High performance type Step Motor Controller (Servo/24 VDC)

B2 OUT1 B3 OUT2 Caution B4 OUT3 B5 OUT4 When RESET is turned ON, these terminals are turned OFF. During the alarm, these terminals output the alarm group. B6 OUT5 B7 BUSY This terminal is ON during the movement of the electric actuator. (During the positioning operation, etc.).

LEC-T1_C

OUT mon 1 Output pin0 [ ] Output pin1 [ ] OFF Output pin2 [ ] ON (6-3-4-2) CN5 Output pin LECP,LECA LECPA Output pin0 Output pin0 B1 12 keykey Output pin1 B2 13 Output pin1 Output pin2 B3 14 Output pin3 B4 15 Output pin4 B5 16 Output pin5 B6 17 Output pin6 B7 18 Last output pin Output pin7 B8 19 Output pin8 B9 20 Output pin9 B10 Output pin10 B11 Output pin11 B12 Output pin12 B13 (6

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

B2 OUT1 B3 OUT2 Caution B4 OUT3 When RESET is turned ON, these terminals are turned OFF. During the alarm, these terminals output the alarm group. B5 OUT4 B6 OUT5 B7 BUSY This terminal is ON during the movement of the electric actuator. (During the positioning operation, etc.).

Electric Rotary Table

B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 Dot color Dot mark Insulation color Connector pin no.

0.4

CM Note 1) L3 L4 L6 L8 L5 B3 B4 B6 B8 B5 Metric size Inch size Note 10) G1, G2, or G3 cannot be combined with N.

7.5

6 elbow fitting assembly (SJ3000 only) (Inch size) LN1: 1/8" elbow fitting assembly LN3: 5/32" elbow fitting assembly LN7: 1/4" elbow fitting assembly (SJ3000 only) M: Individual wiring, With lead wire Length 300 mm With switch Manual override Nil: Non-locking push type With linkage printed circuit board Elbow fitting assembly (Downward entry) (Metric size) B2: 2 elbow fitting assembly B4

OMR0031

A5 IN3 A5 IN3 A6 DRIVE A6 DRIVE A7 SVON A7 SVON Internal resistance 10 [k] Internal resistance 10[k] A8 NC A8 NC A9 NC A9 NC Main circuit Main circuit Output signal power Output signal power supply supply A10 NC A10 NC 24 VDC 24 VDC DC2(+) B1 DC2(+) B1 DC2(-) B2 DC2(-) B2 BUSY B3 BUSY B3 B4 ALARM B4 ALARM B5 OUT0 B5 OUT0 B6 OUT1 B6 OUT1 Maximum Output current Maximum Output current B7 NC

5 Port Solenoid Valve, Series VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil Without SI unit/input block (SD0) Without input block With 1 input block Nil DeviceNet PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate

OMR0032

A5 IN3 A5 IN3 A6 DRIVE A6 DRIVE A7 SVON A7 SVON Internal resistance 10 [k] Internal resistance 10[k] A8 NC A8 NC A9 NC A9 NC Main circuit Main circuit Output signal power Output signal power supply supply A10 NC A10 NC 24 VDC 24 VDC DC2(+) B1 DC2(+) B1 DC2(-) B2 DC2(-) B2 BUSY B3 BUSY B3 B4 ALARM B4 ALARM B5 OUT0 B5 OUT0 B6 OUT1 B6 OUT1 Maximum Output current 10 mA Maximum Output current

LA-OMP0023

LATH2LATH5L A T H Terminal Insulator Insulator number colour Dot Dot colour colour A1 Red Light brown Red A2 Grey Black A3 Grey Yellow Red A4 Grey Black Cable length(L) I/O cable type A5 Green Light green Red A6 Grey Black 1 1m 2 Without shield A7 Grey Gray Red A8 Grey Black 3 3m 5 With shield A9 Grey White Red A10 Green Black 5 5m B1 Red Light brown Red B2 Grey Black B3 Grey Yellow Red B4

