HAW

(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 15000 18000 20 45 48.5 52 45 39 40 42.5 41 43 45.5 34.5 35.5 36 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air.

XLAQ/XLDQ

) r Body (Material: A6063) Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 41 (Base Mounted), Stations: 12 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

KB

12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04 KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection thread Applicable tubing O.D. 4 Model Model KBH1-R1S KBH2-R1S KBH2-R2S KBE1-04 KBE1-06 KBE2-06 R 1 8 Air Supply Port: KBE, KBH, KBB, KBS, KBL (P. 15-3-114, 115) 6 KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R 1 2

Manifold Specifications

Non plug-in type Thread type 02 2 stations Standard Nil NPT Rc N T F Symbol 24 24 stations NPTF G Option VV5ZS2-51FD-091-01-MP5 VZS2150-5FZ VZS2250-5FZ 1 5 2 Note) Maximum stations 51F 16 stations 51G15 stations 51 24 stations Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol Port size 1 1 8 01 Rc (Manifold base) (2 position single) VV5ZS2-51-071-01-M5

5 Port Air Operated Valve

(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported

Body Ported Type Vacuum Ejector ZH Series

ZH05DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH05DA07 07 07 One-touch One-touch One-touch 07 N01 07 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH07DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH07DA07 07

KJ

1 4 11.11 12 10 13.6 39 35 1 8 Reference dimensions after NPT thread installation.

VR4151/4152

7 A(2) port P2(12) port !4 !3 w !2 !

ASR

71.1 63.6 28 62.9 55.4 24.1 314 332 22 34.4 76.6 12 20.9 Note 1) d indicates the applicable tubing O.D..

Vacuum Pad: Ball Joint Type

N: M8 x 1.25 Model A B C D Model ZPT10F-B5 F NL P F NL P F P 10 12 10 12.5 27 1.5 ZPT13F-B5 ZPT20F20 22 13 15 32 36 36 12.5 15.5 10.5 13 27.5 ZPT16F-B5 ZPT25F5 9 8 12 14 2 25 28 16 18 ZPT32F32 36.5 36.5 13 16 32 35 40 50 B8 01 ZPT F(Without buffer/Female thread) Hexagon width across flats P N NL Hexagon width across flats 19 F D C Y 2.5 A B Dimensions (mm) N: 1/8 (Rc, NPT, NPTF) N: M8 x

DM

Cover mounting area Cover How to Order N 04 DM 6 Number of connecting tubes Accessory (Option) 1 cover (Single side) 2 covers (Both sides) C1 C2 6 12 6 12 Style Tube material Nil P S Multi-connector Plug side Socket side N Nylon Soft nylon Polyurethane NU Tubing O.D. 4 mm 6 mm 04 06 15-2-101 Series DM Dimensions: DM6/12 DM6 Panel mounting hole (with the cover at socket side) Panel mounting

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

Serial Network

Allen-Bradley PLC 1747-L524, list price: $770 as of 10/01 2. Allen-Bradley I/O card 1740OB, list prices: $280 as of 10/01 3. Allen-Bradley Scanner module 1747 SN, list price: $995 as of 10/01 4. Wiring costs are estimated at $10/point and $100/node for SI system. Your costs may vary. 5.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32

-ASD330F-01-08 10-ASD230F-M5-06 2.

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12