SMC Corporation of America
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Therefore, in performance of Test Operation (T) Positioning Operation (I) with the set-up software, actuators move distance per pulse is set per pulse unit of the encoder. Item Setting range Unit Description Set the command speed of the servo motor for execution of positioning Motorspeed 0 ~ Allowed Speed for each actuator r/min (Motor rotations/min).

9-859 580 Portugal (351) 22 610 89 22 No.LC-OM08901 A (3/3) Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 France (33) 1-64 76 10 00 Spain (34) 945-18 41 00 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4 1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T

(5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T

-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y :DIN +-No.1 No.2 T

Series: 542 (VP500), Pilot Type: R (External Pilot), Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light & Surge Suppressor: w/o Light & Surge Suppressor, Manual Override: Non-locking Push Type, Port Size: 02 (1/4), Thread Type: T (NPTF), Actuation Type: A (N.C., Normally Closed)

Body Type: T (Body Ported), Valve Option: Standard Type, Pressure Specifications: K (High-Pressure Type (1MPa), Semi-Standard), Rated Voltage: 5 (24 VDC), Electrical Entry: H (600mm Lead Wire), Light_Surge Voltage Suppressor: None, Port Size: 02 [1/4 (8A)], Thread Type: T (NPTF)

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 32, Orifice: 3 (3mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 6 (12VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil)

Model: 31, Orifice: 3 (3mm), Style: 2 (N.O., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 33, Orifice: 4 (4mm), Style: 0 (N.C., Single Unit), Option: M (SS, Seals: FKM, Class B, Oil-free), Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 33, Orifice: 4 (4mm), Style: 0 (N.C., Single Unit), Option: M (SS, Seals: FKM, Class B, Oil-free), Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 6 (12VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: S (w/Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 31, Orifice: 2 (2.2mm), Style: 0 (N.C., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 1 (100VAC 50/60HZ), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier)

Model: 31, Orifice: 1 (1.5mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: L (w/Light), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 33, Orifice: 4 (4mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 7 (240VAC 50/60HZ), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier)

Body Size: 25, Thread: N (NPT), Port: 02 (1/4), Option: E [Square embedded type pressure gauge (with limit indicator)], Attachment: T (T Spacer), Semi-Standard 1: 8J (8 + J), Semi-Standard 2: RZ (R + Z)

Body Size: 25, Thread: N (NPT), Port: 02 (1/4), Option: CE (C + E), Attachment: T (T Spacer), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: RZ (R + Z)

Body Size: 20, Thread: N (NPT), Port: 02 (1/4), Option: Standard, Attachment: T (T Spacer), Semi-Standard 1: 3C (3 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)