Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 ZF Manifold ZP SP ZCUK AMJ AMV Pitch AEP HEP Related Equipment (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244

Made to Order

320 100 52 90 14.6 244 320 ZZ + (2 x Stroke) S + (2 x Stroke) NA MB1 series GC NB (mm) Bore size GC NA NB S ZZ 32 36 62 10.6 180 231 40 38 62 10.6 180 235 50 41 71 10.6 200 262 63 43 71 10.6 200 262 80 52 88 14.6 244 320 100 52 88 14.6 244 320 -X -X NA S + (2 x Stroke) ZZ + (2 x Stroke) 1795 Made to Order Common Specifications: -XC13: Auto Switch Rail Mounting Type Auto Switch Rail Mounting

SMC Pneumatic Clean Series

Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520 3520 10 102 1020 10200 102000 ISO Class 9 8 83 832

1

ZZ + 2 x Stroke S + 2 x Stroke Series CA2 Bore size (mm) ZZ S GC 40 231 169 29 50 250 181 33 63 269 197 33 80 321 233 41 100 342 253 41 ZZ + 2 x Stroke Series MB MB, MB1 Common Bore size (mm) ZZ S GC S + 2 x Stroke ZZ + 2 x Stroke 32 231 180 36 40 235 180 38 50 262 200 41 Series MB1 63 262 200 43 GC 80 320 244 52 100 320 244 52 ZZ + (2 x Stroke) S + (2 x Stroke) Stroke range is shown as

4/5 Port Solenoid Valve

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 41 Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in one-touch fitting) 65.2 [67.4] Approx. 300 (Lead

Air Cylinder

) + l 80 236 245 + l 254 263 + l 230 (244) 239 (253) + l 248 (262) 257 (277) + l 100 244 253 + l 266 275 + l 238 (252) 247 (261) + l 260 (274) 269 (283) + l Bore size (mm) Double end lock: -Wl Z ZZ Without rod boot With rod boot Without rod boot With rod boot 20 141 161 + l 152 172 + l 25 148 170 + l 161 183 + l 32 151 173 + l 166 188 + l 40 173 193 + l 191 211 + l 50 202 222 + l 222 242

CA2

21 16 M12 x 1.75 10 26 Without rod boot With rod boot P Bore size (mm) S H L MM N RR U l Z ZZ e f h Z ZZ 30 M14 x 1.5 27 1/4 10 84 16 51 165 175 43 11.2 59 1/4 stroke 173 183 40 50 35 M18 x 1.5 30 3/8 12 90 19 58 183 195 52 11.2 66 1/4 stroke 191 203 63 40 M18 x 1.5 31 3/8 16 98 23 58 196 212 52 11.2 66 1/4 stroke 204 220 80 48 M22 x 1.5 37 1/2 20 116 28 71 235 255 65 12.5 80 1/4 stroke 244

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

range [mm] A B d11 D1 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ ZY E R L2 L9 H SL 32 Up to 500 22 30 12.2 12 G 1/8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 4 7 26 146 190 47 32.5 15 4 48 8 40 Up to 500 24 35 14.2 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 4 5 8.9 30 163 213 54 38 17 4 54 8 50 Up to 600 32 40 19 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 4 6 5.1 37 179 244

15

Allowable load mass on guides and moment Allowable moment [Nm] M1 1.3 2.6 8.6 17 30 67 96 Bore size (mm) Allowable load mass on guides m [kg] 6 10 15 20 25 32 40 M2 1.4 2.9 8.9 18 35 82 124 M3 1.3 2.6 8.6 17 30 67 96 9 15 35 60 104 195 244 The table above indicates the maximum performance of the guide, but does not show the actual allowable work load mass.

70astamb1

(drawing above) Foot style (L) Without Air Cushion Cushion valve Port Bore size (mm) LS ZZ 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LH LY 4-LD LT Foot Style ZZ + Stroke LS + Stroke X Y X Y LX Bore size (mm) Stroke range X Y LD LH LS LT LX LY LZ ZZ LZ 32 40 50 63 80 100 22 24 27 27 30 32 9 11 11 14 14 16 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2 3.2 3.6 4.5 4.5

Table of Contents

25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

style: (F) 4-FD B FY FZ FX FT (mm) Stroke range Bore size (mm) B FT FD FX FY FZ 40 50 63 Up to 1000 Up to 1000 Up to 1000 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 Rear flange style: (G) 4-FD B FY ZZ + Stroke FT FX FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 Up to 1000 Up to 1000 Up to 1000 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 220 244

Cylinder with Lock Series CNG

10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 10 6.6 35 54.5 40 4.5 48 28 67.7 3 12 22 M5 x 0.8 49.4 10 (12) 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 10 6.6 40 65.5 49 4.5 56 30 78.7 4 12 30 M6 x 1 58.4 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 Z l H Z 0.25 ZZ 186 e f h ZZ 35 165 30 16 55 185 206 Stroke x 201 40 180 30 17 62 202 223 208 40 184 35 17 62 206 230 237 (244

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGP B FY MGQ MGG FT FZ FX MGC (mm) MGF Stroke range Bore size (mm) B FT FD FX FY FZ MGZ 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125 138 Up to 1000 Up to 1000 Up to 1000 MGT Head flange style: (G) 4 x FD B FY ZZ + Stroke FT FX FZ D(mm) -X Stroke range Bore size (mm) B FT FD FX FY FZ ZZ Individual -X 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125 138 220 244

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

P 61.5 <62.5> Cover diameter 1.5 Cross section 0.23mm2 R1 R2 5 3 73.5 1 P Indicator light R1 R2 < >: AC 5 3 Equation L1=16n+10 L2=16n+20 n: Station (Max. 20 stations) Dimensions 2 42 52 75 85.5 L n 3 58 68 87.5 98 20 330 340 362.5 373 15 250 260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350 360.5 12 202 212 237.5 248 13 218 228 250 260.5 14 234 244

mb1

(drawing above) Foot style (L) Without Air Cushion Cushion valve Port Bore size (mm) LS ZZ 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LH LY 4-LD LT Foot Style ZZ + Stroke LS + Stroke X Y X Y LX Bore size (mm) Stroke range X Y LD LH LS LT LX LY LZ ZZ LZ 32 40 50 63 80 100 22 24 27 27 30 32 9 11 11 14 14 16 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2 3.2 3.6 4.5 4.5

Series VQ Base Mounted Metal Seal/Rubber Seal

Max. 24) 2 65.5 83.5 112.5 123 3 76 94 125 135.5 4 86.5 104.5 125 135.5 5 97 115 137.5 148 6 107.5 125.5 150 160.5 7 118 136 162.5 173 8 128.5 146.5 175 185.5 9 139 157 187.5 198 10 149.5 167.5 187.5 198 11 160 178 200 210.5 12 170.5 188.5 212.5 223 13 181 199 225 235.5 14 191.5 209.5 237.5 248 15 202 220 250 260.5 16 212.5 230.5 250 260.5 17 223 241 262.5 273 18 233.5 251.5 275 285.5 19 244

SYJ3000/5000/7000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 1-5-44 45 5 Port Solenoid Valve Rubber Seal Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in One-touch

Slider Type Ball Screw Drive/11-LEFS Series

50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456 580 8 3 450 11-LEFS32l-500l 782 834 506 630 10 4 600 11-LEFS32l-550l 832

V100

218 9 270 244 10 296 270 [ ]: With light/surge voltage suppressor 4-7-7 8 Series VT307 Dimensions: Individual Exhaust (Interchangeable with VT301 for mounting) VV307-01-3--F P = 26 (Applicable cable O.D.)