8, 5/16" (4.9) 35 2-3.2 (For mounting) (Light/surge voltage suppressor) 36 + 28 18 25 16.1 21 31.5 [38.5] 1.6 P R2 R1 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7 20-L-01 3 4 5 M plug connector (M): SYJ7 20-M-01 3 4 5 DIN terminal (D): SYJ7 20-D-01 3 4 5 M8 connector (W0): SYJ7 20-W0-01 3 4 5 Approx. 300 (Lead wire length) 65 57.5 31.5 [38.5] Max. 10 16.1 46.2 M8 x 1
connector (L): SYJ3 20-L-M3 (-F) M8 connector (WO): SYJ3 20-WO-M3 (-F) M plug connector (M): SYJ3 20-M-M3 (-F) 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1] Approx. 300 (Lead wire length) 50.1 [52.3] 40.3 [42.5] 49.2 41.8 53.1 46.6 35.3 13.5 13.5 13.5 111.5 [115.9] 91.9 [96.3] 109.7 15 15 22.1 15 22.1 22.1 Refer to page 1-5-79 for dimentions with
phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability
A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 2 The 1 m lead wire is only applicable to the D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 3 m L (Example) M9NWL 1 m M (Example) M9NWM 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.
Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube 1 m, 3 m, 5 m Test conditions G, H type: 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa ISA3-F ISA3-G Piping length: 1 m, 3 m, 5 m Piping length: 1 m, 3 m, 5 m : In the default condition, the value can be displayed as 0. : In the default condition, when the distance is below 9, 0 will be displayed.
Element length L250 L500 (L250 x 2) L750 (L250 x 3) A B C Symbol Port size Port size R 1 2 10 20 Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) Nominal filtration accuracy (m) Symbol Symbol 050 070 074 075 100 105 120 X50 001 002 005 010 020 040 50 70 74 75 100 105 120 0.5 1 2 5 10 20 40 Symbol Element category Material Bronze Stainless steel Polypropylene Glass fiber
Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Caution Lubricator (1) Avoid rising piping and piping branches on the outlet piping.
L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 5 5 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 50 50 Load mass m [kg] Load mass m [kg] 10 10 3 3 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 18 MGPK Series L L m m Plate Material Aluminum Alloy
For Vacuum Equipment Precautions, refer to Handling Precautions for SMC Products (M-E03-3) and Operation Manual.
5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked with are produced upon receipt of order.
Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71
I 0.33 0.14 (3.5)Dia (P,R portl < In Case of ll5) < In Case of 3 ) @ q , g @ A 10-32 Nnm. fM5) n ports L Type Plug Connector (L) M Type Plug Connector(M) Nom.
0.1] 10 Note 3) 0 , 5 , 10 D0418 2 Load mass [10g] 5 Yes to 100 Movement mode No D0419 2 1 0 , 1 No. 1 (0: ABS, 1: REL) (No. 0) Note 5) D041A 2 Threshold force value [0.1] 1 1 to 50 Yes D041B 2 Positioning width [m] 1 0 to 30 Yes Yes AREA A position 1 [m] More than D041C 4 1 Note1) 0 Note 1) Yes AREA A position 2 [m] More than D041E 4 1 Note1) 0 Note 1) Yes AREA B position 1 [m] More than
S070 3 port (Option) 100 VAC 200 VAC 110 VAC 220 VAC M plug connector (M) 1.3 1.7 (A) 2 VQ M plug connector (M) VKF 1 (P) 3 (R) N.O. Locking type (Tool required) VQZ DIN terminal (YZ) (Except VQZ100) VQZ300 DIN terminal (Y) VZ Except VQZ100 ) ( VS 2.4 3.0 VFN Except VQZ100 ) ( 4-14-1 Body Ported 2 Series VQZ100/200/300 Precautions Be sure to read before handling.
(kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (5) V = 1000 mm/s 3 CXSM CXSL 32 2 Weight m (kg) 25 1 20
3) (4) (5) 2032 Data Horizontal Mounting l Mounting orientation m m Refer to the caution notes below.
Area: (800) 258-9200-www.stevenengineering.com Grommet (G) (Poppet) VT 1.0 VP With light/surge voltage suppressor Non-locking push type (Tool required) VG L plug connector (L) (A) 2 Base Mounted VQZ200 VP (Standard) 12 VDC 24 VDC 1 (P) 3 (R) S070 N.C. 3 port (Option) 100 VAC 200 VAC 110 VAC 220 VAC L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector
1.0 m EX9-AC020-SSPS: Cable with M12 connector, Socket, Plug, Straight 2.0 m EX9-AC030-SSPS: Cable with M12 connector, Socket, Plug, Straight 3.0 m EX9-AC050-SSPS: Cable with M12 connector, Socket, Plug, Straight 5.0 m EX9-AC100-SSPS: Cable with M12 connector, Socket, Plug, Straight 10.0 m -135No.EX-OMX1011 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3
Lead wire length (m) Applicable load Load voltage Auto switch model Indicator light Pre-wired Type Electrical entry Wiring (output) Special function 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None connector AC DC Tie-rod mount Band mount M9N 3-wire (NPN) G59 IC circuit 5 V, 12 V M9P 3-wire (PNP) Grommet G5P 24 V M9B 12 V 2-wire K59 G39 K39 Reed auto switch Solid state auto switch 3-wire (NPN) 2-wire 5 V
Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520