Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

CNG

LH LT LX LZ X Y W XA XB 141 (149) 117 (125) 24 7 5 6 3 M8 x 1.25 1/8 21.5 2 65 4 6 25 3 50 62 15 10 3 12 151 (159) 127 (135) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 154 (162) 128 (136) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28 3 60 74 16 10 3 12 169 (178) 142 (151) 44 8.5 6 14 4 M14 x 1.5 1/8 28 2.5 81 4 6.6 33 3 68 84 16.5 10 4 12 (mm) Without rod

NCA1

Auto switch capable Bore size Standard Stroke 1.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 2, 2.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order NC D A1 B 150 0400 A XC8 Adjustable Stroke Auto Switch Mounting Bore Stroke Adjustment Range A: 0~1 B: 0~2 Dimensions (in) Bore (in) MM KK A AA B C D DD E EA EE G K

Applicable Auto Switch Model

MGQ, MVGQ CXS MGP MY1B MY1C, MY1M MY1H RSH CY1R CY1H ML2B MGF 3 3 3.5 5.5 7.5 6 10 5 10 7 3.5 5.5 8 3.5 5.5 9.5 3.5 10 3.5 7.5 6.5 7 7.5 6 10 7 5 6 6 6 5 5 6 9 5 7.5 Note) Average value at normal temperature including hysteresis.

CQS

Double acting: double rod 4.5 8.5 9.5 16.5 12 5 8 10 18.5 16 Bore size (mm) 9 13 5 22 20 10 15 3 24 25 Note 1) The product is shipped out of the factory in installation state "a)".

Prevents Micro-Bubbles

10 11 12 13 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class Body class Tubing size Plug Tubing size Plug LVC 6 1/4" 6 1/4" LVA Base type 2 2 8 8 A Stacking type LVH 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" LVD 02 2 stations 3 3 12 1/2" 12 1/2" LVQ 05 5 stations 12 1/2" 12 1/2" LQ 4 4 19, 3/4" 19, 3/4" LVN TI/ TIL How to Order Valve PA LVH 2 0 S07 A PAX Body class

Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

4/5 Port Air Operated Valve Series SYJA3000

F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting) 2-3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2-1 (Bleed port) 21 R2 P P1 P R R (11) (0.5) 13

Series AP500

-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 3) Ra max 15 in (0.4 m) or 10 in (0.25 m) Face seal, Tube weld NPT 1/8 inch Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Bonnet port 3.7 psig (0.026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop 5.4 psig (0.038 MPa) rise in delivery pressure per 100 psig (0.7 MPa

Speed Controller with One-touch Fitting

10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 31 (32) AS321F-03-08(S)A 8 13.2 22.7 33 14.2 AS321F-03-10(S)A 10 15.9 26.7 37 28 15.6 32 (33) AS321F-03-12(S)A 12 18.5 29.7 40 26.8 17 34 (35) AS421F-04-10(S)A 10 1/2 24 (23.8) 10.4 21.8 32.1 28.7 42.3 40.7 37.1 35.5 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 54 (53) AS421F-04-12(S)A 12 18.5 30.8 43.7 (43.6)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

1.10 3 1.60 8 38.0 7.9 0.33 1.0 3 8 (10) 4.5 1.90 10 46.0 15.0 0.61 6 0.33 3 7.9 26.0 1.10 Note) Weight of grommet type.

CE

Auto switch model Bore size (mm) 12 20 10 3 D-A9/A9V 6 D-M9/M9V D-F9W/F9WV D-F9BAL 2.5 3 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

SZ3000

13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

CE

Bore size (mm) B A B A B A 12 11 78 12 79 8 75 20 15 85 16 86 12 82 Operating Range Auto switch model Bore size (mm) 12 20 10 3 D-A9/A9V 6 D-M9/M9V D-F9W/F9WV D-F9BAL 2.5 3 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

screw 103.3 (131.5) A 4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable

Intrinsically Safe Valve

/N.C.) 1500 mm 4(A) 2(B) 2000 mm A Note 2) 3000 mm 10 mm Semi-standard 5(EA) 3(EB) 1(P) Electrical entry 4-position dual 3 port valves (N.O./N.O.) 2(B) 4(A) Symbol Electrical entry B Note 2) L-type plug connector Pilot type Nil R L Internal pilot 5(EA) 3(EB) 1(P) 4-position dual 3 port valves (N.C./N.O.)

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Terminal no. 10 10 22.5 1 3 4 1 3 4 1 3 1 3 Marker tag Marker tag 4.4 4 Socket connector 4 Plug connector pin assignment Wiring M8 M8 pin assignment 238 A Accessory Between the Sensor/Switch and the Input Device Y Connector Specifications Part no.

MXS Series Air Slide Table

B 4.2 8.5 9 9 20 1 5 4H9 3.5 deep +0.030 0 NN-M5 X 0.8 thread 10 deep 4H9 3.5 deep +0.030 0 A B HA GA Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 GA 15 15 15 42 51 61 111 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202 M 71 71 71 83 103 149 203 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 I 10 10 10 10 22 43

PF2A/PF2W

Note 4) The sensor unitis comformed to CE mark. 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 16-11-18 15 Series PF2W Digital Flow Switch For Water How to Order 0 0 A PF2W3 Remote type Display unit Unit specifications Flow rate range Nil M With unit switching function Fixed SI unit Note) A Panel mounting Mounting Flow rate range Type for sensor unit Symbol 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to