Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For double vane style, rotation tolerance of 90 actuators will be for size 10 actuators only. 11-3-6 41 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Construction: 10, 15, 20, 30, 40 Single vane type Standard: CRBU2W10/15/20/30/40-S (3 female threads (one of them is indicated with ) spaced equally apart in 120 are not available for size 10.)

Compact Cylinder with Solenoid Valve/

Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For double vane style, rotation tolerance of 90 actuators will be for size 10 actuators only. 11-3-6 41 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Construction: 10, 15, 20, 30, 40 Single vane type Standard: CRBU2W10/15/20/30/40-S (3 female threads (one of them is indicated with ) spaced equally apart in 120 are not available for size 10.)

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 D FC GC 6 8 11 15 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 9 12.5 16.5 20 24.5 2.6 3.3 5.1 6.8 8.6 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

Compact Cylinder

Auto Switch Internal Circuit D-A90(V) Contact protection box OUT () Brown Reed switch Unit: g Weight CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Auto switch model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93(V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93

CP95

5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71

RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 IY-G02 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 0.2 0.4 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 IY-G03 10 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04 Y-G04 32, 40 10

RLQ

ML1C Rear flange style: RLQG63 D-X 60 80 204-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Data Rod end nut 43.5 4-M8 x 1.25 Cap bolt 8 Double clevis style: RLQD63 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 9-12-17 18 Series RLQ Dimensions: Cylinder with Bypass Piping RLQB32-B RLQB32-F Extension locking, Right-hand piping

Voltage Monitor for PFMV5

(page 41) Perform the standard value offset under no flow conditions.

PF-OMN0011_C

[F20] 45 [F22] 46 OFF [F30] 48 OFF [F80] 49 () [F81] 50 OFF [F82] 51 [*] [F90] 52 OFF [F96] 53 () [F97] 54 OFF [F98] 57 OFF [F99] 58 OFF 30 [F10](41 ) (4 L/min ) OUT1 OUT1 OFF OUT2 -24No.PF-OMN0011CN-C [F 0] 2 [F 0] [RANGE] [F 0] -25No.PF-OMN0011CN-C [F 1] OUT1 OUT1 1.

Digital Flow Switch (Integrated display type) ( compatible)

Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.

LFE-OMZ0011

Apply a tool Width across flats of attachment Port size Width across flats 3/8 24 mm 1/2 28 mm 3/4 35 mm Turn the pipe 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

IZx-OMX0087

Product number for single unit (to order separately) Table for combination High voltage power supply module / IZTP Controller / IZTC Ion generator (nozzle) / IZTN43 43 43-L 41 41-L IZT43 IZT43-L Transistor input/output type controller and high voltage power supply module and IO-Link type controller and high voltage power supply voltage cannot be mixed.

HRX-OM-S004

SV 41. Set the product operation when "Pump maintenance" alarm is generated with [] key or [] key, and press [SEL]key to enter. Table 5.20-28 Operation setting when "Pump maintenance" alarm is generated Set value Explanation Initial value (Default setting) This alarm is not detected.

HRX-OM-Q026

PV SV HRSH Series 5.17 Pump Operation Mode Setting 5-41 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions 5.18 Warming Up Function 5.18.1 Warming up function Keep the power supply ON for this function. This function does not operate when the power is OFF.

JXCx-OMU0004

CNI/O . 20 6.1 . 20 6.2 (NPNPNP ) . 20 1 No.JXC-OMU0004-A (1) I/O (NPNPNP ) . 20 (2) I/O . 20 6.3 . 21 6.4 I/O . 23 7. . 24 7.1 . 25 7.2 . 32 7.3 . 35 A . 36 B . 37 C . 38 7.4 . 39 8. . 40 8.1 . 40 8.2 . 41 8.3 . 41 1 . 41 2 . 42 3 . 42 8.4 . 43 8.5 ON . 44 8.6 . 44 8.7 LED . 45 9. () . 46 9.1 . 46 9.2 . 47 9.3 . 48 9.4 . 49 10. . 50 10.1 LEF . 50 10.2 LEH . 53 10.3

Compact Vacuum Unit Ejector/ Vacuum Pump System

Note 2) Refer to the General Specifications on P.41 for the specifications not shown in this table. 44 - Doc. no.

Filter Regulator

Disassembly Drawing 41-44 13. Dimensions 45-47 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Air Combination

PC/PA bowl Metal bowl Metal bowl with level gauge model barb fitting With drain guide With drain guide With auto drain Drain cock with With drain guide AC20B-D AC30B-D to AC60B-D Standard specifications G Model P1 P2 A B Bracket mount C E J K F M Q1 Q2 R S U V1 V2 AC20B-D 1/8 83.2 87.6 26.5 41.6 25 21 2 30 24 33 5.5 11.5 3.5 29 38 1/8, 1/4 AC30B-D 1/8 110.2 115.4 30.5 30 55.1 35 26.5 3.5 41