CV/MVGQ

Auto switch model 2 (Same side) 2 (Different sides) 1 2 1 D-C7/C80 Band mounting style Rail mounting style 50 15 10 D-H7/H7W 60 15 10 D-H7NF D-C73C/C80C Note) Small round head screws 65 15 10 D-H7C Plate D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V D-J79C D-A79W/F7W D-J79W D-F7WV/F79F Solenoid valve 10 5 Pipe gasket 5 5 15 10 2.

3 Port Solenoid Valve

If the mounted valve is N.O., apply pressure to the 3(E) port and exhaust air from the 1(P) port. 4 Series VV100 3 Port Solenoid Valve/D-sub Connector Connector Type Manifold Plug-in How to Order Valve for Connector Type Standard V1 1 U 0 C4 T D 5 C D 1 C Z J 0 C4 5 With switch V1 Individual wiring [For plug-in mixed mounting] T D Note) See page 13 for the dedicated non plug-in individual

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

GB MM CB CA D 0 0.3 0 0.3 BA BB NA A + 0.2 + 0.1 CX 0 0.3 U BA H S + Stroke Z + Stroke ZZ + Stroke R 0 0.3 BB (mm) CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 5 46 8 82 87 15 12 12.5 22.5 16 15 20 20 5 6.5 5 8 23 28 M5 x 0.8 8 47 10 85 93 18.3 18.3 12.5 27.5 Clevis pin and retaining ring are shipped together. 838 Stainless

HRX-OM-X084

) 20 *1 It is not possible to select only option D.

Modular Type Air Filter Series AF

Note 6) For NPT thread type. : Combination not available : Available only with NPT thread : Combination available : Varies depending on the model Accessory/Optional specification combinations Applicable micro mist separator Optional specification Accessory Symbol Combination AFD20 B C D 2 6 8 C J R Z W AFD30 to 40 Accessory/Optional specifications B C D Accessories Optional specifications

Compact Type

D-A9 (Reed switch) D-F9 D-F9W D-M9 (Solid state switch) D-F9V, D-F9V D-A9V (Reed switch) D-F9V D-F9V (Solid state switch) C3 CXSJ15 to 32 (mm) Bore size C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9, D-F9W, D-M9 D-A9V, D-F9V D-A9 (Reed switch) D-F9 D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9V (Solid

Compact Type Dual-Rod Cylinder Series CXSJ

D-A9 (Reed switch) D-F9 D-F9W D-M9 (Solid state switch) D-F9V, D-F9V D-A9V (Reed switch) D-F9V D-F9V (Solid state switch) C3 CXSJ15 to 32 (mm) Bore size C2 Symbol Auto switch model A1 32 0.3 7.1 6.2 3.1 25 0.3 7.1 6.2 0.4 20 0.3 7.1 6.2 1.2 15 0.3 7.1 6.2 2.2 C1 A1 C1 C2 C3 D-F9, D-F9W, D-M9 D-A9V, D-F9V D-A9 (Reed switch) D-F9 D-F9W (Solid state switch) D-M9 D-A9V (Reed switch) D-F9V (Solid

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Power supply/Output connection cable (2 m) ZS-28-A D Bracket With M3 x 5L (2 pcs.) ZS-28-B Mounting screw (M3 x 8L) Sensor connector 1 pc. ZS-28-C Panel mount adapter With M3 x 8L (2 pcs.) ZS-27-C Panel mount adapter Panel mount adapter + Front protective cover With M3 x 8L (2 pcs.) ZS-27-D Note) These options are not attached in the factory, but packed together with it for shipment.

Table of Contents

D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-Z73/D-Z76/D-Z80 Direct Mounting Style. 2-color Indication Type . D-A79W Rail Mounting Style . Solid State Switches . General Purpose Type. D-F79/D-F7P/D-J79 Rail Mounting Style. D-F7NV/D-F7PV/D-F7BV Rail Mounting Style .

MK

Note D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F7BAVL D-F79F D-F7NTL Switch mounting screw RS H A 20, 25 BQ-1 (M3 x 0.5 x 8l) Square nut D-A7/A8 D-A73C/A80C D-A7H/A80H D-A79W RZQ Switch mounting screw 32, 40 50, 63 Magnetic body (Steel plate, etc.)

Cylinder with Lock Series MNB

Z (Ex.)

Electric Actuator Triple Axis P&P Unit

Weight of body without motor (kg) Stroke (mm) Y / Z axis in-line mount Y / Z axis side mount 100 4.2 4.7 150 4.6 5.1 200 5.0 5.5 250 5.4 5.9 300 5.8 6.3 350 6.2 6.7 400 6.6 7.1 450 7.0 7.5 500 7.4 7.9 550 7.8 8.3 Stroke (mm) Y / Z axis in-line mount Y / Z axis side mount 600 8.2 8.7 650 8.6 9.1 700 9.0 9.5 750 9.4 9.9 800 9.8 10.3 850 10.2 10.7 900 10.6 11.1 950 11.0 11.5 1000 11.4 11.9 4

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Grade 2 Grade 2 Rubber stopper Grade 4 Grade 4 Metal stopper Auto switches / Proper mounting position for stroke end detection 11-/22MXP6 A A C D D B Reed switch D-A93 Solid state switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6

Fieldbus System

Only Z and NZ types are available for the product with power saving circuit. Select a valve from R, U, S or Z when the SI Unit common is positive common.

VDW

Enter together in order, counting from station 1 on the D side.

Series MXP Precision Air Slide Table

Wiring Electrical entry Auto switch type Electrical entry from inside 3-wire D-F9P B Solid state switch D-F9 In-line 2-wire D-F9B 3-wire D-F9NW,D-F9PW In-line 2 color indication solid state switch D-F9 W 2-wire D-F9BW 3-wire D-F9NWV,D-F9PWV Perpendicular B 2-wire D-F9BWV Install auto switch as shown in figure below.

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGC MGF CY1 MY1 3.20-13 Series MGC Auto Switch Proper Mounting Position (Stroke End) D-C7, C8 D-H7 D-B5, B6 D-G5, K5 D-B7, B8 D-G7, K7 Auto Switch Mounting Position Auto Switch Mounting Height (mm) (mm) D-G5, K5 D-G5lW D-K59W D-B5, B6 D-B59W D-G5BAL D-G59F D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-H7C D-G5NTL D-C7, C8 D-H7 D-H7lW D-H7lF D-H7BAL Auto switch D-B7