Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Model: 3 (VPA300), Exhaust Type: 41 (Common Exhaust), Stations: 17 Stations, Symbol: 1, Port Size: 02 (1/4)

Manifold Type: 41 (Base Mounted, Bar Manifold, Compact, Individual Wiring), Valve Stations: 17 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Manifold Type: 41 (Base Mounted, Bar Manifold, Compact, Individual Wiring), Valve Stations: 17 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Manifold Type: 41 (Base Mounted, Bar Manifold, Compact, Individual Wiring), Valve Stations: 17 Stations, A, B Port: C6F (ø6 One-touch Fitting G)

Manifold Type: 41 (Base Mounted, Bar Manifold, Compact, Individual Wiring), Valve Stations: 17 Stations, A, B Port: 01T (NPTF1/8)

Manifold Type: 41 (Base Mounted), Valve Stations: 17 Stations, A, B Port: N7 (1/4" One-touch Fitting)

Manifold Type: 41 (Base Mounted), Valve Stations: 17 Stations, A, B Port: N7T (1/4" One-touch Fitting NPTF)

Manifold Type: 41 (Base Mounted), Valve Stations: 17 Stations, A, B Port: N3N (5/32" One-touch Fitting NPT)

Manifold Type: 41 (Base Mounted), Valve Stations: 17 Stations, A, B Port: C6 (ø6 One-touch Fitting)

SFOD-OMT0011CN

Stop (2) JOG a) View (V) 4.1 (1-1-2) View (V) b) 4.5 JOG c) JOG+/EMGx OFF OFF JOG : Stop EMGx OFF OFF Stop EMGx OFF OFF (EMGx)EMGx No.SFOD-OMT009 Stop Stop (3) 1 a) View (V) 4.1 (1-1-2) View (V) 40 No.SFOD-OMT0011CN-A b) Remote mode ON SVRE ON c) All axes Return to Origin d) Execute d) start e) Stop EMGx OFFOFF Stop (EMGx)EMGx No.SFOD-OMT009 Stop USB OFF, 41

E-MY2B_E_A

. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30) 1342 6076 SWITZERLAND / (41) 52-396 3131 HUNGARY / (36) 1-371 1343 TURKEY / (90) 212 221 1512 IRELAND / (353) 1-403 9000

SI Unit for Vacuum Manifold

Troubleshooting 41 -2No.EX-OMY0014-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Dimensions (page 17) for necessary space. (5) Install vertically so that outlet of drain is facing downward. It cannot be used in horizontal or upward direction. Caution (1) When the bowl is installed on HF2-BF series, install them so that the lock button lines up to the groove of the front (or the back) of the body to avoid drop or damage of the bowl.

Micro Mist Separator

. -17- D Note 1) D Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port thread ty pe (4) Part No. (4) Part No. thread ty pe Rc Rc AD48-2-A AD48-D G G NPT AD48N-2(Z)-A NPT AD48N(-Z)-D Appearance and Semi-standard: 6 part No.