V

O P T I O N S L Mounting Brackets R O TAT I O N B O R E ( M M) 90 90 180 180 270 270 b h Model A B C D E F N Q R G H J K L M P l 50 2 80 3.14 100 4 0.16 0.16 NCRB50 2.64 3.38 0.77 1.55 0.47 0.98 1.18 M6x1x10 NPT 1/8 0.79 0.12 0.39 0.51 0.20 0.53 1.34 1.97 0.20 0.20 NCRB80 3.74 4.06 0.93 2.11 0.67 1.18 1.77 M8x1.25x13 NPT 1/4 1.42 0.12 0.51 0.63 0.20 0.75 1.57 2.75 0.28 0.28 NCRB100 4.92 4.92

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

How to Order With bracket (standard) Air suction filter In-line type with One-touch fitting 100 04 B ZFC IN/OUT applicable tube O.D.

Scale Cylinder & Counter Series CE

In principle, this function counts each time there is a rise or fall in either of the A or B phase pulses. 2 1 Amplification/ Interpolation circuit Counter A phase B phase Magnetic resistance element Piston rod Magnet Count 1 2 3 4 5 6 7 8 9 10 .

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Symbol Metric sizes 06 10 12 19 6 10 12 19 Inch sizes 07 11 13 19 1/4 3/8 1/2 3/4 Variations LVD20-T Model LVD30-T LVD40-T LVD50-T Orifice diameter 4 8 10 16 Tubing O.D. Metric 6 10 12 19 Inch Valve type Type Symbol 1/4 3/8 1/2 3/4 Basic type N.C. PA PB PA N.O. B A B A PB B A N.C. N.O. Double acting Double acting With flow rate adjustment N.C. PA PA B A B A PB Double acting N.C.

VQ4000

SY SYJ 0 VQ4 0 1 Plug-in SX 2 5 VQ4 1 Plug lead VK VZ Enclosure Configuration Dust-proof 2 position single 3 position closed center VF (A) 4 (B) 2 (A) 4 (B) 2 Dust tight, jet proof (Applicable to IP 65) W 3 1 VFR 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 VP7 Metal Rubber B: Locking slotted style : Non-locking

Serial Transmission System Series EX250 Series EX500

) A B Coil voltage 24 VDC 5 P EA EB 3 position closed center A B 3 Function Note 1) EAPEB Standard type (1 W) External pilot Low wattage type (0.5 W) Nil R Y 3 position exhaust center A B Note 2) 4 Note 1) When specifying more than one option, enter symbols in alphabetical order.

1

Note 3) Refer to the catalog, since the dimensions of standard stroke Series CQ2 and CQS are different from that of long stroke type. 6-18-1 2 SMC Actuators: Copper-free Air Cylinders 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinders 20-series has been added by design modification. (98.6.1) Series Application Bore size (mm) Standard Copper-free 6 8 12 (10

4 Port Solenoid Valve Series VQD1000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% 1549 4 Port Solenoid Valve Direct Operated Poppet Type Series VQD1000 How to Order Valves 5 1 5 L 1 VQD1 Type of actuation Made to Order Fluid-contact part: Oil-free X16 Single type (A) 4 (B) 2 Port size 1 M5 Nil M5 M5 thread Without sub-plate (Manifold) M5 thread Body ported 1 (P) 3 (R) Base mounted (A) 4 (B) 2 Latching type Electrical

CJ2Q

1 !

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40 RoHS How to Order B S E 20 180 S Z CRB2 u Z L M9B CDRB2 B W 20 180 S With auto switch q r e !1 i o !

E-ITV-STD-RF-A

( Current ) pressure i s di spl ayed i s di spl ayed f or approx. 1 second The set t i ng i s reset Reset cont ent I t em Reset cont ent Appl i cat i on m odel F_1 0% F. S. Current Vol t age i nput t ype F_2 100% F. S. Current Vol t age i nput t ype P_1P_2 100% F. S. Sw i t ch out put t ype P_1P_4 0% F. S.

IDX-OM-W019

Circuit / Operation Principles . 6 6 Chapter 7 Specification for Option A 7 1 Safety instructions. 7 1 7 2 Specification . 7 1 7 3 Air piping . 7 1 7 4 Dryer specifications . 7 1 Chapter 8 Specification for Option K 8 1 Safety instructions. 8 1 8 2 Specifications . 8 1 Chapter 9 Specification for Option R 9 1 Safety instructions. 9 1 9 2 Specifications of GFCI . 9 1 9 3 Cautions for handling

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

3/16" 1/4" 1/8", 5/32" 3/8" 1/2" 5/32" 3/16" 1/4" 5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" ASF Flow rate (l/min (ANR)) 1050 100 130 290 660 1390 420 920 230 460 Controlled flow (Free flow) Effective area (mm 2) 16 1.5 2 4.5 10 21 6.5 14 3.5 7 Note) Flow rate values are measured at 0.5 MPa and 20C.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

100 R 1/2 Elbow type AS121F-U10/32 AS131F-U10/32 6, 10, 16, 20 10-32 UNF AS221F-N01 AS231F-N01 20, 25, 32 NPT 1/8 AS221F-N02 AS231F-N02 20, 25, 32, 40 NPT 1/4 AS AS321F-N02 AS331F-N02 40, 50, 63 NPT 1/4 AS321F-N03 AS331F-N03 40, 50, 63 NPT 3/8 ASP AS421F-N04 AS431F-N04 63, 80, 100 NPT 1/2 ASN Note 1) Elbow type only Note 2) Meter-out and meter-in types can be visually differentiated

I/O Configurator (NFC version)

B): 1 byte occupied Output data: [Unit 0] Digital output unit (EX600-DY#B): 1 byte occupied [Unit 3] Wireless slave unit (EX600-WSV#): 0 byte occupied -76No.EX-OMV0017 Memory map Input data Output data Module name Unit name Module name Unit name byte0 System diagnosis 1 DX#B (Unit 0) byte1 System diagnosis 2 EX600-WEN# (Unit 2) Wireless master module Valve output: 16 points byte2 System diagnosis

SI unit for DeviceNet TM

No.1 No.2 No.3 No.4 No.5 No.6 1 2 4 8 16 32 0 0 0 0 0 0 0 1 1 0 0 0 0 0 MAC ID 2 0 1 0 0 0 0 62 0 1 1 1 1 1 63 1 1 1 1 1 1 Communication speed setting (switches No. 7 to 8) Set the DeviceNetTM communication speed with a binary code of 125 kbps or 250 kbps or 500 kbps.