Type: Base Mounted, Valve Option: Standard Type, Rated Voltage: 24 VDC, Electrical Entry: Grommet, Lead Wire 300mm, Light/Surge Voltage Suppressor: None, Port Size: None, Thread: Rc, Bracket: None, CE-Compliant: CE-compliant

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: Individual EXH, Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: w/o Subplate, Bracket: None, CE-Compliant: Q (CE-Compliant)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: w/o Sub-plate, Thread: Rc, Bracket: None, CE-Compliant: Q (CE-Compliant)

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Others, Plumbing Thread Nominal: -, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Base Mounted Type,

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

air-filter-e

Specifications Model FGDCA FGDCB FGDEA FGDEB FGDTA FGDTB FGDFA FGDFB Number of elements 1 2 Note) 1 2 Note) 1 2 Note) 1 2 Note) 65 x L500 (L250 x 2) Aluminum SPCD 65 x L500 (L250 x 2) SCS14 Stainless steel 316 65 x L500 (L250 x 2) SCS14 Stainless steel 316 65 x L500 (L250 x 2) Element size 65 x L250 65 x L250 65 x L250 65 x L250 Cover Case Gasket/ O-ring Seal Aluminum SPCD Main materials

Air Preparation Equipment

Specifications Model FGDCA FGDCB FGDEA FGDEB FGDTA FGDTB FGDFA FGDFB Number of elements 1 2 Note) 1 2 Note) 1 2 Note) 1 2 Note) 65 x L500 (L250 x 2) Aluminum SPCD 65 x L500 (L250 x 2) SCS14 Stainless steel 316 65 x L500 (L250 x 2) SCS14 Stainless steel 316 65 x L500 (L250 x 2) Element size 65 x L250 65 x L250 65 x L250 65 x L250 Cover Case Gasket/ O-ring Seal Aluminum SPCD Main materials

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Digital Flow Switches Series PF2A

DC (+) q 6 Red CH3_OUT1 5 Gray CH2_OUT1 4 White N.C. 3 Black CH1_OUT1 2 Blue DC() 1 Brown DC(+) DC () w CH1_OUT1 e N.C. r CH2_OUT1 t 2000 CH3_OUT1 y CH4_OUT1 u N.C. i Internal circuits and wiring examples PF2A200 PF2A201 DC (+) DC (+) 4 3 2 1 4 3 2 1 (Brown) (Brown) Sensor Sensor Sensor + Load Load Load Load + NC NC 24 VDC CH1_OUT1 CH1_OUT1 24 VDC (Black) (Black) 4 3 2 1 4 3 2 1 Load Load

Power Valve: Economy Valve Series VEX5

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

Plate Cylinder

Calculation: (Example 1) MUB40-15S(T)Z Basic weight 0.60 kg (Example 2) MUC50-5S(T)Z Basic weight 1.02 Mounting bracket weight 0.40 1.02 + 0.40 = 1.42 kg 15 Plate Cylinder: Single Acting, Spring Return/Extend Series MU Construction Spring return q !8 !4 !1 r !0 !2 w y e u t !6 i o !7 B !3 B section MU25 Spring extend w i !0 o !8 t !5 q !7 r e u !1 !2 !6 y !4 A B !

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

15

QW PW GP W 2 x P (Piping port) 2 x UU (Bumper bolt) HP HA HG 2 x For holding switch rail GA G A L A G R GA 5.3 (6.9) 2 x 2 x Counterbore diameter B 14 Square nut 2 x 2 x Counterbore depth C K 18.5 Q + Stroke GB (NA) GB 2 x NN (Adjustment bolt) (NF) (NC) (NB) (NC) (NE) 2 x Shock absorber Amount of stroke adjustment Y2 Y1 Adjustment bolt Shock absorber Bumper bolt CY3B CY3R R1 R1 With shock

Series IDG

Note 2) Note 2) Flow direction (rightleft) R S Standard equipment With dew point indicator In case of two or more options, indicate them in an alphabetical order.