Electric Rotary Table

22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 11 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series

Compact manifold regulator ARM5 Series

Compact Manifold Regulator ARM5 Series ARJ Width 14 mm Width 14 mm The One-touch fitting size can be changed. AR425 to 935 ARX OUT side AMR ARM ARM ARP Elbow IR-A IR IRV Straight VEX IN side SRH 14 mm Single Unit / Individual Supply Type SRP Fitting type Applicable tubing O.D. Metric Inch 4 6 8 Actual size Port location SRF 5/32 1/4 5/16 2 mounting types are available.

MG

1 32 1 10 50 100 200 0.2 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-14 Compact Guide Cylinder Series MGP Horizontal Mounting (Slide bearing) MGPM12 to 100 (13) l = 50 mm, V = 200 mm/s (14) l = 100 mm, V = 200 mm/s 50 50 100 100 100 100 80 80 80 80 50, 63 50, 63 50, 63 MX 50, 63 32, 40 32, 40 32, 40 10 10 MTS 32, 40 25 25 20 20 MY 5 5 Load weight m (kg) Load weight

VM

Push button VM1010-4N-32 VM1010-4NU-32 VM1110-4N-32 VM1110-4NU-32 JIS Symbol/2 port 3 port Panel mounting hole 0.5 MPa supply Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4NU-32 VM1010-4NU-32 VM1110-4N-32 VM1010-4N-32 Bottom ported 3 port 2 port 6 N F.O.F.

mlu

I-MU02 I-MU03 I-MU04 I-MU05 E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 Applicable pin no.

Guide Cylinder/Compact Type Series MGC

25 32 40 50 20 25 32 40 50 20 25 32 40 50 100 st or more 119 250 to 400 14 88 125 st or more 131 350 to 500 14 88 150 st or more 136 350 to 600 14 90 200 st or more 156 350 to 800 15 101 250 st or more 202 350 to 1000 16 116 Note 1) Dimensions marked with are not required for the one without rear plate.

Air Slide Table Series MXQ

J 17 28 40 52 78 105 I 11 10 12 14 13 12 H 25 28 31 29 30 NN 2 2 3 3 4 4 G 7 14 8 8 31 N 4 4 6 6 6 6 HA 19 28 27 31 58 60 Model F 25 25 26 32 46 50 GA 13 14 29 39 37 61 KA 82.5 112.5 NA 4 4 4 4 8 8 MXQ8L-10 MXQ8L-20 MXQ8L-30 MXQ8L-40 MXQ8L-50 MXQ8L-75 Note) Note) Note) Refer to the bottom view of MXQ8L-30. 104 Air Slide Table Series MXQ With shock absorber (8): MXQ8L-BS/BT/B MXH Stroke

EX120/121/122

SAS7: 8/8 (2 slave units) SAS9: 4/4 64/64 SAS3: 8/8 (2 slave units) SAS5: 4/4 Occupied area (Number of inputs/outputs) (2 stations, remote device station) 32/32 48/32 48/32 32/32 32/32 Terminal resistor Not applicable 18 V to 30 VDC (Supplied by CANopen circuit) 11 to 25 VDC (Supplied by DeviceNet circuit) 26.5 to 31.6 VDC (Supplied by AS-i circuit) Note 4) 26.5 to 31.6 VDC (Supplied by

Integrated Controller

For details, refer to pages 29 to 32.

MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

One-touch Fittings Series KQ2

Weight (g) D L A M 5 32 3 16 1 4 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 KQ2R01-03 KQ2R01-05 KQ2R01-07 KQ2R03-05 KQ2R03-07 KQ2R05-07 KQ2R05-09 KQ2R07-09 KQ2R07-11 KQ2R09-11 KQ2R09-13 KQ2R11-13 7 32 32 24 19 17 14 4 9 8 9 7 2 9.6 34.5 18.5 17.5 17 1 8 15.5 2.5 9.2 34 10 34 34.5 34.5 36.5 37 39 40 41 42.5 5 32 16 17.5 3 10.4 11.4 10.7 18.5 18 18.5 18 3 16 16.5 3.5 1 4 12.5 17 4.6 5 16 14 18.5

Basic Type/Direct Mount Type

CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM

SMC Pneumatic Clean Series

38 46 F 2 2 2 2 B 40 44 53 61 E 12 14 18 25 Bore size 20 25 32 40 76 92 104 128 30 32 2 2 58 70 9 11 9 9 40 3 82 11 11 50 3 100 14 14 Note) End boss is machined on the flange for E.

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

SYJ300/500/700

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Hygienic Design Cylinder Series HY

1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 M16 x 2.0 depth 21 M20 x 2.5 depth 27 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 18 18 20 26 32 32 37 42 12 14 18 25 30 32 40 50 3 3 3 3 3 3 3 3 2 2 2 2 2 2 3 3 13 13 10 10 10 10 12 12 16 16 10 10 10 15 15 15 20 20 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M10

KG

30 24.5 28.5 12 14 22 8 14 18.2 26.3 15.2 18.5 12 23 3 8 KGT08-03 17 30.5 31.5 36 Connection thread 1 8 KGT10-01 27 32 31 1 4 3 8 KGT10-02 KGT10-03 33 34.5 30 32 17 29 2-applicable tubing 10 29.0 40.8 18.5 21 17 26.5 39 1 2 KGT10-04 36 37 66 31 41 22 1 4 3 8 KGT12-02 KGT12-03 35.5 37 31 33 17 12 45.2 57.2 20.9 22 17 28.5 1 2 KGT12-04 37 39.5 22 68 3 8 KGT16-03 26.5 38 20.9 34 25 71 (

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Table of Contents

No jump destination 32 No label found at the program designated jump destination. Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT.

Step Motor Controller

Refer to the dimensions on page 52 for the mounting dimensions. (35) (25) L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5 385.5