Number of Ports: 2 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller), Indicator: None
Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: None, Indicator: None
Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller), Indicator: None
Number of Ports: 2 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: None, Indicator: None
Parallel Seal Type Slit Valve Opening window size: 50 x 336 mm Valve type 1Insert type (Without body) 2Cassette type (Standard) 3Cassette type (Half MESC) Number of axes and seal type: One axis bellows Applicable water size: For 300mm wafer Table 1.
A Mounting part (1) Fixed PD port 3 Guideline of PD port 1 PD port 2 tightening torque 3 to 5 [N-m] (5) Recommended One-touch fitting to be mounted at the PD port is the KQ2S06-01[]S or KQ2S07-34[]S. One-touch fitting may interfere with the top surface of the pad depending on the fitting dimensions.
Tube deformation ratio at the minimum bending radius = L D 2d 1 x 100 Mandrel Here, : Deformation ratio (%) d : Tube O.D.
Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.
Size: 01(Size 26mm), Stations: 2 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 2 Stations, A, B Port: Side, 3/8, Port Thread: NPTF, SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 3 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 3 Stations, A, B Port: Side, 3/8, Port Thread: NPTF, SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 5 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 6 Stations, A, B Port: Side, 1/4, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: EX250/500 Serial Kit w/o SI Unit, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 6 Stations, A, B Port: Side, 3/8, Port Thread: NPTF, SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 4 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 6 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -
Size: 01(Size 26mm), Stations: 4 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 8 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 5 Stations, A, B Port: Side, 3/8, Port Thread: NPTF, SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: 1 Input Block, Type of Input Block: M12, 4 Inputs, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: Direct Exhaust w/Built-in Silencer, X Option: -, CE Compliant: -
Size: 01(Size 26mm), Stations: 2 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: 4 Input Blocks, Type of Input Block: M12, 4 Inputs, Input Block COM: NPN, Silencer: -, X Option: -, CE Compliant: -