VBA-OM-S006

VBA-0M-S006 1.5MPa VBA1A 2MPa, 1.5MPa 1 1 1 VBA1 1 O VBA2 4 VBA2 1 VBA1 4 1 1 1 1 () () / OUT / VBAT-M46C / VBAT-M46 4 11 () VBAT10S1-U-X104 / /VBAT10S-Y-4 () VBAT-U 30 1 1 VBA1 4 O VBA1 1 /VBAT5S-Y-4 1 1 / 1 VBAT-U 1 1 ( 3 ) VBAT-V1 () () / / VBAT-M46C / VBAT-M46 VBAT05S1-U-X104 2 OUT VBAT-M46C VBAT05S1-U-X104 VBAT10S1-U-X104 IN VBAT05S1-U-X104

Modular Pressure Control Equipment F.R.L. Replacement Procedure

4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Floating Joint/Stainless Steel Type Series JS

Example: Nut for JS40 2 Series JS Dimensions JS10, 16 M M U D J U F B G H C E P A Use a 4mm precision watch wrench to attach the JS10 male threads.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Symbol Applicable stations Mounting position U side D side Both sides M Special specifications 2 to 10 stations 2 to 10 stations 2 to 16 stations D U B Indicate special specifications separately on a manifold specification sheet. Note 2) The number of blanking plate assemblies is also included.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

L** N 1W (Std.)* 0.5W (Low power) Large flow capacity 1W (Latching coil, + com) Coil voltage 24VDC 12VDC 110VAC 1W (Latching coil, com 5 6 3 Indicator light and surge voltage suppressor 1 2 3 Stations Uside Dside *Std valve is non-polar (+ or com) ** Contact P/A when ordering latching type valves mounted on a manifold. 3m How to Order Manifold VV3Q 1 1 08 C U 1 D X11 Plug-in Unit Manifold

Hydraulic Filters

If a holding mechanism is necessary for the nonreset type, provide it using electric circuits. 8 Suction Filter with Case Series FH99 Dimensions Differential pressure indication switch Blanking cap Differential pressure indicator 16 8 x T (65) U N I (34) U E F U OUT LET X H O 62 B R S 4 x K OUTLET OUTLET Q P INLET Differential pressure indicator Differential pressure indication switch G W

O

U RL ht t p: //w w w . sm cw orl d. com 4141, Sot okanda, Chi yodaku, Tokyo 1010021 J APAN Tel : +81 3 5207 8249 Fax: +81 3 5298 5362 1 Saf et y i nst ruct i ons These saf et y i nst ruct i ons are i nt ended t o prevent a hazardous si t uat i on and/or equi pm ent dam age.

O

U RL ht t p: //w w w . sm cw orl d. com 4141, Sot okanda, Chi yodaku, Tokyo 1010021 J APAN Tel : +81 3 5207 8249 Fax: +81 3 5298 5362 1 Saf et y i nst ruct i ons These saf et y i nst ruct i ons are i nt ended t o prevent a hazardous si t uat i on and/or equi pm ent dam age.

48

is shown in the graph below. 6 5 Plate end deflection [mm] 0 4 50 100 150 200 250 300 350 Max. speed [mm/s] 3 2 1 0 0 50 100 150 200 Stroke [mm] 5 Dual Rod Cylinder JMGP Series Bore Size 12 (10 x 2), 16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U

Compact Guide Cylinder

(32 x 2) 32 (25 x 2) Load mass [kg] 25 (20 x 2) 20 (16 x 2) 10 16 (12 x 2) 12 (10 x 2) 1 0 50 100 150 200 250 300 350 Maximum speed [mm/sec] 5 Compact Guide Cylinder JMGP Series Bore Size 12 (10 x 2), 16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U

HRL

Select the proper size of cable according to an actual condition. 330 HRL Series Dual Channel Refrigerated Thermo-chiller for Lasers Operation Display Panel Items shown on the touch panel home screen q t w y u i o e r !1 !2 !3 !0 !4 No. Classification CH no.

Series 10-, 21- AW-B Filter Regulator

Please contact SMC regarding the connection thread NPT and pressure gauge supply for psi unit specifications. 1080 A 1021-AW-B Filter Regulator Dimensions J J D M N T AW20-B 1021Bracket (Option) S U Panel fitting dimension F Y R Applicable tubing 6/4 W C Q V BB IN OUT OUT K H IN Z P2 Plate thickness 10-/21-AW20-B: Max. 3.5 Pressure gauge (Option) (Pressure gauge port size) B 2 x P1 (Port

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

u q w e r t q w e r t i i o o !

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

CJ5-S

3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !1 Valve retainer gasket Rod end nut Stainless steel 304 !

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage Electrical entry U, Z spec.

Ejector Valve Unit Series ZYY/ZYX

type) Nil 1 None With silencer Types R and U are DC only.

NCQ8

1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.