AK1000

(Inletq, Outletw) Delivery pressure Delivery pressure 5 to 150 psig (0.034 to 1.0 MPa) 5 to 200 psig (0.034 to 1.4 MPa) 5 to 300 psig (0.034 to 2.1 MPa) 10 to 500 psig (0.07 to 3.4 MPa) Code Bonnet option 01 02 06 10 15 20 30 50 0.5 to 10 psig (0.0034 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) Code Bonnet Standard Panel installation

Dual Speed Controller with One-touch Fitting Series ASD

pressure: 0.5 MPa 50 10 20 0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 40 0.6 0.1 0.2 30 0.4 5 10 20 0.05 0.1 0.2 10 0 Number of needle rotations 5 10 0 0 0 Number of needle rotations 5 10 0 0 Number of needle rotations 10 20 15-9-68 Dual Speed Controller for Low Speed Operation With One-touch

AR20-B to AR60-B

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

BDL (108.5) 10 4.6 10 34.3 101 74.5 35 5.5 28.1 12.7 ADDRESS No.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Serial wiring: EX180 Response Time Type of actuation Response time ms (at 0.5 MPa) SJ2000 SJ3000 2 position single 2 position double 3 position 4 position dual 3 port valve 16 or less 10 or less 34 or less 30 or less 16 or less 10 or less 22 or less 30 or less Gateway system Serial transmission system

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

Series AS-FM/AS-M/ASD-FM

0.8 Upstream pressure 0.5MPa 20 10 50 0.15 0.3 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 40 0.6 Effective area mm Effective area mm Effective area mm 0.1 0.2 30 0.4 10 5 20 0.1 0.05 0.2 10 0 0 0 0 0 Number of needle revolutions 5 10 Number of needle revolutions 5 10 10 20 0 Number of needle revolutions 2 Speed Controller for Low Speed Operation Series AS-FM Construction

Fieldbus System

Core wire colors Brown: Not connected Note 1), 24 VDC 10% (Control power supply) Note 2) White: 24 VDC +10%/5% (Solenoid valve power supply) Blue: Not connected Note 1), 0 V (Control power supply) Note 2) Black: 0 V (Solenoid valve power supply) Gray: Not connected Brown: 24 VDC +10%/5% (Solenoid valve power supply) White: 0 V (Solenoid valve power supply) Blue: 24 VDC 10% (Control power

E-P HYREG ® Series VY1

AV Response time 10 ms 30 ms Fluid Air/Inert gas AU 0 to 50C (With no condensation) Ambient and fluid temperature AF 0.88 MPa Maximum operating pressure Regulating pressure range 0.05 MPa to supply pressure AR Set pressure to 0.88 MPa (VY101) External pilot pressure (Direct operated) 1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC Command signal IR 12 VDC 10%, 24 VDC 10%, 1.8 W

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Inlet pressure: 0.5 MPa 10 20 50 0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area(mm2) Effective area(mm2) 40 0.6 0.1 0.2 30 5 10 0.4 20 0.05 0.1 0.2 10 0 0 0 0 0 0 10 20 5 5 10 10 Number of needle rotations Number of needle rotations Number of needle rotations 15-9-58 3 Speed Controller for Low Speed Operation With One-touch

E-P HYREG ® Series VY1 1

10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port

SZ3000

Purchasing order is available in units of 10 pieces.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

pressure: 0.5 MPa 10 20 50 0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 40 0.6 0.1 0.2 30 0.4 5 10 20 0.05 0.1 0.2 10 0 0 0 0 0 10 20 5 10 5 10 0 Number of needle rotations Number of needle rotations Number of needle rotations 15-9-62 Speed Controller for Low Speed Operation Standard Type (

Stainless Steel 316

22.5 18 20.9 23.3 D 6 Applicable tubing 30.1 3/8 23.8 35 17 35.5 1/4 29.5 28 10 8 23 39 M 31 3/8 24.7 29 L 19 3/8 26.5 30 12 32.8 24.8 10 60 22 1/2 24.6 54 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Maximum vacuum pressure 80 80 30 60 60 20 40 40 Air consumption 10 20 20 Maximum suction flow 0 5 10 15 0 0.1 0.2 0.3 0.4 0.5 Suction flow (l/min(ANR)) Supply pressure (MPa) Supply pressure 0.43 MPa ZQ110 / Flow Characteristics ZQ110 / Exhaust Characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum

Fieldbus system (SI unit compatible CompoNet TM )

Item Specification Rated voltage 300 V Rated current 10 A Contact resistance 2 m Insulation resistance 1012 Withstand voltage 2 kV Operating temperature range -40 to +105 oC Rating cable cross section AWG 30 to 12 Recommended tightening torque 0.5 to 0.6 Nm Weight 10 g or less Power supply connector: T-branch type (EX9-CP3: 1 pc. supplied with product) The power supply connector EX9-CP3

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40 RoHS How to Order B S E 20 180 S Z CRB2 u Z L M9B CDRB2 B W 20 180 S With auto switch q r e !1 i o !

Free-Mounting Cylinder with Air Cushion Series CU

11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20, 30, 40, 50, 60, 70, 80, 90,

Magnetic Separator FHM Series

20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using

Digital Flow Switch (Integrated display type)

If it is 10 L/min, there is a flow of 10 L passing through the device in 1 minute. The voltage drop across the product (and therefore not applied to the load), when the switch output is ON. The voltage drop will vary with load current, and ideally should be 0 V.