High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

3

D-M9W D-M9A D-A9 D-M9V D-M9WV D-M9AV D-A9V MK MK MK2T CK1 CLK2 CLKG CKQ CLKQ Auto Switch Proper Mounting Position (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-M9AV D-A9V D-M9V D-M9WV D-M9AV CK CLK D-M9A D-A9 D-A9V Bore size (mm) D-M9V D-M9WV CKQ Hs Hs Bore size A B W A B W A B W A B W 4.5 (2) 12 16 19 21 17 19 12 12 4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6

Regulator

AR20-D AR30-D AR40-D AR40-06-D AR50-D AR60-D AR43P-270AS AR54P-270AS Note 4) (1) Bracket assembly Note 1) AR23P-270AS AR33P-270AS AR43P-260S (2) Set nut AR23P-260S AR33P-260S G46-10-01 Rc G36-10-01 G46-10-N01 G36-10-N01 Pressure gauge Note 2) NPT (Round type) G46-P10-N01-X30 Z : Both in MPa and psi G36-P10-N01-X30 (3) G G36-10-01 G46-10-01 G36-10-01-L Pressure gauge Note 2) Rc G46

Compact Cylinder with Solenoid Valve/

Auto switch model D-M9(V), M9W(V), A9(V) Port aperture Bore size (mm) A (Mounting groove number) B (Mounting groove number) C (Mounting groove number) D (Mounting groove number) A (2) (2) (2) 32 D B (2) (2) (2) 40 Diagram seen from the piston rod 50 (2) (2) (2) C 63 (2) (2) (2) Operating Range Auto Switch Mounting Auto switch model Bore size (mm) 32 40 50 63 D-M9, D-M9V D-M9W

0.55

; Symbol 2-position single 2-position single 2(B) (A)4 8 (EA)5 1 3(EB) (P) Strainer 4 3 2 5 1 2 (A) (EB) (B) (EA) (P) : = @ > ; Symbol 2-position double 2-position double 2(B) (A)4 (EA)5 1 3(EB) (P) 8 5 2 4 3 2 1 (A) (P) (B) (EB) (EA) Symbol 3-position closed center/exhaust center/pressure center 3-position closed center 2(B) (A)4 : = @ > ; (EA)5 1 3(EB) (P) 3-position exhaust center 2(B

Title not found

:CFOI ::,.8W..: With internal shock absorber 2 to 5 t mes more k netc enersy 'Lomol "d ,v.l "1"d J m-r bo Flexible mounting for wiring and piping.

Free Mount Cylinder for Vacuum Series ZCUK

d through AMJ Hexagon width across flats 8 Width across flats L AMV 2 x P through HA + Stroke 4 x T counterbore AEP S + Stroke Z + 2 x Stroke HEP Related Equipment Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY GA GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5 Note 1) Note 2) ZC(D)UKQ16 ZC(D)UKQ20 ZC(D)UKQ25 ZC(D)UKQ32 M5 x 0.8 M5 x 0.8 11 12.5 20 32 2 6 7 8

Compact Cylinder with Air Cushion and Lock Series RLQ

Minimum Auto Switch Mounting Stroke (mm) D-A7/A80 D-A73C/A80C D-A7H/A80H D-A79W D-F7V/J79C D-F7WV/F7BAVL D-F7/J79 D-F7W/J79W D-F7BAL/F7NTL D-F79F D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL DNumber of auto switches -X Individual -X 1 pc. 20 20 20 20 2 pcs. 859 Series RLQ Operationg Range (mm) (mm) Auto switch type Bore size Auto switch type Bore size 32 40 50 63 32 40 50 63 D-A9/A9V

Digital Pressure Switch ( compatible)

(Hysteresis mode, error output, switch output off (Window comparator mode) -42No.PS-OMV0006-D 2 value display The 2 value display function displays the items listed below on the right and left side of the sub display.

Shock Absorbers and Rate Controls

D A 7 S | V x 2 5 0 Metric protective sleeve, (r{) lll.r, Nn/hour model Weigli (kcl DA5(}lltx?

LEC-OM07605CN

D 4 DB 16.E 5 DB 16.F 6 DB 8 2 8.

Refrigerated Air Dryers

Applicable air dryer Port size Rc A B C D Weight [kg] I D F IDF-BP317 IDF22E 1 134 405 928 198 4.4 IDF-BP318 IDF37E 1 1/2 980 7.7 IDU-BP336 IDU22E 1 93 445 1465 46 4.5 IDU-BP337 IDU37E 1 1/2 64 550 1635 70 8.0 I D U Dimensions [mm] IDU-BP338 IDU55E 2 53 530 1783 110 12.3 IDU75E 1918 Part no.

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 13 2 Color Indication Solid State Switches Direct Mount Type D-Y7NW(V)/Y7PW(V)/D-Y7BW(V) Auto Switch Specifications D-Y7W, D-Y7WV (with indicator light) D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto switch part no.

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 13 2 Color Indication Solid State Switches Direct Mount Type D-Y7NW(V)/Y7PW(V)/D-Y7BW(V) Auto Switch Specifications D-Y7W, D-Y7WV (with indicator light) D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto switch part no.

Lubricator

Note 2) : For NPT thread type only. -8- 5. Structural Drawing, Option and Replacement Parts Structural drawing / Option / Replacement parts AL30-D / AL40-D AL50-D / AL60-D AL20-D (2) (3) (2) (3) (1) (1) (5) (4) (5) (4) (6) (6) (7) (7) Option Description No. Note 1) Part No.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101 MIL-C-24308 (L4) L3 (3.2) 101.2 Switch

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Auto Switch Mounting Stroke for 8 Stroke (mm) Note Applicable auto switch Mounting condition Piping direction 2 pcs. on same side D-A9 Standard piping type (1) (2) D-M9, D-M9W (2) D-A9V D-A9 1 pc. each on 2 sides (2) D-M9, D-M9W (2) 2 x port size D-A9V D-A9 Axial piping type (2) 2 pcs. on same side D-M9, D-M9W (2) D-A9V D-M9V, D-M9WV D-F8 D-A9 (2) 1 pc. each on 2 sides D-M9, D-M9W (2) D-A9V

Basic Type/Direct Mount Type

Technical Data Note 2) The astrisk denotes the dimensions which are different from the CY1RG series. 1477 CY3B/CY3R Series Auto Switch Mounting Auto Switch Proper Mounting Position for Stroke End Detection (Reference dimension) A B C D Auto Switch Proper Mounting Position 6 to 20 (mm) Auto switch model A B C D D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W

VS 8-2/VS 8-4

VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4