 Stroke 76 116 Mounting Style and Accessory (For details , refer to page 10-15-9.) 30 Stroke 83 134 Basic weight 45 Stroke 94 156 Axial foot style Rod side style Flange side style 60 Stroke 104 180 Mounting Basic style Axial foot style 7 19 Mounting bracket weight Standard equipment Option Mounting nut Rod side flange style 5 13 Rod end nut Mounting nut and rod end
Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions. Design Piping Warning Warning Extended periods of continuous energization When high temperature fluids are used, use fittings and tubing with heat resistant features. (Self-align fittings, PTFE tubing, Copper tubing, etc.)
Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions.
override Indicator light U side 300 Lead wire length 2n-Rc 1/8, 1/4, C6, C8 Double check spacer (n) Individual SUP spacer (1) (2) Stations Control unit Pressure unit Filter element Drain cock D side Outlet for check Control unit n: Stations L Stations Formula 20n + 21 20n + 176 20n + 232.5 4 101 5 121 6 141 7 161 8 181 9 201 10 221 11 241 12 261 13 281 14 301 15 321 16 341 17 361 18 381 19
13 40 15 10 F 2 x 4 x M10 x 1.5 depth 12 107 Note 3) 70 2 x 2 x 8H7 +0.015 0 ( ) depth 12 60 1 52 (58.7) (70) 95 700.05 85 75 330 270 0.3 193 (173) 133 25 100 100 (10) Rc1/ 4 Unclamp side port 306 (30.2) (30.2) 360 139 Limit switch Note 1) Rc1/ 4 Clamp side port +0.015 0 4 x 8H7( )through 820.05 143 115 50 4 x 14 through 320 (mm) 3300.05 Arm type A B C T200 T240 T270 200 340 29 240 360 19
SMC B 19 19 23.5 23.5 D C 4 6 6 8 A 60 60 68 68 04 06 06 08 17 17 21 21 ZFC100A X17 Width across flats C ZFC2001115 Series ZFC Specific Product Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions. Selection Handling of One-touch Fittings 1.
Use fittings with the following specifications or use the recommended fittings on page 19. If the fitting dimensions are not compatible with the product, it may interfere with the product body. Therefore, such fittings cannot be used. For example, if the external dimensions of the fitting are too large, the following types of interference may occur.