VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

Modular Style Regulator with Built-in Pressure Gauge Series ARG

U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

Compact

1 u 1 i 1 !

0.01

T U U U U E L E E E E L S L L L S S S S L L L L L 6 9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor

C76

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Manifold Specifications

assembly DIN rail VZ5000-51A-1U e VFN For D side, set with w VZ5000-52A-2D r VZ5000-52A-1U For U side End block assembly t VZ5000-52A-1D For D side End block assembly y VZ5000-52A-2U End block assembly For U side, set with e u VZ5000-51A-1M Without D-sub connector, For indicated location P/R port with One-touch fitting for 10 SUP/EXH block assembly i To add a manifold block assembly, add

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Plug u Purge r Purge Purge air for dehumidification Component Parts Material Description No.

C76

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Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CG1Q20-PS CG1Q25-PS CG1Q32-PS CG1Q40-PS CG1Q50-PS CG1Q63-PS CG1Q80-PS CG1Q100-PS Contents 20 25 32 40 50 63 80 100 Set of the nos. u, i, o, !

Secondary Batteries

Enclosure: IP65 compliant Series 2 4 90-SV2000 90-SV4000 SUP/EXH block assembly specifications SI unit Protocol type DeviceNet Symbol Q Internal pilot External pilot Nil R Valve stations P, E port location U D B Note Symbol 02 Stations U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) 2 stations (1) Double wiring specifications 08 02 8 stations 2 stations (

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5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

S070

1 Barb fitting assembly (for 1(P), 3(R) ports) SS07051A60 Applicable tubing 6/4 Note) Order is accepted in 10 units. 4-11-15 Series S070 Exploded View of Stacking Type Body Ported Type/SS073M01-C Exploded View of Stacking Type D side end plate assembly Valve U side end plate assembly w e q r < U End Plate Assembly > q U end plate assembly no.

2/3 Port Valve

0 e e u u r !1 i r t !1 !0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No. Description Material Note Body Undercover Cover Plate Valve element A Valve element B Piston Return spring Valve seat Rod Parallel pin Pilot solenoid valve When the pilot operated solenoid valve !

IIIIIII

E G H K M N P 5.66 143 9 4.39 r 1 1 4 ) 1 '18 't 28 32 5) ) 0 6 1 s ) 012 (3) 080 204 1 5 4 (39) o 7 1 (18) 1 2 6 (321 1 4 2 (36) 1.20 o,24 (6) (30) NV:2il450-N012 U T 4-63 lbs. (2.1 Ko) P.T 0.1 7 in. (4.4 mm) u 0.08 in. (2.0 mm) 0.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A B c U E F G H K M N P R 525 t33 4) 4 3 9 1 1 1 4 ) 1 1 8 t30l ) 4 7 t22\ 0 0 6 a1 5l ) l t (3) 0 8 0 20 4\ 1 5 7 r4nl )

Modular Type Regulators Series AR

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

3 Position Cylinder Series RZQ

U U U U U U U U 32 40 50 63 27 29 31.5 32.5 38.5 35 38 34 30.5 32.5 35 36 42 38.5 41.5 37.5 44 REA 36.5 38.5 41 42 48 44.5 47.5 43.5 50 40 42 47.5 48.5 54.5 51 54 50 56.5 REB REC Operating Range CY (mm) Bore size Auto switch model 32 40 50 63 CX D-A9 (V) 9.5 9.5 9.5 11.5 MQ D-M9 (V) D-M9W (V) D-M9A (V) L D-A7 (H) (C) D-A80 (H) (C) 6 5.5 6 6.5 RHC 12 11 10 12 RZQ D-A79W 13 14 14 16 D-F7 (

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

PEEK

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM105R Description No. Material Component Parts: LVM10R3, 10R4, 10R6, 105R !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bushing assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 SUY u Spacer 8 i !

0.55

Exploded view q r How to Calculate the Flow Rate u For obtaining the flow rate, refer to front matters 44 to 47. t y e o i o Magnifying figure Self-up screw 2 1 3 1504