Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

13 13 5 5 10 10 5-M5 X 0.8 10 10 5-M5 X 0.8 28 (Piping port) 28 (Piping port) [ ] for AC Other dimensions are the same as the grommet style. [ ] for AC Other dimensions are the same as the grommet style. 1.2-16 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center 3 4 5 G H Grommet (G), (H): SYJ3 40-l ll-M5 10 9 5 10 SY 16.5 33.5 SYJ 2-1.8 (Mounting holes) Manual override

3

Allowable Moment of Inertia (32, 40) 10-1 New MK series Current MK series Current MK2 series Allowable moment of inertia [kgm2] New MK series (Standard) 10-2 Current MK2 series (Heavy-duty type) 10-3 Current MK series Overall Length Dimensions Standard arm Bore size Shortened dimensions (compared to the current MK2 series) 20 25 32 40 50 63 MK series overall length (at 20st) 10-4 50 100 200

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(Using Step No.2) [Normal mode] Step data example Pushing Trigger Pushing Moving Move Accele Decele Speed Position Area1 Area2 In position No. ration ration force L V speed mm/s force ment MOD mm/s mm mm mm mm mm/s2 mm/s2 % % % 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 Flow chart (example) Controller Parallel I/O signal (1) Select

Guide Table Series MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 Load weight m0 (kg) MGF63 Load weight m0 (kg) Load

ML2B

RE A B REC ML2B/W1 ML2B/W2 ML2B/W3 ML2B/W4 CX 50 10 10 CY 20 3 4 5 3 4 5 10 Load weight (kg) Load weight (kg) Load weight (kg) 10 Load weight (kg) MQQ M 5 4 3 2 2 5 2 1 1 RHC 1 0.5 0.4 0.3 0.5 0.4 0.3 ML2B40 ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 MK(2) ML2B40 ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 ML2B25 ML2B25 ML2B25 100 200 300 400 500 1000 1500 ML2B40

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Compact Electric Actuator Series LG1

67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 210 A (Table movement range) 78.5 (78.5) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 1 D 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 95 8(4)-6.2 C 100 () () (170) 95 95 B 110 20 (150) () () Dimensions A 329 429 529 629 729 829 929 1029 1129

Low Profile Slide Table Series MXF

MXS (mm) B E MXQ Stroke Stroke Model A 75 20 50 10 20 10 30 100 30 50 75 100 MXF MXF8 13.5 9 14 14 1 4 4 MXF12 16 17.1 33.1 17.1 7.1 7.1 23.1 MXW MXF16 21.2 29.8 19.8 50.8 9.8 19.8 40.8 MXF20 23.4 MXJ 26.7 24.7 74.7 50.2 14.7 16.7 40.2 64.7 Solid State Auto Switch: D-M9BV, D-M9NV, D-M9PV, D-M9BWV, D-M9NWV, D-M9PWV MXP (mm) B B E MXY Stroke Stroke Model A 20 20 10 30 50 75 100 10

Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

CQM

-15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Rotary Table/Vane Style Series MSU

Refer to pages 796 and 797 for detailed solid state auto switches with pre-wired connectors. 150 Series MSUA Rotary Table: High Precision Type Vane Style Specifications MSUA1 MSUA3 MSUA7 MSUA20 Model 2 Single vane Vane type Rotating angle 1 90 10 180 10 90 10 180 10 90 10 180 10 90 10 180 10 Fluid Air (Non-lube) Proof pressure (MPa) 1.05 1.5 5 to 60C Ambient and fluid temperature

MGP

1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

Step Motor Controller (Servo / 24 VDC)

(Using Step No.2) [Normal mode] Step data example Accele Decele Pushing T rigger Pushing Moving No Moveme Speed Position Area1 Area2 In position ration ration force L V speed mm/s force . nt MOD mm/s mm mm mm mm mm/s2 mm/s2 % % % 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 Flow chart (example) Controller Parallel I/O signal (1) Select

Digital Flow Switches

PF2W504--1 PF2W520--1 PF2W540--1 PF2W511--1 PF2W504--2 PF2W520--2 PF2W540--2 PF2W511--2 4 0.5 4 0.5 16 2 16 2 40 5 40 5 100 10 100 10 19 Series PF2W For Water Digital Flow Switch to are terminal numbers.

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

ZQ-OM01301

(AMR) ] Vacuum pressure [kPa] Vacuum pressure 30 -60 25 -60 Air consumption 20 -40 -40 15 Suction flow rate 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 Supply pressure[MPa] Suction flow rate [L/min (AMR) ] ZQ10A Exhaust Characteristics Flow Rate Characteristics Supply pressure0.43MPa -100 70 -100 Air consumption [L/min (AMR) ] 60 -80 Vacuum pressure Vacuum pressure [kPa] -80 Vacuum

pa

Ratio of discharge rate against fresh water (%) PAX PB 50 0 1 10 100 1000 Viscosity (mPas) Caution Viscosities up to 1000 mPas can be used.