A_HEC-OM-I009

Parity Bit P a r i t y B i t M O D E < W i t h o u t Setting range : Without (no parity), Odd, Even Indicated content : Parity bit (Ex. : Without) Function : Sets parity bit for communication. 4. Data Length D a t a L e n g t h M O D E < 8 B i t s Setting range : 7Bits, 8Bits Indicated content : Data length(Ex. : 8Bits) Function : Sets data length for communication. 5.

PF2D

OFF n-1 n-2 ISA2 Real-time flow rate Error correction Window comparator mode H: Hysteresis IS Note 1) n H H ON LED display Contents Solution ZSM A current of more than 80 mA is flowing to OUT1 Check the load and wiring for OUT1 NO OFF n-2 n-1 Real-time flow rate PF2 Note 1) Output mode is set to inverted output at the factory before shipment.

-fl Seies

DIN connector (Wiring) Ground t l j + + H z t l 3 o o @ry a (+,-) indicate the direction of DC Solenoid valve with tight, surge vollage supprc$sor. NVFS valves can be used negative (-) COM. AC and 100VDC or more aWhen using COM terminal, jumper contacts (Part No. A2683-56A (NVFR3O00); 42683-564 (NVFR4000) allow easy specification of stations COM.

PF2D

Real-time switch output Unit switching Hysteresis mode ON YES Display Real-time flow rate Accumulated flow OFF P-1 P-2 L/min L Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (L/min, L, m3 or m3x10) will be set for the type without the unit switching function.

Clean Room Rodless Cylinder Series CYP ø15, ø32

] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15

VZS2000

Other dimensions are the same as the grommet type. 3-7-14

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Normally Closed SERIES NVF 110 DIRECTIONAL AIR VALVE DIRECT SOLENOID OPERATED CHARACTEFISTICS Port Sizss (NPTO '10-32 P&E; 10-32 or 1/8"A Opelating Prsssure 0'100 PSI; 0-150 PSI (H) ftoof Pre6sur 225 PSIG (15Kgflcm'z) Operailng Temperature 14-140'F(101o + 6O"C) a;a lnrusn s.6 VA (50 Hz),5.0 VA(60 Hz) Holding 3.4 VA (50 Hz),2.3 VA (60 Hz) PowerConaumptlon DC 1 . 8 W c, 0.055 , 0.05 (H Type

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

OFF n-1 n-2 Real-time flow rate Error correction Window comparator mode H : Hysteresis Note1) "n" LED display Contents Solution H H ON A current of more than 80mA is flowing to OUT1 Check the load and wiring for OUT1 NO OFF n-2 n-1 Real-time flow rate Note1) Output mode is set to inverted output at the factory before shipment. The setting data has changed for whatever reasons.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E

With Factory Installed

~---l---+-+-H 8 0perating pressure is 0.lSMPa{1.Skgf/cm2} or more. 0.15 i;c ,.,:+-t--t..o-t---t--t---"-l--+-H O Orain piping should be .010 tube (inside 0.1 r===t=l===t---H diameter 4mm) and less than Sm in length. 8 Rotate drain cock left direction in manual exhaust for emergency. , ".' " ... ~" O~ 0.2 0.3 OA OS 0.6 0 7 08 0 9 2000 4000 Flow rate /min (ANR) Inlet pressure MPa (Differential

BP1000

2 4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15

PF3A7xxH.eng

When the flow falls below the set value by the amount of hysteresis [H] or more, the switch will turn OFF. If the operation shown in the diagram below is acceptable, then keep these settings. For more detailed settings, set each function in the function selection mode.

PF3A7xxH_eng

When the flow falls below the set value by the amount of hysteresis [H] or more, the switch will turn OFF. If the operation shown in the diagram below is acceptable, then keep these settings.

Fieldbus Device Handheld Terminal

Explanation of screen a) Error log number b) Manifold number/Unit number (Refer to page 16) c) Channel number d) Displayed unit symbol (Refer to page 52) e) The next error log is displayed with the and buttons. f) h: hour, m: minute, s: second The time elapsed from when the power supply was applied until the time when error was generated is displayed.

0.01

0 w q t e u Cover 2 Aluminum alloy Fitting body 3 Stainless steel alloy Bracket 4 Stainless steel alloy O-ring A 5 H-NBR O-ring B 6 H-NBR Rod cover 7 Stainless steel alloy Tie-rod 8 Stainless steel alloy Cap nut 9 Stainless steel alloy Plain washer 10 Stainless steel alloy Replacement Parts r y o No.

MHL2

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

Low Differential Pressure Sensor

A System error P-1 Internal data error H-1 Internal data error Min. B Nonabsorption H Unit display switching function Work 1 Work 2 Work n Atmosphere Display units can be switched with this function. Units that can be displayed vary depending on the range of the pressure sensors connected to the controller.

ZSE40/ISE40

SET [N] H (Fixed hysteresis) = 3 digits H H ON ISA2 Window comparator mode OFF OUT1: Selection of the output mode NO n-1 n-2 IS High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) ZSM Auto Preset (For adsorption confirmation) PF2 1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1 IF Data SET Press the SET button.