CRQ2

Applicable shaft types: J, X, T W1 = L1 = L3 = X = W2 = L2 = L4 = Y = (mm) (mm) W2 L2 max Y Y Y Y Y W1 L1 max X 2 X 2 X 2.5 X 3 X 3 L4 max L2 1 L2 1 L2 2 L2 2 L2 2 Y 4 to 18 4.5 to 20 6.5 to 30 8.5 to 32 9.5 to 36 L3 max L1 1 L1 1 L1 2 L1 2 L1 2 Size 10 15 20 30 40 X 6 to 18 6.5 to 20 9.5 to 30 11.5 to 32 12.5 to 36 Size 10 15 20 30 40 0.5 to 1.5 0.5 to 1.5 1 to 2 1 to 2 1

Rotary Actuator/Vane Style Series CRB2

The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm However, for M5 with T shaft, the maximum dimension L2 is 1.5 times the thread size.

Rotary Actuator

(Example) For M3: L1 = 6 mm $The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm However, for M5 with T shaft, the maximum dimension L2 is 1.5 times the thread size.

LG1H

600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 0 10 20 30 Transfer load m (kg) m 4000 a = 1000 L3 (mm) L3 a = 3000 a = 2000 2000 m Mey a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 148 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

45

L1 L2 L3 L4 160.5 173 185.5 185.5 198 210.5 223 235.5 M3 Terminal screw A: Orange B: Green 150 162.5 175 175 187.5 200 212.5 225 129 139.5 150 160.5 171 181.5 192 202.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 16.5 (Rail mounting hole pitch 12.5) Stations n 10 stations 11 12 13 14 15 16 17 stations 248 248 260.5 273 285.5 298 310.5 310.5 L1 L2 L3 L4 237.5 237.5 250 262.5 275 287.5 300 300 213 223.5

45

M3 Terminal screw Stations n 10 stations 11 12 13 14 15 16 stations A: Orange B: Green 348 373 385.5 398 410.5 435.5 448 L1 L2 L3 L4 337.5 362.5 375 387.5 400 425 437.5 251 267 283 299 315 331 347 12.5 17 15 13.5 11.5 16 14.5 (Rail mounting hole pitch 12.5) 1-6-129

S Couplers Series KK/KKH/KK13

H L2 L1 Female thread type (mm) Body size H Width across flats T Connection port size Effective area mm2 L1 Min. bore size Mass g L2 Model KK2P-M5F 8.1 2.6 8 3.4 12.3 M5 x 0.8 17.6 M5 T KK3P-01F 10.4 14 18.4 Rc 1/8 28.3 -02F 22.6 20.8 17 6.0 Rc 1/4 1/8 35.0 19.9 -03F 23.2 19 Rc 3/8 36.8 KK4P-02F 23.9 17 Rc 1/4 37.2 50.9 H L2 9.0 25.2 1/4 -03F 24.6 39.8 19 Rc 3/8 L1 KK6P-03F 28.6 43.3 106.2

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Connection threads Rc/NPT Model L1 L2 H G F M N E B Applicable tubing O.D.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Approx. 300 (Lead wire length) 69.8 [76.8] Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC Formula: L1 = 19n + 11 L2 = 19n + 23 n: Stations (Max. 20 stations) Dimensions L n 2 3 110.5 100 80 15.5 68 4 135.5 125 99 18.5 87 5 148 137.5 118 15 106 6 173 162.5 137 18 125 7 198 187.5 156 21 144 8 210.5 200 175 18 163 9 235.5 225 194 21 182 10 248 237.5 213 17.5 201

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L3 L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 402 Series 10-SZ3000 EX510 Gateway-type

HRX-OM-I051

HRX-OM-I051 1stEditionJanuary.2005 Rev.May.2018 Operation Manual Original Instructions Thermo-Chiller HRZ001-L HRZ002-L HRZ004-L HRZ008-L HRZ001-L1 HRZ002-L1 HRZ004-L1 HRZ008-L1 HRZ001-L2 HRZ002-L2 HRZ004-L2 HRZ008-L2 HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ001-H1 HRZ002-H1 HRZ004-H1 HRZ008-H1 HRZ002-W HRZ008-W HRZ002-W1 HRZ008-W1 HRZ010-WS HRZ010-W1S HRZ010-W2S Save This Manual Carefully

4/5 Port Air Operated Valve Series SYJA3000

wire length) 91.7 [96.1] Approx. 300 C4 N3 For (Built-in One-touch fitting) Grommet (G) For M5 L1 L2 Manual override 4 10 2-4.5 (For mounting) 10 1/8 (P, R port) 36.5 17 12.5 54.2 [56.4] 53.4 [55.6] 78.8 [83.2] P R 31.5 3.2 31.2 P R (4.4) B B B B B 32 15.3 7.5 17 16 A A A A A SV 1 (Station n) (Station 1) L1 L2 4.5 (Pitch) P = 10.5 SZ (Light/Surge voltage suppressor) 15.5 15.5 (Station n)

VQC

30 25 C10 1(P) port 13.5 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250 260.5

0.55

Type of actuation Body model 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center Symbol VF5000 VF1000 VF3000 2 3 > > > Note) Not available for the base mounted type. 2-position single 2-position double L2 L2 3EB 3EB 5EA 5EA 1P 1P L2 L1 L3 3-position closed center/exhaust center/pressure center L2 3EB Series L1 L2

Single Axis Electric Actuator Series LJ1H

400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 3000 a = 2000 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 44

5 Port Solenoid Valve, Series VQC

30 25 13.5 C10 1(P) port 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

B 2 A 4 6 B 2 A 4 SMC SMC SMC SMC SMC 5 Cable length B 2 A 4 4 L2 L1 B 2 A 4 3 B 2 A 4 2 P=41 34.5 48 P=41 B 2 A 4 1 58.5 68.5 X 12 Stations D side 42 16 15.5 22 107.8 51 179 117 69 Electrical entry on D side (LD) 2-1/8 (external pilot port) Dimensions Formulas: L1 = 41n + 76, L2 = 41n + 96 L n 9 445 465 8 404 424 L1 L2 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 1 117 137

Speed Controller with Indicator

flats) Metric Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-23 3.2 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10-32/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3

Modular F.R.L. Unit

72.5 L2 43 57 75 L1 41.5 55 72.5 L2 57 74 95 L1 41.5 55 72.5 L2 43 57 75 L1 41.5 55 72.5 L2 57 74 95 L3 43 57 75 L1 41.5 55 72.5 L2 57 74 95 AC20A AC30A AC40A AC40A-06 T S TV SV V Attachment Model L1 41.5 55 55 72.5 77.5 93 98 98 L1 28 41.5 55 55 72.5 77.5 93 98 98 L1 41.5 55 55 72.5 L2 43 57 57 75 L1 41.5 55 55 72.5 L2 57 74 74 95 L1 41.5 55 55 72.5 L2 61 76 76 99 AC10B