Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

2 y o !1 !6 !5 u Parts list No. Description No.

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

DIN terminal Type Y conforming to DIN43650C standard is also available. For details, refer to catalog on page 57. For connector cable of M8 connector, refer to page 67. Note) When placing an order for body ported solenoid valve as a single unit, mounting bolt for manifold and gasket are not attached. Order them separately, if necessary. (For details, refer to catalog on page 40.)

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Air Slide Table/Long Stroke Type Series MXY

1, @2 and @6 each. 12 GR-S-020(20g) MXY12-PS GR-S-050(50g) 223 Series MXY Dimensions 2 x M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M 5P) 2 x M5 x 0.8 Piping port FL (Plug: M-5P) 2 x M5 x 0.8 21 21 FH 2 x M thread depth MM +0.03 0 R RL Width across flats MB (lock plate fixing bolt) PR MA (Stroke

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8

Vacuum Saving Valve

(mm) Model M1 M2 L1 L2 L3 L4 H (Width across flats) D W (g) ZP2V-A5ZP2V-A8ZP2V-A01ZP2V-AG1ZP2V-AN1ZP2V-B5ZP2V-B6ZP2V-B01ZP2V-BG1ZP2V-BN1Tightening torque (Nm) Note) M5 x 0.8 M8 x 1.25 R1/8 G1/8 NPT1/8 M5 x 0.8 M6 x 1 Rc1/8 G1/8 NPT1/8 1.0 to 1.5 5.5 to 6.0 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 1.0 to 1.5 2.0 to 2.5 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 M5 x 0.8 M8 x 1.25 Rc1/8 G1/8 NPT1/8 M5 x 0.8

XLGR Series

Description Common for all sizes Vacuum grease FONMBLIN Y VAC 2Solvay Solexis) 7 XL-OMP0001 3. Specifications Note1) Conductance is molecular flow measured with an elbow pipe which has the same dimension as each applicable flange. Note2) The seal sliding part for vacuum uses vacuum grease (Y-VAC2). Note3) For one cycle of cylinder.

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

Note2) A seal sliding part for vacuum use vacuum grease (Y-VAC2). Note3) For one cycle of cylinder.

XLG Series

Note2) The seal sliding part for vacuum uses vacuum grease (Y-VAC2). Note3) For one cycle of cylinder.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Material Number Description NBR VVQ4000-80A-1 10 Gasket r Option NBR VVQ4000-80A-2 10 Gasket t A C y For 1 station Nil W Standard Stainless steel VVQ4000-80A-4 10 Clip For 2 stations(3) (2) IP65 enclosure is dust Note) Spare parts consist of sets containing 10 pcs. each.

10

1 u w e t y i o !2 No.

ZP

lock ring/Without lock ring) Bellows (B)/With Lock Ring Buffer Mounting Nut Pad diameter: 6 to 8 ZP06B to 08B Model d H B C NTJ-015A 9.2 8 4 M8 x 1 M6 x 1 M5 x 0.8 SNJ-006A 9.2 8 3 SNJ-010A 3 12 13.9 SNJ-015A 16.2 14 3 M10 x 1 M14 x 1 SN-015A 21.9 19 5 Pad diameter: 10 to 50 ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E G 3.3 H 9.1 Y 4 F 13 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10

ZL3-OM00601

They depend on atmospheric pressure (weather, altitude, etc.) and measurement method. *2: Total value of 2 vacuum ports (2/V) of the branch port. *3: 10 to 500Hz. 2 hours in directions of X, Y and Z respectively (not energized, initial value). *4: 3 times in directions of X, Y and Z respectively (not energized, initial value) ZL6 Model No.

IDX-OM-W011

6 IDF11E-10 ILS SYMBOL WIRE COLOR PTC (WH) (BK) 1 2 (BK) AC100/100,110V (50/60Hz) 3 (BU) M (BK) Black 4 C01 S (WH) White CM 4 2 (GR) (GR) Gray PC OLR (SY) C (SY) Sky Blue (SY) C 1 3 (RD) Red FM PRS (RD) (BU) Blue (BK) (G/Y) / Green/Yellow P (BK) IDF11E-20 ILS PTC (50/60Hz) AC200/200,220V 2 1 (BK) 3 M (WH) L S CM (GR) 4 2 (SY) N (G/Y) OLR C (SY) PE 3 1 C TB PRS (RD) (BK) (WH) C11

IDX-OM-Y002

[Note] It is recommended to install valves and pressure gauges to clean the Y shaped strainer easily. By fully closing the valves, it is not necessary to stop the facility water system while cleaning the Y shaped strainer.

Clamp Cylinder with Lock Series CLK1

End bracket Accessories (options) Nil I Y In case of built-in magnets without auto switches, the auto switch type symbol is "Nil".