Vacuum System Peripherals:

Series ZM 13-14-20 4.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

MQQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3.3 12.2 15.2 1.2 0.3 3 6, 10 5 18.3 22.7 1.5 0.7 4.8 16 9 19.2 25 1.75 1.15 8.6 20, 25 18 Series MQQ/MQM Safety

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model K J M L1 E L2 M H t W1 W2 1/8 LQ1P11 LQ1P12 LQ1P21 LQ1P22 LQ1P31 LQ1P32 LQ1P33 LQ1P41 LQ1P42 LQ1P51 LQ1P52 LQ1P61 LQ1P62 4 3 6 4 10 8 6 12 10 19 12 25 19 Class 1 11.5 17 6 44 10 11 13 8 10.5 16.5 23.5 55.5 15 15 17 8 14.5 6 14 J Panel thickness (Max. t) 23 30 69 20 21 24 8 20.5 7 17 W2 W1 M 28 35 78.5 24 26 28 8 24.5 7 21 1/4 (E) (E) H 39 43.5 29 100 39 43 9 36.5 9 26 L1 Class 2 to

MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

ASV T AK ASS Inch Size ASR L4 L5 A1 A2 M1 Max.

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 112.5 121 133 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21

Rotary Table/

(mm) Internal cross section a (mm 2) Nominal size = Length of piping [mm] a = Internal cross section of piping [mm 2] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 [l (ANR)] QC = Air consumption required for one reciprocation of rotary table 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 7.5 10 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7

Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

High Purity Fluoropolymer

Model M E L M H t W1 W2 K J 1/8 LQ1P11 LQ1P12 LQ1P21 LQ1P22 LQ1P31 LQ1P32 LQ1P33 LQ1P41 LQ1P42 LQ1P51 LQ1P52 LQ1P61 LQ1P62 4 3 6 4 10 8 6 12 10 19 12 25 19 Class 1 11.5 6 11 13 44 10.5 8 10 16.5 15 17 55.5 14.5 8 6 14 15 J Panel thickness (Max. t) 23 21 24 69 20.5 8 7 17 20 W2 W1 M 28 26 28 78.5 24.5 8 7 21 24 1/4 (E) (E) H 39 39 43 100 36.5 9 9 26 29 (L) Class 2 to 5 Panel aperture K 49

Suction Guard (Produced upon receipt of order) FHG Series

HOW 10 (1 1/4B) 12 (1 1/2B) 16 (2B) 45 20 (2 1/2B) 24 (3B) Fixed Note) Refer to page 509 for the T dimension. Replacement Element Part No.

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

CNS

Graph (1) 30 20 10 2.

XL

msec T msec Bellows seal 200 200 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Double acting (dual operation) XLF-40 Normally closed XLG-40 Valve type Model 80 80 60 60 T msec T msec 40 40 O-ring seal 20 20 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Valve type XLD-40 Normally closed Model Main valve Initial exhaust valve 600 600 400 400 Smooth exhaust valve T msec T msec 200 200 0

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A 0.51 D C 1/4-28 UNF B 0.16 JM-025 0.44 3/4", 7/8" JM-03 0.50 0.19 5/16-24 UNF 0.50 1 1/16" JM-045 0.69 0.79 0.26 7/16-20 UNF 1 1/4", 1 1/2" JM-04 0.56 3/8-24 UNF 0.65 0.23 1 1/4", 1 1/2" (Non-rotating) JM-05 0.75 1/2-20 UNF 0.32 0.87 2" 6-14-20 21 Series NCM Mounting Bracket Accessory Material: Rolled steel P dia.

Pin Clamp Cylinder Series CKQ/CLKQ

2 r o t !1 i !3 u q !9 y @7 @0 @6 @5 @4 Auto switch !8 @1 @2 !6 !1 @3 !7 !0 !5 !

CQS

Contents Action CQSB12-S-PS CQSB12-T-PS 12 12 Kits include items !2, !3 and !4 from the table above. CQSB16-S-PS CQSB16-T-PS 16 16 Kits include item !3 Single acting Spring return Single acting Spring extend CQSB20-S-PS CQSB20-T-PS 20 20 from the table above. CQSB25-S-PS CQSB25-T-PS 25 25 Seal kits consist of item !

CL

8.5 10.5 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40 10.5 M10 x 1.25 25.6 10 10 M14 x 1.5 18 10 Y-G04 16 22 M14 x 1.5 41.6 Rod Side Pivot Bracket Head Side Pivot Bracket 20 to 40 Material: Rolled steel 20 to 40 Material: Rolled steel TU TN TU TdH9 TdH9 TN TR TR TH 0.1 TH

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FA5-20-051 1 pc. VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.