Fieldbus System

One-touch fitting 1/8" One-touch fitting P P P P 3.2 One-touch fitting 5/32" One-touch fitting Straight Upward Downward Straight Elbow P P P P P 4 One-touch fitting 1/4" One-touch fitting P P P P P 6 One-touch fitting 5/16" One-touch fitting P P P P P 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9 BN3 BN7 BN9 LM P P P P Straight port, mixed sizes 5/32" One-touch fitting L4 L6 L8 B4

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

tBottom porting NwsFR3-olTi4iffi]2-@@ Non plug-in VperNWsFR3-1G G6Eotull-@itel Bottom porting NW5FR3n O@ -*,ir;;.2 -@ (Ertornal pilot otBior porl: x12) inch (mm), n:stations 4 5 7 I 10 Equation L1=1.30xn+2.48 (Lr:33Xn+63) Lr:1.3o x n+2.95 (Lr:33xnt75) 5.08 (ia) 6.38 (162)(1951 8.98 t2n) 10.28 (261) 11.57 (n4) 12.87 tpl) 14.17 t360) 15.47 (3S3) L2 5.55 041) 6.86 (1741 8J5 (2071 9.45 (240)

-fl Seies

tBottom porting NwsFR3-olTi4iffi]2-@@ Non plug-in VperNWsFR3-1G G6Eotull-@itel Bottom porting NW5FR3n O@ -*,ir;;.2 -@ (Ertornal pilot otBior porl: x12) inch (mm), n:stations 4 5 7 I 10 Equation L1=1.30xn+2.48 (Lr:33Xn+63) Lr:1.3o x n+2.95 (Lr:33xnt75) 5.08 (ia) 6.38 (162)(1951 8.98 t2n) 10.28 (261) 11.57 (n4) 12.87 tpl) 14.17 t360) 15.47 (3S3) L2 5.55 041) 6.86 (1741 8J5 (2071 9.45 (240)

ZP

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

Free Mount Cylinder

Symbol 2 to 8 10 to 16 40, 50 20 to 32 U C D B Flat Flat with ribs Deep Bellows B4 M4 x 0.7 Symbol Applicable cylinder model Female thread M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Application: Refer to Table (1). Nil ZC(D)UK 16/32 M10 x 1.25 B10 Note) -X11 Pad: 2 to 8 diameter and flat style only available.

5-Port Solenoid Valve

V N7 1/4" V V V V V N9 5/16" V V V V N11 3/8" V V 2 V C3 3.2 V C4 4 V V V C6 6 V V V V V C8 8 V V V V C10 10 V V C12 12 V V Straight Straight D-sub, Flat Ribbon CM*1 Straight port, mixed sizes V V V V V LN3 5/32" V LN7 1/4" V V LN9 5/16" V Terminal Block Upward CM*1 Straight port, mixed sizes V V V V V L4 Lead Wire 4 V V L6 6 V V V L8 8 V V L10 10 V L12 12 V B4

Fieldbus System

CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9 BN3 BN7 BN9 Straight port, mixed sizes 5/32" One-touch fitting Upward Downward L4 L6 L8 B4

VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil DeviceNet Nil Without SI unit/input block (SD0) Without input block With 1 input block PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate

0.5

B4 Yellow Maintenance signal OUT (A contact) A1 A5 Turns OFF if power supply failure, incorrect high voltage, fan motor failure, CPU failure, excess current on the output circuit, emitter cartridge mounting failure, or automatic cleaning failure (for product with automatic cleaning function) is detected.

25

B4 Yellow Maintenance detection signal OUT(Contact point A) Turns ON when electrode needs cleaning. Turns OFF when power supply failure, ion discharge error, connected sensor failure, or CPU operation failure. (ON when there is no problem.) A5 Purple Error signal OUT(Contact point B) B5 White Unused Confirm the power supply cable dimensions on page 434 for the cable specifications.