KS/KX

<M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.

Electric Slide Tables

Use bolts that are between the maximum and minimum screw-in depths in length. 42 Series LESH Dimensions: Symmetrical Type/L Type LESH16L depth 5 5 +0.03 +0.01 3 x M5 x 0.8 thread depth 8 (D/2 1) x C C A-A 19 5.5 13 G x M6 x 1 thread depth 12 D x M5 x 0.8 thread depth 6.5 Note 4) 37 2.5 45 29 A 10.5 9.5 5.1 24 72.5 2 Motor cable (2 x 5) 22.5 17.5 9 35.5 depth 5 +0.03 +0.01 5 A 15.5 17 35

3 Port Solenoid Valve Series VQ100 1

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

3 Port Solenoid Valve Series VQ100

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

3 Port Solenoid Valve Series VQ100 1

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

Low Profile Slide Table Series MXF

x 0.8 Note) N x M5 x 0.8 thread depth 9.5 60 (Insert) 5H9 +0.030 0 depth 5 A 12 8.5 6 78 9 64 15 22 30 33.5 25 51.5 37 5H9 depth 5 +0.030 0 92 NN x 4.2 NN x 8 26 11.5 8.5 H 2 x M5 x 0.8 thread depth 12 5.5 NN x M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2 x M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 J 12 Z 3 ZZ Max. 9.5 Note) If long bolts are

Speed Controller: Standard Type In-line Type AS Series

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 652 AS Series Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS-F 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions Reference dimensions Note 1) Dimension for AS1000-M5-N AS-FE

MXF

Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 37 CX 5H9 depth 5 +0.030 0 5H9 depth 5 +0.030 0 92 DNN-4.2 26 11.5 NN-8 -X 208.5 H 2-M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ

Precision Cylinder Series MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

34 18.5 12.6 9.2 35 4.5 7.5 29h9 29.5h9 14H9 5.3 2.5 4.2 10 3.3 6 3.5 2.2 5.3 4 M5 x 0.8 M4 x 0.7 3 5.5 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 7.5 4.5 2.5 6 4 M5 x 0.8 M5 x 0.8 7 5.5 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 2.5 6 5 (mm) JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting

Precision Clean Regulator

SRP1-M5 SRP1-01 Pressure gauge part no.

48

x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

Compact Cylinder/Guide Rod Type Series CQM

x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 110L x 135L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 115L x 140L M6 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 120L x 145L 25 30 35 40 45 50 25 30 35 40 45 50 25 30

180

interference with the attachment or main body. 708 MHY2 Series 180 Angular Type Air Gripper Cam Type MHY2-20D 2 x M5 x 0.8 thread depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 4H9 + 0.030 depth 4 0 4 x M4 x 0.7 through (Thread for mounting attachment) 8 4 x M5 x 0.8 thread depth 10 10 0.005 0.025 (Mounting thread) 5 9 2 x 5.5 through (Mounting hole) 2 x M5 x 0.8 thread depth 10

Compact Guide Cylinder Series MGQ

x 0.8 7 14 48 10, 20, 30, 40, 50, 75, 100 43 33 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 16 52 47 37 10 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 7 18 60 Rc1/8 NPT1/8 G1/8 G1/8 20, 30, 40, 50, 75, 100 125, 150, 175, 200 12 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 8 26 70 Rc1/8 47.5 37.5 NPT1/8 Bore size T TA TB U V W X YY YL Z S (mm) 12 16 20 25 22 56 2 5 36 40 5 50

PSE200

Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

Slider Type/Ball Bushing Bearing

x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB Z 194 205 250 ZZ 17.5 19.5 23.5 CY1F CY1H15 CY1H20 CY1H25 CYP 11.3 9.5 D-X Technical